Abstract

The residual reflectance obtained for a broad wavelength range depends mainly on the refractive index of the last layer. Using interference layer stacks composed of naturally available low- and high-index materials, the residual reflection for a broad range cannot be adjusted below a certain limit. However, nanostructured (gradient) and porous layers are effective media with a refractive index lower than that of natural materials. Results demonstrate that an interference layer stack combined with a structured layer as the last layer yields better antireflection properties owing to the low effective index of the structure.

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References

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2008

2007

2004

A. Kaless, P. Munzert, U. Schulz, and N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 20, 58–61 (2004).

2002

1999

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

1993

1992

S. Pongratz and A. Zöller, “Plasma ion assisted deposition: A promising technique for optical coatings,” J. Vac. Sci. Technol. A 10(4), 1897–1904 (1992).
[CrossRef]

P. G. Verly, J. A. Dobrowolski, and R. R. Willey, “Fourier-transform method for the design of wideband anti-reflection coatings,” Appl. Opt. 31(19), 3836–3846 (1992).
[CrossRef] [PubMed]

1991

1977

Acree, M.

Amotchkina, T. V.

Bläsi, B.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Dobrowolski, J. A.

Döll, W.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Dreibholz, J.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Glaubitt, W.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Gombert, A.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Heinzel, A.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Kaiser, N.

Kaless, A.

A. Kaless, P. Munzert, U. Schulz, and N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 20, 58–61 (2004).

Leitel, R.

Ma, P.

Minot, M.

Mlynek, J.

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

Morris, G. M.

Munzert, P.

U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, and A. Tünnermann, “Antireflection of transparent polymers by advanced plasma etching procedures,” Opt. Express 15(20), 13108–13111 (2007).
[CrossRef] [PubMed]

A. Kaless, P. Munzert, U. Schulz, and N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 20, 58–61 (2004).

Poitras, D.

Pongratz, S.

S. Pongratz and A. Zöller, “Plasma ion assisted deposition: A promising technique for optical coatings,” J. Vac. Sci. Technol. A 10(4), 1897–1904 (1992).
[CrossRef]

Raguin, D. H.

Rose, K.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Schäffer, E.

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

Schulz, U.

Southwell, W. H.

Sporn, D.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Steiner, U.

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

Stenzel, O.

Tikhonravov, A. V.

Trubetskov, M. K.

Tünnermann, A.

Vakil, H.

Verly, P. G.

Walheim, S.

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

Wendling, I.

Wilbrandt, S.

Willey, R.

Willey, R. R.

Wittwer, V.

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Zöller, A.

S. Pongratz and A. Zöller, “Plasma ion assisted deposition: A promising technique for optical coatings,” J. Vac. Sci. Technol. A 10(4), 1897–1904 (1992).
[CrossRef]

Appl. Opt.

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

J. Vac. Sci. Technol. A

S. Pongratz and A. Zöller, “Plasma ion assisted deposition: A promising technique for optical coatings,” J. Vac. Sci. Technol. A 10(4), 1897–1904 (1992).
[CrossRef]

Opt. Express

Science

S. Walheim, E. Schäffer, J. Mlynek, and U. Steiner, “Nanophase-separated polymer films as high-performance antireflection coatings,” Science 283(5401), 520–522 (1999).
[CrossRef] [PubMed]

Surf. Coat. Tech.

A. Kaless, P. Munzert, U. Schulz, and N. Kaiser, “Nano-motheye antireflection pattern by plasma treatment of polymers,” Surf. Coat. Tech. 20, 58–61 (2004).

Thin Solid Films

A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, “Subwavelength-structured antireflective surfaces on glass,” Thin Solid Films 351(1-2), 73–78 (1999).
[CrossRef]

Other

A. Macleod, Thin-Film Optical Filters, 3rd edition (Institute of Physics Publishing, 2001).

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Figures (4)

Fig. 1
Fig. 1

Reflectance and refractive-index profile for AR coatings designed for the spectral region from 400 to 1200 nm with layer materials L (n = 1.46) and H (n = 1.35) in design 1 and with an additional low-index last layer (n = 1.22) in designs 2 and 3.

Fig. 2
Fig. 2

SEM morphology of a plasma-etched AR structure on PMMA and reflection before and after etching (without sample backside).

Fig. 3
Fig. 3

Reflectance and refractive index profile for design 4 (calculated and experimental data)

Fig. 4
Fig. 4

calculated and measured transmittance for design 4 under light at normal incidence and an angle of 45° (average polarization, without uncoated sample backside).

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