Abstract

We present an Ytterbium fibre laser operating in the Q-switch regime by using a Micro- Opto- Electro- Mechanical System (MOEMS) of novel design. The cantilever-type micro-mirror is designed to generate short laser pulses with duration between 20 ns and 100 ns at repetition rates ranging from a few kilohertz up to 800 kHz. The bent profile of this new type of MOEMS ensures a high modulation rate of the laser cavity losses while keeping a high actuating frequency.

© 2008 Optical Society of America

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  1. M. Laroche, A. M. Chardon, J. Nilsson, D. P. Shepherd and W. A. Clarkson, "Compact diode-pumped passively Q-switched tunable Er-Yb double-clad fiber laser," Opt. Lett. 27, 1980-1982 (2002).
    [CrossRef]
  2. I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).
  3. A. F. El-Sherif and A. K. Terence, "High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator," Opt. Commun. 218, 337-344 (2003).
    [CrossRef]
  4. D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
    [CrossRef]
  5. T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
    [CrossRef]
  6. F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
    [CrossRef]
  7. W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
    [CrossRef]
  8. Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
    [CrossRef]
  9. D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
    [CrossRef]
  10. Y. Joeng, Y. Kim, A. Liem, K. Moerl, S. Hoefer, A. Tuennermann and K. Oh, "Q-switching of Yb3+-doped fiber laser using a novel micro-optical waveguide on micro-actuating platform light modulator," Opt. Express 13, 10302-10309 (2005).
    [CrossRef] [PubMed]
  11. C. J. Gaeta. M. J. F. Digonnet and H. J. Shaw, "Pulse Characteristics of Q-Switched Fiber Lasers," J. Lightwave Technol.,  LT-5, 1645-1651 (1987).
    [CrossRef]
  12. A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
    [CrossRef]
  13. P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.
  14. G. M. Rebeiz, "Mechanics of Beam and Diaphragm Structures," in RF MEMS, (John Wiley & Sons, Hoboken, New Jersey, 2003).

2007 (1)

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

2006 (4)

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

2005 (2)

Y. Joeng, Y. Kim, A. Liem, K. Moerl, S. Hoefer, A. Tuennermann and K. Oh, "Q-switching of Yb3+-doped fiber laser using a novel micro-optical waveguide on micro-actuating platform light modulator," Opt. Express 13, 10302-10309 (2005).
[CrossRef] [PubMed]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

2003 (1)

A. F. El-Sherif and A. K. Terence, "High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator," Opt. Commun. 218, 337-344 (2003).
[CrossRef]

2002 (1)

1999 (1)

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

1987 (1)

C. J. Gaeta. M. J. F. Digonnet and H. J. Shaw, "Pulse Characteristics of Q-Switched Fiber Lasers," J. Lightwave Technol.,  LT-5, 1645-1651 (1987).
[CrossRef]

1985 (1)

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

Agger, S.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

Aksyuk, V. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Alcock, I. P.

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

Andersen, T. V.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

Andrés, M. V.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Arney, S.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Baker, M. R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Barthélémy, A.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Blondy, P.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.

Bouyge, D.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.

Bower, J. E.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Chardon, A. M.

Cirelli, R. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Clarkson, W. A.

Couderc, V.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Crunteanu, A

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Crunteanu, A.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.

Cruz, J. L.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Dändliker, R.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

de Rooij, N. F.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Delgado-Pinar, M.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Diez, A.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Duchowicz, R.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Dyson, H.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

El-Sherif, A. F.

A. F. El-Sherif and A. K. Terence, "High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator," Opt. Commun. 218, 337-344 (2003).
[CrossRef]

Eom, T. J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Ferguson, A. I.

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

Ferry, E. J.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Fullowan, R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Gaeta, C. J.

C. J. Gaeta. M. J. F. Digonnet and H. J. Shaw, "Pulse Characteristics of Q-Switched Fiber Lasers," J. Lightwave Technol.,  LT-5, 1645-1651 (1987).
[CrossRef]

Grossard, L.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Hanna, D. C.

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

Herzig, H. P.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Hoefer, S.

Joeng, Y.

Keiding, S. R.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

Kim, Y.

Klemens, F. P.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Ko, D.-K.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Kornblit, A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Lai, W. Y.-C.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Laroche, M.

Lee, J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Lee, Y. L.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Lhermite, J.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

Liem, A.

Mansfield, W. M.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Marxer, C.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Miner, J. F.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Moerl, K.

Nilsson, J.

Noh, Y.-C.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Oh, K.

Pai, C. S.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Pardo, F.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Pérez-Millan, P.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

Peter, Y.-A.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Pioger, P. H.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Pothier, A.

P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.

