Abstract

We have obtained an average output power as much as 1.2 W at 200 nm by using a 2.71-mm thick KBe2BO3F2 crystal optically contacted by CaF2 and SiO2 prisms on the both sides. Watt-level average-power was generated tunably in the deep ultraviolet region from 185 nm to 200 nm. The average power is the highest, to our knowledge, ever obtained by nonlinear crystals in the wavelength region below 200 nm.

©2009 Optical Society of America

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  1. T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
    [Crossref] [PubMed]
  2. H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).
  3. F. Seifert, J. Ringling, F. Noack, V. Petrov, and O. Kittelmann, “Generation of tunable femtosecond pulses to as low as 172.7 nm by sum-frequency mixing in lithium triborate,” Opt. Lett. 19(19), 1538–1540 (1994).
    [Crossref] [PubMed]
  4. H. Kouta and Y. Kuwano, “Attaining 186-nm light generation in cooled β-BaB(2)O(4) crystal,” Opt. Lett. 24(17), 1230–1232 (1999).
    [Crossref]
  5. N. Umemura and K. Kato, “Phase-matched UV generation at 0.1774 mm in KB5O8·4H2O,” Appl. Opt. 35(27), 5332–5335 (1996).
    [Crossref] [PubMed]
  6. T. Kanai, T. Kanda, T. Sekikawa, S. Watanabe, T. Togashi, C. T. Chen, C. Q. Zhang, Z. Y. Zu, and J. Y. Wang, “Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser,” J. Opt. Soc. Am. B 21, 370–375 (2004).
    [Crossref]
  7. C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
    [Crossref]
  8. C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
    [Crossref]
  9. C. T. Chen, “New borate crystals promise deep-UV harmonic generation,” Laser Focus World 40, 91 (2004).
  10. C. T. Chen, J. Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Z. Xu, and J. Wang, “Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet,” Opt. Lett. 27(8), 637–639 (2002).
    [Crossref]
  11. T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28(4), 254–256 (2003).
    [Crossref] [PubMed]
  12. C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
    [Crossref] [PubMed]
  13. T. Togashi, N. Nabekawa, T. Sekikawa, and S. Watanabe, “Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system,” Opt. Lett. 26(11), 831–833 (2001).
    [Crossref]
  14. Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

2008 (2)

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
[Crossref] [PubMed]

2007 (1)

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

2005 (1)

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

2004 (2)

2003 (1)

2002 (1)

2001 (1)

2000 (1)

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

1999 (1)

1996 (2)

N. Umemura and K. Kato, “Phase-matched UV generation at 0.1774 mm in KB5O8·4H2O,” Appl. Opt. 35(27), 5332–5335 (1996).
[Crossref] [PubMed]

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

1994 (1)

Chen, C. T.

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
[Crossref] [PubMed]

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

C. T. Chen, “New borate crystals promise deep-UV harmonic generation,” Laser Focus World 40, 91 (2004).

T. Kanai, T. Kanda, T. Sekikawa, S. Watanabe, T. Togashi, C. T. Chen, C. Q. Zhang, Z. Y. Zu, and J. Y. Wang, “Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser,” J. Opt. Soc. Am. B 21, 370–375 (2004).
[Crossref]

T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28(4), 254–256 (2003).
[Crossref] [PubMed]

C. T. Chen, J. Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Z. Xu, and J. Wang, “Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet,” Opt. Lett. 27(8), 637–639 (2002).
[Crossref]

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Deng, D.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Fujikawa, S.

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Fujimoto, J.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Kakizaki, K.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Kanai, K.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Kanai, T.

Kanda, T.

Kanetaka, F.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Kato, K.

Kiss, T.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Kittelmann, O.

Kojima, T.

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Komae, S.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Konno, S.

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Kouta, H.

Kuwano, Y.

Lu, J.

Matsunaga, T.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Mizoguchi, H.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Nabekawa, N.

Nabekawa, Y.

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Nakarai, H.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Noack, F.

Nohdomi, R.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Onuki, Y.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Petrov, V.

Ringling, J.

Saito, T.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Seifert, F.

Sekikawa, T.

Shimojima, T.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Shin, S.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Suganuma, T.

Tanaka, S.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Tang, D.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Togashi, T.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

T. Kanai, T. Kanda, T. Sekikawa, S. Watanabe, T. Togashi, C. T. Chen, C. Q. Zhang, Z. Y. Zu, and J. Y. Wang, “Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser,” J. Opt. Soc. Am. B 21, 370–375 (2004).
[Crossref]

T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28(4), 254–256 (2003).
[Crossref] [PubMed]

C. T. Chen, J. Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Z. Xu, and J. Wang, “Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet,” Opt. Lett. 27(8), 637–639 (2002).
[Crossref]

T. Togashi, N. Nabekawa, T. Sekikawa, and S. Watanabe, “Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system,” Opt. Lett. 26(11), 831–833 (2001).
[Crossref]

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Umemura, N.

