Abstract

Electro-optic polymer waveguides in electron beam sensitive polymethyl methacrylate (PMMA) polymer matrix doped with organic nonlinear chromophores could be directly patterned by electron beam exposure with high resolution and smoothness. The polymer in the exposed regions was removed with standard electron beam resist developer and without damaging the chromophore containing polymer waveguides. Feature sizes on the order of 100 nm could be clearly resolved. High quality microring resonators made of YL124/PMMA electro-optic polymer were successfully fabricated with this technique. The measured resonance extinction ratios were more than 16 dB and quality factors were in the range of 103~104.

© 2008 Optical Society of America

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2007 (3)

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007).
[CrossRef]

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

2006 (3)

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

C. Y. Chao, W. Fung, and L. J. Guo, "Polymer microring resonators for biochemical sensing applications," IEEE J. Sel. Top. Quantum Electron. 12, 134-142 (2006).
[CrossRef]

H. Tazawa, Y.-H. Kuo, I. Dunayevskiy, J. Luo, A. K. Y. Jen, H. R. Fetterman, and W. H. Steier, "Ring resonator-based electrooptic polymer traveling-wave modulator," J. Lightwave Technol. 24, 3514-3519 (2006).
[CrossRef]

2005 (2)

2004 (3)

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

J. K. S. Poon, Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores," Opt. Lett. 29, 2584-2586 (2004).
[CrossRef]

2002 (2)

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, "Polymer micro-ring filters and modulators," J. Lightwave Technol. 20, 1968-1975 (2002).
[CrossRef]

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

2001 (1)

C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19, 2842-2845 (2001).
[CrossRef]

2000 (2)

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).
[CrossRef]

B. E. Little and S. T. Chu, "Toward very large-scale integrated photonics," Opt. Photonics News 11, 24-28 (2000).

1999 (1)

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

1998 (1)

1995 (1)

Baehr-Jones, T.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Bale, D. H.

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

Bawendi, M. G.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Borreman, A.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Chao, C. Y.

C. Y. Chao, W. Fung, and L. J. Guo, "Polymer microring resonators for biochemical sensing applications," IEEE J. Sel. Top. Quantum Electron. 12, 134-142 (2006).
[CrossRef]

Chen, A.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

Chen, B.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Chu, S. T.

B. E. Little and S. T. Chu, "Toward very large-scale integrated photonics," Opt. Photonics News 11, 24-28 (2000).

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Coates, G. W.

C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19, 2842-2845 (2001).
[CrossRef]

Craighead, H. G.

C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19, 2842-2845 (2001).
[CrossRef]

Dalton, L.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Dalton, L. R.

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

J. K. S. Poon, Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores," Opt. Lett. 29, 2584-2586 (2004).
[CrossRef]

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, "Polymer micro-ring filters and modulators," J. Lightwave Technol. 20, 1968-1975 (2002).
[CrossRef]

Dekker, R.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Diemeer, M. B. J.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Dodabalapur, A.

Driessen, A.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Dunayevskiy, I.

Egami, C.

Fetterman, H. R.

Fujimura, H.

Fung, W.

C. Y. Chao, W. Fung, and L. J. Guo, "Polymer microring resonators for biochemical sensing applications," IEEE J. Sel. Top. Quantum Electron. 12, 134-142 (2006).
[CrossRef]

Guo, L. J.

C. Y. Chao, W. Fung, and L. J. Guo, "Polymer microring resonators for biochemical sensing applications," IEEE J. Sel. Top. Quantum Electron. 12, 134-142 (2006).
[CrossRef]

Harnett, C. K.

C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19, 2842-2845 (2001).
[CrossRef]

Harvard, K.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Hau, S.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

Hochberg, M.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Hollingsworth, J. A.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Htoon, H.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Huang, Y.

J. K. S. Poon, Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores," Opt. Lett. 29, 2584-2586 (2004).
[CrossRef]

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

Jen, A. K. Y.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

H. Tazawa, Y.-H. Kuo, I. Dunayevskiy, J. Luo, A. K. Y. Jen, H. R. Fetterman, and W. H. Steier, "Ring resonator-based electrooptic polymer traveling-wave modulator," J. Lightwave Technol. 24, 3514-3519 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Jordan, R. H.

Kaneko, T.

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Katz, H. E.

Klimov, V. I.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Klunder, D. J. W.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Kokubun, Y.

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Kuo, Y.-H.

Kuwata-Gonokami, M.

Lawson, R.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Liao, Y.

Lipson, M.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Little, B. E.

