High repetition rate UV ultrafast laser inscription of buried channel waveguides in Sapphire: Fabrication and fluorescence imaging via ruby R lines

Antonio Benayas; Daniel Jaque; Ben McMillen; Kevin P. Chen

doi:10.1364/OE.17.010076

High repetition rate UV ultrafast laser inscription of buried channel waveguides in Sapphire: Fabrication and fluorescence imaging via ruby R lines

Antonio Benayas, Daniel Jaque, Ben McMillen, and Kevin P. Chen

Optics Express
Vol. 17,
Issue 12,
pp. 10076-10081
(2009)
•https://doi.org/10.1364/OE.17.010076

Get Citation
Copy Citation Text
Antonio Benayas, Daniel Jaque, Ben McMillen, and Kevin P. Chen, "High repetition rate UV ultrafast laser inscription of buried channel waveguides in Sapphire: Fabrication and fluorescence imaging via ruby R lines," Opt. Express 17, 10076-10081 (2009)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get PDF (587 KB)
Set citation alerts
Save article

Related Topics
Table of Contents Category
- Laser Microfabrication
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Fluorescence microscopy (180.2520)
- Waveguides (230.7370)

About this Article
History
- Original Manuscript: April 10, 2009
- Revised Manuscript: May 22, 2009
- Manuscript Accepted: May 24, 2009
- Published: June 1, 2009

Accessible

Open Access

Abstract

We report on the fabrication of buried cannel waveguides in Sapphire crystals by 250-kHz high repetition rate ultrafast laser inscription with 385 nm pulses. The propagation properties of the waveguides were studied as a function of the writing conditions. The micro-fluorescence analysis of the R lines generated by trace Cr³⁺ dopant in Sapphire is used to elucidate the micro-structural modifications induced in the crystal network. It is revealed that waveguide has been formed due to local dilatation of the Sapphire network generated in the surroundings of the focal volume. The refractive index increment due to the dilatation induced electronic polarizability enhancement has been estimated to be of the order of Δn ≈10⁻⁴.

Full Article | PDF Article

OSA Recommended Articles

Confocal Raman imaging of optical waveguides in LiNbO3 fabricated by ultrafast high-repetition rate laser-writing

Airán Ródenas, Amir H. Nejadmalayeri, Daniel Jaque, and Peter Herman
Opt. Express 16(18) 13979-13989 (2008)

Waveguide inscription in Bismuth Germanate crystals using high repetition rate femtosecond lasers pulses

Christopher Miese, Simon Gross, Michael J. Withford, and Alexander Fuerbach
Opt. Mater. Express 5(2) 323-329 (2015)

Rapid thermal annealing in high repetition rate ultrafast laser waveguide writing in lithium niobate

Amir H. Nejadmalayeri and Peter R. Herman
Opt. Express 15(17) 10842-10854 (2007)

