Abstract

Reflective color filters using two-dimensional photonic crystals based on sub-wavelength gratings were proposed and constructed. Using low-cost nanoimprint lithography, an amorphous silicon layer was deposited through the low-temperature PECVD process and patterned into two-dimensional structures. The isolated amorphous silicon patterns were readily crystallized using a multi-shot excimer laser annealing at low energy. A study of the close relationship between color filter reflectance and silicon pattern crystallinity is introduced. Theoretical and experimental results show that the proposed color filters have high reflectance and, moreover, decrease the dependence on incident angle compared to one-dimensional photonic crystal color filters.

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2008

2006

Y. Cho, Y. K. Choi, and S. H. Sohn, “Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter,” Appl. Phys. Lett. 89(5), 051102 (2006).
[CrossRef]

Y. Kanamori, M. Shimono, and K. Hane, “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photon. Technol. Lett. 18(20), 2126–2128 (2006).
[CrossRef]

2004

2003

P. Vukusic and J. R. Sambles, “Photonic structures in biology,” Nature 424(6950), 852–855 (2003).
[CrossRef] [PubMed]

1998

1993

1992

R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61(9), 1022–1024 (1992).
[CrossRef]

Brundrett, D. L.

Catrysse, P. B.

Cho, Y.

Y. Cho, Y. K. Choi, and S. H. Sohn, “Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter,” Appl. Phys. Lett. 89(5), 051102 (2006).
[CrossRef]

Choi, Y. K.

Y. Cho, Y. K. Choi, and S. H. Sohn, “Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter,” Appl. Phys. Lett. 89(5), 051102 (2006).
[CrossRef]

Ding, Y.

Fan, S.

Gaylord, T. K.

Glytsis, E. N.

Hane, K.

Y. Kanamori, M. Shimono, and K. Hane, “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photon. Technol. Lett. 18(20), 2126–2128 (2006).
[CrossRef]

Kanamori, Y.

Y. Kanamori, M. Shimono, and K. Hane, “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photon. Technol. Lett. 18(20), 2126–2128 (2006).
[CrossRef]

Kim, S. H.

Lee, H.-S.

Lee, K.-D.

Lee, S.-S.

Magnusson, R.

Noguchi, T.

T. Noguchi, “Prospective crystallization of amorphous Si films for new Si TFTs,” Phys. Status Solidi 5(10c), 3259–3263 (2008).
[CrossRef]

Park, J.-D.

Peeters, M.

Sambles, J. R.

P. Vukusic and J. R. Sambles, “Photonic structures in biology,” Nature 424(6950), 852–855 (2003).
[CrossRef] [PubMed]

Shimono, M.

Y. Kanamori, M. Shimono, and K. Hane, “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photon. Technol. Lett. 18(20), 2126–2128 (2006).
[CrossRef]

Sohn, S. H.

Y. Cho, Y. K. Choi, and S. H. Sohn, “Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter,” Appl. Phys. Lett. 89(5), 051102 (2006).
[CrossRef]

Suh, W.

Vukusic, P.

P. Vukusic and J. R. Sambles, “Photonic structures in biology,” Nature 424(6950), 852–855 (2003).
[CrossRef] [PubMed]

Wang, S. S.

S. S. Wang and R. Magnusson, “Theory and applications of guided-mode resonance filters,” Appl. Opt. 32(14), 2606–2613 (1993).
[CrossRef] [PubMed]

R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61(9), 1022–1024 (1992).
[CrossRef]

Yoon, Y.-T.

Appl. Opt.

Appl. Phys. Lett.

Y. Cho, Y. K. Choi, and S. H. Sohn, “Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter,” Appl. Phys. Lett. 89(5), 051102 (2006).
[CrossRef]

R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61(9), 1022–1024 (1992).
[CrossRef]

IEEE Photon. Technol. Lett.

Y. Kanamori, M. Shimono, and K. Hane, “Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates,” IEEE Photon. Technol. Lett. 18(20), 2126–2128 (2006).
[CrossRef]

Nature

P. Vukusic and J. R. Sambles, “Photonic structures in biology,” Nature 424(6950), 852–855 (2003).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Phys. Status Solidi

T. Noguchi, “Prospective crystallization of amorphous Si films for new Si TFTs,” Phys. Status Solidi 5(10c), 3259–3263 (2008).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

(a) Reflective display with photonic crystal color filter and (b) its geometry.

Fig. 2
Fig. 2

Complex refractive indices of single-crystalline (c-Si), polycrystalline (p-Si), and amorphous silicone (a-Si).

Fig. 3
Fig. 3

Theoretical results of the proposed color filter: (a) red; (b) green; (c) blue; and (d) reflectance characteristics of single-crystalline (c-Si), polycrystalline (p-Si), and amorphous silicon (a-Si).

Fig. 4
Fig. 4

Band diagram of leaky modes (along ΓX direction) excited in photonic crystal color filter by s-polarized incident light (a) and p-polarized incident light (b).

Fig. 5
Fig. 5

(a) FE-SEM result; reflectance for each fabricated color filter: (b) red; (c) green; (d) blue.

Fig. 6
Fig. 6

Proposed fabrication process for 2D photonic crystal color filter.

Fig. 7
Fig. 7

Reflectance results (a) for each color filter; (b) before and after ELA; (c) with varying incident angles; and Raman spectroscopy results.

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