Wang, G. L.

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

Wang, J.

Wang, J. Y.

Wang, X. Y.

C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
[Crossref] [PubMed]

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

Watanabe, H.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Watanabe, S.

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
[Crossref] [PubMed]

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

T. Kanai, T. Kanda, T. Sekikawa, S. Watanabe, T. Togashi, C. T. Chen, C. Q. Zhang, Z. Y. Zu, and J. Y. Wang, “Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser,” J. Opt. Soc. Am. B 21, 370–375 (2004).
[Crossref]

T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28(4), 254–256 (2003).
[Crossref] [PubMed]

C. T. Chen, J. Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Z. Xu, and J. Wang, “Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet,” Opt. Lett. 27(8), 637–639 (2002).
[Crossref]

T. Togashi, N. Nabekawa, T. Sekikawa, and S. Watanabe, “Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system,” Opt. Lett. 26(11), 831–833 (2001).
[Crossref]

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Wong, G. K. L.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Wu, B.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Xu, Z.

Xu, Z. Y.

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

Yamazaki, T.

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

Yasui, K.

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Ye, N.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Yokoya, T.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

Zhang, C.

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28(4), 254–256 (2003).
[Crossref] [PubMed]

Zhang, C. Q.

Zhang, J.

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

Zhu, Y.

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

C. T. Chen, T. Kanai, X. Y. Wang, Y. Zhu, and S. Watanabe, “High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device,” Opt. Lett. 33(3), 282–284 (2008).
[Crossref] [PubMed]

Zu, Z. Y.

Appl. Opt. (1)

Appl. Phys. B (1)

Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).

Appl. Phys. Lett. (1)

C. T. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68(21), 2930–2932 (1996).
[Crossref]

IEEE J. Quantum Electron. (1)

C. T. Chen, G. L. Wang, X. Y. Wang, Y. Zhu, Z. Y. Xu, T. Kanai, and S. Watanabe, “Improved Sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2 crystal,” IEEE J. Quantum Electron. 44(7), 617–621 (2008).
[Crossref]

J. Opt. Soc. Am. B (1)

Laser Focus World (1)

C. T. Chen, “New borate crystals promise deep-UV harmonic generation,” Laser Focus World 40, 91 (2004).

Opt. Lett. (6)

Phys. Rev. Lett. (1)

T. Kiss, F. Kanetaka, T. Yokoya, T. Shimojima, K. Kanai, S. Shin, Y. Onuki, T. Togashi, C. Zhang, C. T. Chen, and S. Watanabe, “Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor,” Phys. Rev. Lett. 94(5), 057001 (2005).
[Crossref] [PubMed]

SPIE (1)

H. Watanabe, S. Komae, S. Tanaka, R. Nohdomi, T. Yamazaki, H. Nakarai, J. Fujimoto, T. Matsunaga, T. Saito, K. Kakizaki, and H. Mizoguchi, “Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography,” SPIE 6520, 111 (2007).

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Figures (7)

Fig. 1
Fig. 1 KBBF prism coupling device (PCD) which is optically contacted with CaF2 and SiO2 prisms. The thickness of KBBF crystal is 2.71 mm. Red arrow shows the input beam and blue arrow shows the frequency-doubled output beam.
Fig. 2
Fig. 2 Layout of 100-fs 1-kHz Ti:sapphire CPA laser system. The system consists of a 130-fs oscillator (IMRA), an Offner type stretcher, a regenerative amplifier, a multi-pass amplifier, a grating pair compressor and a BBO crystal for frequency doubling. P.C., Pockels cell; TiS, Ti:sapphire cryastal; F.R. Faraday rotator.
Fig. 3
Fig. 3 (a) The spectra of the fundamental (a), and second harmonic (b).
Fig. 4
Fig. 4 197-nm output power and conversion efficiency vs. 394-nm input power.
Fig. 6
Fig. 6 Output power vs. input power at ArF (193.5 nm) wavelength.
Fig. 5
Fig. 5 System layout of 5-kHz Ti:sapphire laser. The system consists of a 350-ps oscillator (TSUNAMI), a regenerative amplifier and a multi-pass amplifier and a LBO crystal for frequency doubling. P.C., Pockels cell; TiS, Ti:sapphire cryastal; F.R. Faraday rotator.
Fig. 7
Fig. 7 4ω-output power and corresponding 2ω input power vs. the wavelengths of 4ω (lower axis) and 2ω (upper axis).

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