D. E. Aspnes, “Expanding horizons: new developments in ellipsometry and polarimetry,” Thin Solid Films 455–456, 3–13 (2004).
[Crossref]
K. Vedam, “Spectroscopic ellipsometry: a historical overview,” Thin Solid Films 313–314(1-2), 1–9 (1998).
[Crossref]
P. Boher and J. L. Stehle, “In situ spectroscopic ellipsometry: present status and future needs for thin film characterization and process control,” Mater. Sci. Eng. B 37(1-3), 116–120 (1996).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma, and Y. H. Qian, “Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer,” Appl. Opt. 33(7), 1299–1305 (1994).
[Crossref]
[PubMed]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
R. M. A. Azzam, “Multichannel polarization state detectors for time-resolved ellipsometry,” Thin Solid Films 234(1-2), 371–374 (1993).
[Crossref]
I. An and R. W. Collins, “Waveform analysis with optical multichannnel detectors: Applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62(8), 1904–1911 (1991).
[Crossref]
Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990).
[Crossref]
R. W. Collins, “Automatic rotating element ellipsometers: Calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61(8), 2029–2062 (1990).
[Crossref]
G. E. Jellison and F. A. Modine, “Two-channel polarization modulation ellipsometer,” Appl. Opt. 29(7), 959–974 (1990).
[Crossref]
[PubMed]
J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988).
[Crossref]
E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985).
[Crossref]
R. H. Muller and J. C. Farmer, “Fast, self-compensating spectral-scanning ellipsometer,” Rev. Sci. Instrum. 55(3), 371–374 (1984).
[Crossref]
P. S. Hauge, “Recent developments in instrumentation in ellipsometry,” Surf. Sci. 96(1-3), 108–140 (1980).
[Crossref]
E. Collett, “Determination of the ellipsometric characteristics of optical surfaces using nanosecond laser pulses,” Surf. Sci. 96(1-3), 156–167 (1980).
[Crossref]
R. H. Muller, “Present status of automatic ellipsometers,” Surf. Sci. 56, 19–36 (1976).
[Crossref]
D. E. Aspnes, “Fourier transform detection system for rotating-analyzer ellipsometers,” Opt. Commun. 8(3), 222–225 (1973).
[Crossref]
S. N. Japerson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40(6), 761–767 (1969).
[Crossref]
B. D. Cahan and R. F. Spanier, “A high speed precision automatic ellipsometer,” Surf. Sci. 16, 166–176 (1969).
[Crossref]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
I. An and R. W. Collins, “Waveform analysis with optical multichannnel detectors: Applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62(8), 1904–1911 (1991).
[Crossref]
R. M. A. Azzam, “Multichannel polarization state detectors for time-resolved ellipsometry,” Thin Solid Films 234(1-2), 371–374 (1993).
[Crossref]
R. M. A. Azzam, “A simple Fourier photopolarimeter with rotating polarizer and analyzer for measuring Jones and Mueller matrices,” Opt. Commun. 25(2), 137–140 (1978).
[Crossref]
E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985).
[Crossref]
P. Boher and J. L. Stehle, “In situ spectroscopic ellipsometry: present status and future needs for thin film characterization and process control,” Mater. Sci. Eng. B 37(1-3), 116–120 (1996).
[Crossref]
B. D. Cahan and R. F. Spanier, “A high speed precision automatic ellipsometer,” Surf. Sci. 16, 166–176 (1969).
[Crossref]
L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma, and Y. H. Qian, “Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer,” Appl. Opt. 33(7), 1299–1305 (1994).
[Crossref]
[PubMed]
L. Y. Chen and D. W. Lynch, “Scanning ellipsometer by rotating polarizer and analyzer,” Appl. Opt. 26(24), 5221–5228 (1987).
[Crossref]
[PubMed]
E. Collett, “Determination of the ellipsometric characteristics of optical surfaces using nanosecond laser pulses,” Surf. Sci. 96(1-3), 156–167 (1980).
[Crossref]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
I. An and R. W. Collins, “Waveform analysis with optical multichannnel detectors: Applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62(8), 1904–1911 (1991).
[Crossref]
Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990).
[Crossref]
R. W. Collins, “Automatic rotating element ellipsometers: Calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61(8), 2029–2062 (1990).
[Crossref]
R. H. Muller and J. C. Farmer, “Fast, self-compensating spectral-scanning ellipsometer,” Rev. Sci. Instrum. 55(3), 371–374 (1984).
[Crossref]
P. S. Hauge, “Recent developments in instrumentation in ellipsometry,” Surf. Sci. 96(1-3), 108–140 (1980).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985).
