Abstract

We report the first observation of single-shot soft x-ray laser induced desorption occurring below the ablation threshold in a thin layer of poly (methyl methacrylate) - PMMA. Irradiated by the focused beam from the Free-electron LASer in Hamburg (FLASH) at 21.7nm, the samples have been investigated by atomic-force microscope (AFM) enabling the visualization of mild surface modifications caused by the desorption. A model describing non-thermal desorption and ablation has been developed and used to analyze single-shot imprints in PMMA. An intermediate regime of materials removal has been found, confirming model predictions. We also report below-threshold multiple-shot desorption of PMMA induced by high-order harmonics (HOH) at 32nm. Short-time exposure imprints provide sufficient information about transverse beam profile in HOH’s tight focus whereas long-time exposed PMMA exhibits radiation-initiated surface hardening making the beam profile measurement infeasible.

© 2009 Optical Society of America

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References

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2008 (2)

F. Barkusky, C. Peth, A. Bayer, and K. Mann, “Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source,” J. Appl. Phys. 101, 124908 (2008).
[Crossref]

C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D41, 105202 (2008).

2007 (6)

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, “WSXM: A software for scanning probe microscopy and a tool for nanotechnology,” Rev. Sci. Instrum. 78, 013705 (2007).
[Crossref] [PubMed]

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
[Crossref]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

2006 (4)

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

V. Ayvazyan et. al., “First operation of a free-electron laser generating GW power radiation at 32 nm wavelength,” Eur. J. Phys. D37, 297–303 (2006).

S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, “Spectroscopic characterization of vacuum ultraviolet free electron laser pulses,” Opt. Lett. 31, 1750–1752 (2006).
[Crossref] [PubMed]

T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
[Crossref]

2005 (3)

S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express 13, 4050–4055 (2005).
[Crossref] [PubMed]

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
[Crossref]

2003 (4)

P. E. Dyer, “Excimer laser polymer ablation: twenty years on,” Appl. Phys. A77, 167–173 (2003), and references cited therein.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
[Crossref] [PubMed]

L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, ”Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment,” Int. J. Mass Spectr. 226, 85–106 (2003).
[Crossref]

M. Richter, A. Gottwald, U. Kroth, A. A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, “Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser,” Appl. Phys. Lett 83, 2970–2972 (2003).
[Crossref]

2002 (5)

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
[Crossref]

B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

V. Ayvazyan et. al., “A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser,” Eur. Phys. J. D20, 149–156 (2002).

V. Ayvazyan et. al., “Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime,” Phys. Rev. Lett. 88, 104802 (2002).
[Crossref] [PubMed]

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
[Crossref]

1999 (1)

L. V. Zhigilei and B. J. Garrison, “Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids,” Appl. Phys. Lett. 74, 1341–1343 (1999).
[Crossref]

1997 (2)

B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

E. M. Lehockey, I. Reid, and I. Hill, “The radiation chemistry of poly(methyl methacrylate) polymer resists,” J. Vac. Sci. Technol. A6, 828–832 (1997).

1996 (1)

R. F. Haglund, “Microscopic and mesoscopic aspects of laser-induced desorption and ablation,” Appl. Surf. Sci. 96–98, 1–13 (1996).
[Crossref]

1994 (1)

J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, “Demonstration of a discharge pumped table-top soft-X-ray laser,” Phys. Rev. Lett. 73, 2192–2195 (1994).
[Crossref] [PubMed]

1986 (1)

D. A. G. Deacon, “Optical coating damage and performance requirements in free electron lasers,” Nucl. Instrum. Meth. Phys. Res. A250, 283–288 (1986).

1982 (1)

Andrejczuk, A.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

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S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Balcou, Ph.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
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Barkusky, F.

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Bayer, A.

F. Barkusky, C. Peth, A. Bayer, and K. Mann, “Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source,” J. Appl. Phys. 101, 124908 (2008).
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Belsky, A.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Bernardinello, A.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Bionta, R. M.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Bittner, M.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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Bobashev, S. V.

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Boody, F. P.

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L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Caleman, C.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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Cejnarová, A.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Chalupsky, J.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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Chalupský, J.

Chambaret, J. P.

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Chapman, H.

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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Geoffroy, G.

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I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, “WSXM: A software for scanning probe microscopy and a tool for nanotechnology,” Rev. Sci. Instrum. 78, 013705 (2007).
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Grisham, M. E.