References

View by:
Article Order
|
Year
|
Author
|
Publication

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]
R. R. Thomson, S. Campbell, I. J. Blewett, A. K. Kar, and D. T. Reid, “Optical waveguide fabrication in z-cut lithium niobate using femtosecond pulses in the low repetition rate regime,” Appl. Phys. Lett. 88(11), 111109 (2006).
[Crossref]
G. Cerullo, R. Osellame, S. Taccheo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta, and S. De Silvestri, “Femtosecond micromachining of symmetric waveguides at 1.5 microm by astigmatic beam focusing,” Opt. Lett. 27(21), 1938–1940 (2002).
[Crossref]
C. B. Schaffer, J. F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys., A Mater. Sci. Process. 76, 351–354 (2003).
[Crossref]
L. Shah, A. Arai, S. Eaton, and P. R. Herman, “Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate,” Opt. Express 13(6), 1999–2006 (2005).
[Crossref] [PubMed]
B. McMillen, K. P. Chen, H. An, S. Fleming, R. B. Balili, and D. Snoke, “Waveguiding and electro-optic chracteristics of three-dimensional waeguides in LiTaO3 written by high-repetition rate ultrafast laser,” Appl. Phys. Lett. 93, 111106 (2008).
[Crossref]
A. H. Nejadmalayeri and P. R. Herman, “Rapid thermal annealing in high repetition rate ultrafast laser waveguide writing in lithium niobate,” Opt. Express 15(17), 10842 (2007).
[Crossref] [PubMed]
Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]
J. H. Kim, M.-K. Chen, C. E. Yang, J. Lee, S. S. Yin, P. Ruffin, E. Edwards, C. Brantley, and C. Luo, “Broadband IR supercontinuum generation using single crystal sapphire fibers,” Opt. Express 16(6), 4085–4093 (2008).
[Crossref] [PubMed]
V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]
A. A. Anderson, R. W. Eason, L. M. B. Hickey, M. Jelinek, C. Grivas, D. S. Gill, and N. A. Vainos, “Ti:sapphire planar waveguide laser grown by pulsed laser deposition,” Opt. Lett. 22(20), 1556–1558 (1997).
[Crossref]
A. Crunteanu, M. Pollnau, G. Jänchen, C. Hibert, P. Hoffmann, R. P. Salathé, R. W. Eason, C. Grivas, and D. P. Shepherd, “Ti:sapphire rib channel waveguide fabricated by reactive ion etching of a planar waveguide” Appl. Phys. B 75, 15–17 (2002).
[Crossref]
V. Apostolopoulos, L. Laversenne, T. Colomb, C. Depeursinge, R. P. Salathe, M. Pollnau, R. Osellame, G. Cerullo, and P. Laporta, “Femtosecond-irradiation-induced refractive-index changes and channel waveguiding in bulk Ti:Sapphire,” Appl. Phys. Lett. 85(7), 1122–1124 (2004).
[Crossref]
R. A. Forman, G. J. Piermarini, J. D. Barnett, and S. Block, “Pressure measurements made by the utilization of Ruby sharp-line luminescence,” Science 176(4032), 284–285 (1972).
[Crossref] [PubMed]
Q. Ma and D. R. Clarke, “Stress measurements in single-crystal and polycrystalline ceramics using their optical fluorescence,” J. Am. Ceram. Soc. 76(6), 1433–1440 (1993).
[Crossref]
I. Horcas, R. Fernández, J. M. Gómez-Rodríguez, J. Colchero, J. Gómez-Herrero, and A. M. Baro, “WSXM: a software for scanning probe microscopy and a tool for nanotechnology,” Rev. Sci. Instrum. 78(1), 013705 (2007).
[Crossref] [PubMed]
N. M. Balzaretti, J. P. Denis, and J. A. H. da Jornada, “Variation of the refractive index and polarizability of sapphire under high pressures,” J. Appl. Phys. 73(3), 1426–1429 (1993).
[Crossref]
S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

2008 (2)

B. McMillen, K. P. Chen, H. An, S. Fleming, R. B. Balili, and D. Snoke, “Waveguiding and electro-optic chracteristics of three-dimensional waeguides in LiTaO3 written by high-repetition rate ultrafast laser,” Appl. Phys. Lett. 93, 111106 (2008).
[Crossref]

J. H. Kim, M.-K. Chen, C. E. Yang, J. Lee, S. S. Yin, P. Ruffin, E. Edwards, C. Brantley, and C. Luo, “Broadband IR supercontinuum generation using single crystal sapphire fibers,” Opt. Express 16(6), 4085–4093 (2008).
[Crossref] [PubMed]

2007 (2)

A. H. Nejadmalayeri and P. R. Herman, “Rapid thermal annealing in high repetition rate ultrafast laser waveguide writing in lithium niobate,” Opt. Express 15(17), 10842 (2007).
[Crossref] [PubMed]

I. Horcas, R. Fernández, J. M. Gómez-Rodríguez, J. Colchero, J. Gómez-Herrero, and A. M. Baro, “WSXM: a software for scanning probe microscopy and a tool for nanotechnology,” Rev. Sci. Instrum. 78(1), 013705 (2007).
[Crossref] [PubMed]