[Crossref]
S. N. Japerson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40(6), 761–767 (1969).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990).
[Crossref]
R. H. Muller and J. C. Farmer, “Fast, self-compensating spectral-scanning ellipsometer,” Rev. Sci. Instrum. 55(3), 371–374 (1984).
[Crossref]
R. H. Muller, “Present status of automatic ellipsometers,” Surf. Sci. 56, 19–36 (1976).
[Crossref]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988).
[Crossref]
S. N. Japerson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40(6), 761–767 (1969).
[Crossref]
J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988).
[Crossref]
B. D. Cahan and R. F. Spanier, “A high speed precision automatic ellipsometer,” Surf. Sci. 16, 166–176 (1969).
[Crossref]
P. Boher and J. L. Stehle, “In situ spectroscopic ellipsometry: present status and future needs for thin film characterization and process control,” Mater. Sci. Eng. B 37(1-3), 116–120 (1996).
[Crossref]
K. Vedam, “Spectroscopic ellipsometry: a historical overview,” Thin Solid Films 313–314(1-2), 1–9 (1998).
[Crossref]
Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990).
[Crossref]
E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985).
[Crossref]
M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996).
[Crossref]
J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988).
[Crossref]
D. E. Aspnes and A. A. Studna, “High Precision Scanning Ellipsometer,” Appl. Opt. 14, 220–228 (1975).
[PubMed]
V. M. Bermudez and V. H. Ritz, “Wavelength-scanning polarization-modulation ellipsometry: some practical considerations,” Appl. Opt. 17(4), 542–552 (1978).
[Crossref]
[PubMed]
L. Y. Chen and D. W. Lynch, “Scanning ellipsometer by rotating polarizer and analyzer,” Appl. Opt. 26(24), 5221–5228 (1987).
[Crossref]
[PubMed]
G. E. Jellison and F. A. Modine, “Two-channel polarization modulation ellipsometer,” Appl. Opt. 29(7), 959–974 (1990).
[Crossref]
[PubMed]
L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma, and Y. H. Qian, “Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer,” Appl. Opt. 33(7), 1299–1305 (1994).
[Crossref]
[PubMed]
P. Boher and J. L. Stehle, “In situ spectroscopic ellipsometry: present status and future needs for thin film characterization and process control,” Mater. Sci. Eng. B 37(1-3), 116–120 (1996).
[Crossref]
D. E. Aspnes, “Fourier transform detection system for rotating-analyzer ellipsometers,” Opt. Commun. 8(3), 222–225 (1973).
[Crossref]
R. M. A. Azzam, “A simple Fourier photopolarimeter with rotating polarizer and analyzer for measuring Jones and Mueller matrices,” Opt. Commun. 25(2), 137–140 (1978).
[Crossref]
S. N. Japerson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40(6), 761–767 (1969).
[Crossref]
E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985).
[Crossref]
I. An and R. W. Collins, “Waveform analysis with optical multichannnel detectors: Applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62(8), 1904–1911 (1991).
[Crossref]
I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994).
[Crossref]
R. W. Collins, “Automatic rotating element ellipsometers: Calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61(8), 2029–2062 (1990).
[Crossref]
R. H. Muller and J. C. Farmer, “Fast, self-compensating spectral-scanning ellipsometer,” Rev. Sci. Instrum. 55(3), 371–374 (1984).
[Crossref]
Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990).
[Crossref]
R. H. Muller, “Present status of automatic ellipsometers,” Surf. Sci. 56, 19–36 (1976).
[Crossref]
P. S. Hauge, “Recent developments in instrumentation in ellipsometry,” Surf. Sci. 96(1-3), 108–140 (1980).
[Crossref]
B. D. Cahan and R. F. Spanier, “A high speed precision automatic ellipsometer,” Surf. Sci. 16, 166–176 (1969).
[Crossref]
E. Collett, “Determination of the ellipsometric characteristics of optical surfaces using nanosecond laser pulses,” Surf. Sci. 96(1-3), 156–167 (1980).
[Crossref]
R. M. A. Azzam, “Multichannel polarization state detectors for time-resolved ellipsometry,” Thin Solid Films 234(1-2), 371–374 (1993).
[Crossref]
J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988).
[Crossref]
K. Vedam, “Spectroscopic ellipsometry: a historical overview,” Thin Solid Films 313–314(1-2), 1–9 (1998).
[Crossref]
D. E. Aspnes, “Expanding horizons: new developments in ellipsometry and polarimetry,” Thin Solid Films 455–456, 3–13 (2004).
[Crossref]
R. M. A. Azzam, and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).