B. E. Little and S. T. Chu, "Toward very large-scale integrated photonics," Opt. Photonics News 11, 24-28 (2000).

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Luo, J.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

H. Tazawa, Y.-H. Kuo, I. Dunayevskiy, J. Luo, A. K. Y. Jen, H. R. Fetterman, and W. H. Steier, "Ring resonator-based electrooptic polymer traveling-wave modulator," J. Lightwave Technol. 24, 3514-3519 (2006).
[CrossRef]

Malko, A. V.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Matsushima, R.

Mikhailovsky, A. A.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Nakayama, H.

Okamoto, N.

Olbricht, B. C

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

Ozawa, S.

Paloczi, G. T.

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

J. K. S. Poon, Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores," Opt. Lett. 29, 2584-2586 (2004).
[CrossRef]

Pan, W.

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Petruska, M. A.

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Poon, J. K. S.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Pyajt, A.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

Rabiei, P.

Sato, S.

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

Scherer, A.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Schilling, M. L.

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Sekaric, L.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007).
[CrossRef]

Shearn, M.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Shi, Z.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Slusher, R. E.

Steier, W. H.

Stouwdam, J. W.

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Sugihara, O.

Sullivan, P.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Sullivan, P. A.

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Sun, H.

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

Tazawa, H.

Vlasov, Y.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007).
[CrossRef]

Wang, G.

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K. Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express 13, 5216-5226 (2005).
[CrossRef]

Xia, F.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007).
[CrossRef]

Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Yariv, A.

J. K. S. Poon, Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores," Opt. Lett. 29, 2584-2586 (2004).
[CrossRef]

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).
[CrossRef]

Zhang, C.

Appl. Opt. (1)

Appl. Phys. Lett (1)

R. Dekker, D. J. W. Klunder, A. Borreman, M. B. J. Diemeer, A. Driessen, and J. W. Stouwdam, "Stimulated emission and optical gain in LaF3: Nd nanoparticle-doped polymer-based waveguides," Appl. Phys. Lett 85, 6104-6106 (2004).
[CrossRef]

Appl. Phys. Lett. (1)

A. V. Malko, A. A. Mikhailovsky, M. A. Petruska, J. A. Hollingsworth, H. Htoon, M. G. Bawendi, and V. I. Klimov, "From amplified spontaneous emission to microring lasing using nanocrystal quantum dot solids," Appl. Phys. Lett. 81, 1303-1305 (2002).
[CrossRef]

Electron. Lett. (1)

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

C. Y. Chao, W. Fung, and L. J. Guo, "Polymer microring resonators for biochemical sensing applications," IEEE J. Sel. Top. Quantum Electron. 12, 134-142 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. E. Little, and Y. Kokubun, "Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay," IEEE Photon. Technol. Lett. 11, 688-690 (1999).
[CrossRef]

IEEE Sens. J. (1)

H. Sun, A. Pyajt, J. Luo, Z. Shi, S. Hau, A. K. Y. Jen, L. R. Dalton, and A. Chen, "All-Dielectric Electrooptic Sensor Based on a Polymer Microresonator coupled side-polished Optical Fiber," IEEE Sens. J. 7, 515 (2007).
[CrossRef]

J. Lightwave Technol. (2)

J. Phys. Chem. B (1)

Y. Huang, G. T. Paloczi, A. Yariv, C. Zhang, and L. R. Dalton, "Fabrication and replication of polymer integrated optical devices using electron-beam lithography and soft lithography," J. Phys. Chem. B 108, 8606-8613 (2004).
[CrossRef]

J. Vac. Sci. Technol., B (1)

C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19, 2842-2845 (2001).
[CrossRef]

Nat. Maters. (1)

M. Hochberg, T. Baehr-Jones, G. Wang, M. Shearn, K. Harvard, J. Luo, B. Chen, Z. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, "Terahertz all-optical modulation in a silicon-polymer hybrid system," Nat. Maters. 5, 703-709 (2006).
[CrossRef]

Nat. Photonics (1)

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Opt. Photonics News (1)

B. E. Little and S. T. Chu, "Toward very large-scale integrated photonics," Opt. Photonics News 11, 24-28 (2000).

Solid-State Electron. (1)

L. R. Dalton, P. A. Sullivan, D. H. Bale, and B. C , Olbricht, "Theory-Inspired Nano-Engineering of Photonic and Electronic Materials: Noncentrosymmetric Charge-Transfer Electro-Optic Materials," Solid-State Electron. 51, 1263-1277 (2007).
[CrossRef]

Other (1)

H. Sun, L. Dalton, and A. Chen, "Systematic Design and Simulation of Polymer Microring Resonators with the Combination of Beam Propagation Method and Matrix Model," in LEOS Summer Topical Meetings, 2007 Digest of the IEEE (Portland, OR, 2007), pp. 217-218.

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