2006 (1)

R. R. Thomson, S. Campbell, I. J. Blewett, A. K. Kar, and D. T. Reid, “Optical waveguide fabrication in z-cut lithium niobate using femtosecond pulses in the low repetition rate regime,” Appl. Phys. Lett. 88(11), 111109 (2006).
[Crossref]

2005 (1)

L. Shah, A. Arai, S. Eaton, and P. R. Herman, “Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate,” Opt. Express 13(6), 1999–2006 (2005).
[Crossref] [PubMed]

2004 (2)

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

V. Apostolopoulos, L. Laversenne, T. Colomb, C. Depeursinge, R. P. Salathe, M. Pollnau, R. Osellame, G. Cerullo, and P. Laporta, “Femtosecond-irradiation-induced refractive-index changes and channel waveguiding in bulk Ti:Sapphire,” Appl. Phys. Lett. 85(7), 1122–1124 (2004).
[Crossref]

2003 (1)

C. B. Schaffer, J. F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys., A Mater. Sci. Process. 76, 351–354 (2003).
[Crossref]

2002 (2)

A. Crunteanu, M. Pollnau, G. Jänchen, C. Hibert, P. Hoffmann, R. P. Salathé, R. W. Eason, C. Grivas, and D. P. Shepherd, “Ti:sapphire rib channel waveguide fabricated by reactive ion etching of a planar waveguide” Appl. Phys. B 75, 15–17 (2002).
[Crossref]

G. Cerullo, R. Osellame, S. Taccheo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta, and S. De Silvestri, “Femtosecond micromachining of symmetric waveguides at 1.5 microm by astigmatic beam focusing,” Opt. Lett. 27(21), 1938–1940 (2002).
[Crossref]

2001 (2)

S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

1997 (1)

A. A. Anderson, R. W. Eason, L. M. B. Hickey, M. Jelinek, C. Grivas, D. S. Gill, and N. A. Vainos, “Ti:sapphire planar waveguide laser grown by pulsed laser deposition,” Opt. Lett. 22(20), 1556–1558 (1997).
[Crossref]

1996 (1)

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

1993 (2)

Q. Ma and D. R. Clarke, “Stress measurements in single-crystal and polycrystalline ceramics using their optical fluorescence,” J. Am. Ceram. Soc. 76(6), 1433–1440 (1993).
[Crossref]

N. M. Balzaretti, J. P. Denis, and J. A. H. da Jornada, “Variation of the refractive index and polarizability of sapphire under high pressures,” J. Appl. Phys. 73(3), 1426–1429 (1993).
[Crossref]

1972 (1)

R. A. Forman, G. J. Piermarini, J. D. Barnett, and S. Block, “Pressure measurements made by the utilization of Ruby sharp-line luminescence,” Science 176(4032), 284–285 (1972).
[Crossref] [PubMed]

An, H.

Anderson, A. A.

Apostolopoulos, V.

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

Arai, A.

Balili, R. B.

Balzaretti, N. M.

Barnett, J. D.

Baro, A. M.

Blewett, I. J.

Block, S.

Brantley, C.

Campbell, S.

Cerullo, G.

Chen, K. P.

Chen, M.-K.

Clarke, D. R.

Q. Ma and D. R. Clarke, “Stress measurements in single-crystal and polycrystalline ceramics using their optical fluorescence,” J. Am. Ceram. Soc. 76(6), 1433–1440 (1993).
[Crossref]

Colchero, J.

Colomb, T.

Crunteanu, A.

da Jornada, J. A. H.

Davis, K. M.

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

De Silvestri, S.

Denis, J. P.

Depeursinge, C.

Eason, R. W.

Eaton, S.

Edwards, E.

Fernández, R.

Fleming, S.

Forman, R. A.

Garcia, J. F.

Gill, D. S.

Gómez-Herrero, J.

Gómez-Rodríguez, J. M.

Grivas, C.

Gupta, Y. M.

S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

Herman, P. R.

Hibert, C.