Rochat, E.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Russo, N.A.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Ryf, R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Sabourdy, D.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Shepherd, D. P.

Shin, W.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Simon, M. E.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Sorsch, T. W.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Taylor, J. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Terence, A. K.

A. F. El-Sherif and A. K. Terence, "High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator," Opt. Commun. 218, 337-344 (2003).
[CrossRef]

Tropper, A. C.

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

Tuennermann, A.

Yu, B.-A.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Yu, T. J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Zalvidea, D. D.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

Electron. Lett. (1)

I. P. Alcock, A. C. Tropper, A. I. Ferguson and D. C. Hanna, "Q-switched operation of a neodymium-doped monomode fibre laser," Electron. Lett. 272, 84-85 (1985).

J. Lightwave Technol. (1)

C. J. Gaeta. M. J. F. Digonnet and H. J. Shaw, "Pulse Characteristics of Q-Switched Fiber Lasers," J. Lightwave Technol.,  LT-5, 1645-1651 (1987).
[CrossRef]

J. Opt. A: Pure Appl. Opt. (1)

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger and A. Barthélémy, "Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system," J. Opt. A: Pure Appl. Opt. 8,S347-S351 (2006).
[CrossRef]

Microelectron. Eng. (1)

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson and S. Arney, "Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators," Microelectron. Eng. 84,1157-1161 (2007).
[CrossRef]

Microsystems Technologies (1)

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard and A. Barthélémy, "Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers," Microsystems Technologies 13, 1607-1613 (2006).
[CrossRef]

Opt. Commun. (3)

A. F. El-Sherif and A. K. Terence, "High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator," Opt. Commun. 218, 337-344 (2003).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz and M. V. Andrés, "High-repetition rate acoustic-induced Q-switched all-fiber laser," Opt. Commun. 244, 315-319 (2005).
[CrossRef]

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, "All-fiber actively Q-switched Yb-doped laser," Opt. Commun. 260, 251-256 (2006).
[CrossRef]

Opt. Eng. (1)

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer and N. F. de Rooij, "Pulsed fiber laser using micro-electro-mechanical mirrors," Opt. Eng. 38, 636-640 (1999).
[CrossRef]

Opt. Express (2)

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee and D.-K. Ko, "Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array," Opt. Express,  14, 5357-5364 (2006).
[CrossRef]

Y. Joeng, Y. Kim, A. Liem, K. Moerl, S. Hoefer, A. Tuennermann and K. Oh, "Q-switching of Yb3+-doped fiber laser using a novel micro-optical waveguide on micro-actuating platform light modulator," Opt. Express 13, 10302-10309 (2005).
[CrossRef] [PubMed]

Opt. Lett. (1)

Other (2)

P. Blondy, D. Bouyge, A. Crunteanu and A. Pothier, "A wide Tuning Range MEMS Switched Patch Antenna," IEEE MTT-S, San Francisco, USA, June 11-16, 2006.

G. M. Rebeiz, "Mechanics of Beam and Diaphragm Structures," in RF MEMS, (John Wiley & Sons, Hoboken, New Jersey, 2003).

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Figures (7)

Fig. 1.
Fig. 1.

Design and principle of operation of the cantilever-type micro-mirror.

Fig. 2.
Fig. 2.

Scanning Electron Microscope photography of a MOEMS row of different lengths (200 to 350 microns).

Fig. 3.
Fig. 3.

(a). Surface reconstruction of 4 cantilever-type micro-mirrors from interferometric measurements. 3(b) Corresponding geometrical profile of the longest MOEMS (125-µm long).

Fig. 4.
Fig. 4.

Experimental setup for the observation of reflectivity variations; 2: measure of reflectivity; 4: power level control. The green rays define the beam propagation before and after reflection on the MOEMS for the on-state case (V≠0), i.e. when the beam is correctly redirected towards the laser cavity. The red rays represent the deflected beam for the off-state (V=0). The hatched area shows the light losses, imposed by the deflection. N.A.: Numerical Aperture.

Fig. 5.
Fig. 5.

Applied voltage (in black) and reflected optical signal (in red) showing the mechanical oscillations of a 100 µm-long cantilever for three different positions of the incident focused beam along the micro-mirror length: a) close to the mobile extremity of the cantilever, b) at the middle of the membrane length, c) close to the anchorage.

Fig. 7.
Fig. 7.

The experimental design of the fibre laser system including the optical MOEMS device.

Fig. 8.
Fig. 8.

Laser pulses shape at different micro-mirror actuation frequencies: a) 50 kHz and b) 200 kHz; c) 400 kHz and d) 800 kHz.

Equations (1)

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ω = 1.019 h L 2 E ρ [ 14 ]

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