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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Hajkova, V.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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Hájková, V.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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Homer, P.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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Hulin, D.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Itina, T. E.

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B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

Jamelot, G.

B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

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Juha, L.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
[Crossref]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
[Crossref]

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Jungwirth, K.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
[Crossref]

Jurek, M.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Kazamias, S.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
[Crossref] [PubMed]

Keitel, B.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

Kirm, M.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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Klinger, D.

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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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Krása, J.

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Kravárik, J.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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Krenz-Tronnier, A.

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Krzywinsky, J.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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Kuba, J.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Kubat, P.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Kubeš, P.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Kuhlmann, M.

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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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Ledinský, M.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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Létal, V.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Linde, D. von der

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Liu, J. M.

London, R. A.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Luna, H.

Mann, K.

C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D41, 105202 (2008).

F. Barkusky, C. Peth, A. Bayer, and K. Mann, “Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source,” J. Appl. Phys. 101, 124908 (2008).
[Crossref]

Martin, P.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
[Crossref]

Martz, D.

McKernan, M. A.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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Menoni, C. S.

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Merdji, H.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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Mevel, E.

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Meyer, M.

Meyer-ter-Vehn, J.

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Mikolajczyk, J.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Mocek, T.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

Mullot, G.

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Nagirnyi, V.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
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Nantel, M.

B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

Nicolosi, P.

Nietubyc, R.

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Orisch, A.

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
[Crossref]

Orr, P.

Otcenasek, Z.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
[Crossref]

Pelka, J.

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

Pelka, J. B.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Perner, F.

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

Peth, C.

C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D41, 105202 (2008).

F. Barkusky, C. Peth, A. Bayer, and K. Mann, “Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source,” J. Appl. Phys. 101, 124908 (2008).
[Crossref]

Pfeifer, M.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Phalippou, D.

B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

Pientka, Z.

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
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Plna, L.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Plönjes, E.

Polan, J.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
[Crossref]

T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
[Crossref]

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Präg, A.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Präg, A. R.

T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

Radcliffe, P.

Rakowski, R.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Redlin, H.

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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E. M. Lehockey, I. Reid, and I. Hill, “The radiation chemistry of poly(methyl methacrylate) polymer resists,” J. Vac. Sci. Technol. A6, 828–832 (1997).

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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Richter, M.

M. Richter, A. Gottwald, U. Kroth, A. A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, “Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser,” Appl. Phys. Lett 83, 2970–2972 (2003).
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Rocca, J. J.

S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express 13, 4050–4055 (2005).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
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J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, “Demonstration of a discharge pumped table-top soft-X-ray laser,” Phys. Rev. Lett. 73, 2192–2195 (1994).
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Rohlena, K.

L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, “Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas,” Surf. Rev. Lett. 9, 347–352 (2002).
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Roos, L.

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Ros, D.

B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

Rousse, A.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
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P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Rus, B.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, “Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification,” Phys. Rev. A66, 063806–12 (2002).

B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

Rye, L.

L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Saldin, E. L.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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Schneidmiller, E. A.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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Schoolcraft, T. A.

L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, ”Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment,” Int. J. Mass Spectr. 226, 85–106 (2003).
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Sebban, S.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
[Crossref] [PubMed]

P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L’Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, “High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects,” Appl. Phys. 74, 509–515 (2002).
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Shlyaptsev, V. N.

J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, “Demonstration of a discharge pumped table-top soft-X-ray laser,” Phys. Rev. Lett. 73, 2192–2195 (1994).
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Shmaenok, L. A.

M. Richter, A. Gottwald, U. Kroth, A. A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, “Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser,” Appl. Phys. Lett 83, 2970–2972 (2003).
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Sobierajski, R

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
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Sobierajski, R.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
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S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
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N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
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T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, “Focusing a multimillijoule soft x-ray laser at 21 nm,” Appl. Phys. Lett. 89, 051501 (2006).
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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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Sokolowski-Tinten, K.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

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J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Vielhauer, S.

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
[Crossref]

Wabnitz, H.

J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, “Utilizing ablation of solids to characterize a focused soft x-ray laser beam,” Proc. SPIE 6586, 65860S–1 (2007).
[Crossref]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Wawro, A.

L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm laser radiation,” Appl. Phys. Lett. 86, 034109 (2005).
[Crossref]

Weihe, F.