Hickey, L. M. B.

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

Hirao, K.

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

Hoffmann, P.

Horcas, I.

Jänchen, G.

Jelinek, M.

Jones, S. C.

S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

Kar, A. K.

Kim, J. H.

Laporta, P.

Laversenne, L.

Lee, J.

Luo, C.

Ma, Q.

Q. Ma and D. R. Clarke, “Stress measurements in single-crystal and polycrystalline ceramics using their optical fluorescence,” J. Am. Ceram. Soc. 76(6), 1433–1440 (1993).
[Crossref]

Marangoni, M.

Mazur, E.

McMillen, B.

Miura, K.

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

Nejadmalayeri, A. H.

Osellame, R.

Pickrell, G.

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Piermarini, G. J.

Polli, D.

Pollnau, M.

Qi, B.

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Ramponi, R.

Reid, D. T.

Ruffin, P.

Safaai-Jazi, A.

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Sager, D. A.

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

Salathe, R. P.

Salathé, R. P.

Schaffer, C. B.

Shah, L.

Shepherd, D. P.

Snoke, D.

Sugimoto, N.

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

Taccheo, S.

Thomson, R. R.

Vainos, N. A.

Vaughan, B. A. M.

S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

Wang, A.

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Wilkinson, J. S.

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

Yang, C. E.

Yin, S. S.

Zhang, Y.

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Appl. Phys. B (1)

Appl. Phys. Lett. (3)

Appl. Phys., A Mater. Sci. Process. (1)

J. Am. Ceram. Soc. (1)

Q. Ma and D. R. Clarke, “Stress measurements in single-crystal and polycrystalline ceramics using their optical fluorescence,” J. Am. Ceram. Soc. 76(6), 1433–1440 (1993).
[Crossref]

J. Appl. Phys. (2)

S. C. Jones, B. A. M. Vaughan, and Y. M. Gupta, “Refractive indices of sapphire under elastic, uniaxial strain compression along the a axis,” J. Appl. Phys. 90(10), 4990–4995 (2001).
[Crossref]

Opt. Eng. (1)

Y. Zhang, G. Pickrell, B. Qi, A. Safaai-Jazi, and A. Wang, “Single-crystal sapphire-based optical high temperature sensor for harsh environments,” Opt. Eng. 43(1), 157–164 (2004).
[Crossref]

Opt. Express (3)

Opt. Lett. (4)

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

V. Apostolopoulos, L. M. B. Hickey, D. A. Sager, and J. S. Wilkinson, “Gallium-diffused waveguides in sapphire,” Opt. Lett. 26(20), 1586–1588 (2001).
[Crossref]

Rev. Sci. Instrum. (1)

Science (1)

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.

Click here to see a list of articles that cite this paper

Fig. 1 Optical microscope images of the end face of the irradiated Sapphire sample as obtained for different pulse energies and translation speeds. The propagation direction of the UV irradiation pulses is indicated by arrows. The waveguide’s fundamental propagation modes at 632 nm obtained in each case are shown in the bottom line. Note that for the case of 350 nJ pulse energy no waveguiding was obtained for the maximum translation speed. Scale bar is 20 microns. Aspect Ratio is 1:1.

Download Full Size | PPT Slide | PDF

Fig. 2 (a).- Micro-Luminescence spectrum obtained from the micro-structured Sapphire sample as obtained after 488 nm excitation. The R₁ and R₂ lines generated by Cr³⁺ traces are labeled. Spatial dependence of the R₁ line intensity and bandwidth as obtained from the damage track obtained with a pulse energy of 500 nJ and 0.2 mm/s translation speed, respectively ((b) and (c), respectively). Scale bar is 20 microns. Aspect Ratio is 1:1.

Download Full Size | PPT Slide | PDF

Fig. 3 Spatial distribution of the R₁ line position as obtained for four damage sites generated with different pulse energies and translation speeds. Solid and dashed arrows indicate the irradiation direction and the waveguide’s location, respectively.

Download Full Size | PPT Slide | PDF