S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
[Crossref] [PubMed]

Yeates, P.

Yingling, Y. G.

L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, ”Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment,” Int. J. Mass Spectr. 226, 85–106 (2003).
[Crossref]

Yurkov, M. V.

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

Zastrau, U.

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, “Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids,” Opt. Express 15, 6036 (2007).
[Crossref] [PubMed]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

Zeitoun, P.

B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

Zhigilei, L. V.

L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, ”Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment,” Int. J. Mass Spectr. 226, 85–106 (2003).
[Crossref]

L. V. Zhigilei and B. J. Garrison, “Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids,” Appl. Phys. Lett. 74, 1341–1343 (1999).
[Crossref]

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[Crossref]

S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, “Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength,” Appl. Phys. Lett. 90, 173128 (2007).
[Crossref]

N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, “Ablation of solids using a femtosecond extreme ultraviolet free electron laser,” Appl. Phys. Lett. 89, 241909 (2006).
[Crossref]

L. V. Zhigilei and B. J. Garrison, “Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids,” Appl. Phys. Lett. 74, 1341–1343 (1999).
[Crossref]

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V. Ayvazyan et. al., “First operation of a free-electron laser generating GW power radiation at 32 nm wavelength,” Eur. J. Phys. D37, 297–303 (2006).

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V. Ayvazyan et. al., “A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser,” Eur. Phys. J. D20, 149–156 (2002).

Int. J. Mass Spectr. (1)

L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, ”Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment,” Int. J. Mass Spectr. 226, 85–106 (2003).
[Crossref]

J. Appl. Phys. (2)

F. Barkusky, C. Peth, A. Bayer, and K. Mann, “Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source,” J. Appl. Phys. 101, 124908 (2008).
[Crossref]

J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. étal, V. ĺcek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, “Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser,” J. Appl. Phys. 101, 043107 (2007).
[Crossref]

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L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Rye, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pĺna, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, “Short-wavelength ablation of molecular solids: pulse duration and wavelength effects,” J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein.
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C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D41, 105202 (2008).

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B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, “An efficient, high-brightness soft X-ray laser at 21.2 nm,” Phys. Rev. A55, 3858–3873 (1997).

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V. Ayvazyan et. al., “Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime,” Phys. Rev. Lett. 88, 104802 (2002).
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S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Augé, D. Hulin, and Ph. Balcou, “Global optimization of high harmonic generation,” Phys. Rev. Lett. 90, 193901 (2003).
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[Crossref]

M. De Grazia, H. Merdji, B. é, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil’ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, “Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, ” Proc. SPIE 6586, 65860I–1 (2007).
[Crossref]

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Other (1)

J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, “Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation,” in Proc. 10th International Conference on X-ray Lasers – ICXRL 2006, P. V. Nickles and K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503–510.

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Figures (4)

Fig. 1.
Fig. 1.

(a) A crater created by the focused beam of FLASH at 21.7nm distinguishing between ablation and desorption regimes. (b) Transverse cross-section fitted by function (4) assuming a Gaussian beam profile.

Fig. 2.
Fig. 2.

(a) A shallow crater created by a pulse of radiation from FLASH at 21.7nm. The fluence is slightly above the threshold distinguishing the ablation, intermediate, and desorption regimes of material removal (A – the ablation region, I – the intermediate region, D – the desorption region). (b) AFM 3D morphology of the crater. (c) AFM surface roughness measurement for particular interaction regimes.

Fig. 3.
Fig. 3.

Plot of the dependence of the material removal efficiency on the local dose (red solid line) fitted to the measured efficiency data (open circles).

Fig. 4.
Fig. 4.

(a) Desorption (photo-etched) imprint of tightly focused HOH’s beam in PMMA induced by 5000 shots (5s exposure). (b) Transverse X cross-sections for various irradiation times.

Tables (1)

Tables Icon

Table 1. – Parameters for irradiation experiments.

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

ε(x,y,z)=ε0f (x,y,z) ez/lat ,
η(ε)=nR(ε)n .
η(ε)=iMinRi(ε)iMini,where ini=n
d(x,y)=lat 0ε0f(x,y) η(t)t · dt ,
d(x,y)=latηDε0εthf(x,y);ε0f(x,y)<εthlat(ηD+ηAln(ε0εthf(x,y)));otherwise.

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