Abstract

We present an Ytterbium fibre laser operating in the Q-switch regime by using a Micro- Opto- Electro- Mechanical System (MOEMS) of novel design. The cantilever-type micro-mirror is designed to generate short laser pulses with duration between 20 ns and 100 ns at repetition rates ranging from a few kilohertz up to 800 kHz. The bent profile of this new type of MOEMS ensures a high modulation rate of the laser cavity losses while keeping a high actuating frequency.

© 2008 Optical Society of America

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  1. M. Laroche, A. M. Chardon, J. Nilsson, D. P. Shepherd, and W. A. Clarkson, “Compact diode-pumped passively Q-switched tunable Er-Yb double-clad fiber laser,” Opt. Lett. 27, 1980–1982 (2002).
    [CrossRef]
  2. I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).
  3. A. F. El-Sherif and A. K. Terence, “High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator,” Opt. Commun. 218, 337–344 (2003).
    [CrossRef]
  4. D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
    [CrossRef]
  5. T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
    [CrossRef]
  6. F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
    [CrossRef]
  7. W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
    [CrossRef]
  8. Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
    [CrossRef]
  9. D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
    [CrossRef]
  10. Y. Joeng, Y. Kim, A. Liem, K. Moerl, S. Hoefer, A. Tuennermann, and K. Oh, “Q-switching of Yb3+-doped fiber laser using a novel micro-optical waveguide on micro-actuating platform light modulator,” Opt. Express 13, 10302–10309 (2005).
    [CrossRef] [PubMed]
  11. C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
    [CrossRef]
  12. A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
    [CrossRef]
  13. P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.
  14. G. M. Rebeiz, “Mechanics of Beam and Diaphragm Structures,” in RF MEMS, (John Wiley & Sons, Hoboken, New Jersey, 2003).

2007 (1)

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

2006 (4)

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

2005 (2)

Y. Joeng, Y. Kim, A. Liem, K. Moerl, S. Hoefer, A. Tuennermann, and K. Oh, “Q-switching of Yb3+-doped fiber laser using a novel micro-optical waveguide on micro-actuating platform light modulator,” Opt. Express 13, 10302–10309 (2005).
[CrossRef] [PubMed]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

2003 (1)

A. F. El-Sherif and A. K. Terence, “High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator,” Opt. Commun. 218, 337–344 (2003).
[CrossRef]

2002 (1)

1999 (1)

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

1987 (1)

C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
[CrossRef]

1985 (1)

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

Agger, S.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

Aksyuk, V. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Alcock, I. P.

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

Andersen, T. V.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

Andrés, M. V.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Arney, S.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Baker, M. R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Barthélémy, A.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Blondy, P.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.

Bouyge, D.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.

Bower, J. E.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Chardon, A. M.

Cirelli, R. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Clarkson, W. A.

Couderc, V.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

Crunteanu, A

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Crunteanu, A.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.

Cruz, J. L.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Dändliker, R.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

de Rooij, N. F.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Delgado-Pinar, M.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Diez, A.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Digonnet, M. J. F.

C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
[CrossRef]

Duchowicz, R.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Dyson, H.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

El-Sherif, A. F.

A. F. El-Sherif and A. K. Terence, “High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator,” Opt. Commun. 218, 337–344 (2003).
[CrossRef]

Eom, T. J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Ferguson, A. I.

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

Ferry, E. J.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Fullowan, R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Gaeta, C. J.

C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
[CrossRef]

Grossard, L.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Hanna, D. C.

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

Herzig, H. P.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Hoefer, S.

Joeng, Y.

Keiding, S. R.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

Kim, Y.

Klemens, F. P.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Ko, D.-K.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Kornblit, A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Lai, W. Y.-C.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Laroche, M.

Lee, J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Lee, Y. L.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Lhermite, J.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

Liem, A.

Mansfield, W. M.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Marxer, C.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Miner, J. F.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Moerl, K.

Nilsson, J.

Noh, Y.-C.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Oh, K.

Pai, C. S.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Pardo, F.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Pérez-Millan, P.

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

Peter, Y.-A.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Pioger, P. H.

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Pothier, A.

P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.

Rebeiz, G. M.

G. M. Rebeiz, “Mechanics of Beam and Diaphragm Structures,” in RF MEMS, (John Wiley & Sons, Hoboken, New Jersey, 2003).

Rochat, E.

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Russo, N.A.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Ryf, R.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Sabourdy, D.

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Shaw, H. J.

C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
[CrossRef]

Shepherd, D. P.

Shin, W.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Simon, M. E.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Sorsch, T. W.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Taylor, J. A.

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Terence, A. K.

A. F. El-Sherif and A. K. Terence, “High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator,” Opt. Commun. 218, 337–344 (2003).
[CrossRef]

Tropper, A. C.

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

Tuennermann, A.

Yu, B.-A.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Yu, T. J.

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Zalvidea, D. D.

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

Electron. Lett. (1)

I. P. Alcock, A. C. Tropper, A. I. Ferguson, and D. C. Hanna, “Q-switched operation of a neodymium-doped monomode fibre laser,” Electron. Lett. 272, 84–85 (1985).

J. Lightwave Technol. (1)

C. J. Gaeta, M. J. F. Digonnet, and H. J. Shaw, “Pulse Characteristics of Q-Switched Fiber Lasers,” J. Lightwave Technol.,  LT-5, 1645–1651 (1987).
[CrossRef]

J. Opt. A: Pure Appl. Opt. (1)

A Crunteanu, D. Bouyge, D. Sabourdy, P. Blondy, V. Couderc, L. Grossard, P. H. Pioger, and A. Barthélémy, “Deformable micro-electro-mechanical mirror integration in a fibre laser Q-switch system,” J. Opt. A: Pure Appl. Opt. 8, S347–S351 (2006).
[CrossRef]

Microelectron. Eng. (1)

F. Pardo, R. A. Cirelli, E. J. Ferry, W. Y.-C. Lai, F. P. Klemens, J. F. Miner, C. S. Pai, J. E. Bower, W. M. Mansfield, A. Kornblit, T. W. Sorsch, J. A. Taylor, M. R. Baker, R. Fullowan, M. E. Simon, V. A. Aksyuk, R. Ryf, H. Dyson, and S. Arney, “Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators,” Microelectron. Eng. 84, 1157–1161 (2007).
[CrossRef]

Microsystems Technologies (1)

D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, and A. Barthélémy, “Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers,” Microsystems Technologies 13, 1607–1613 (2006).
[CrossRef]

Opt. Commun. (3)

A. F. El-Sherif and A. K. Terence, “High-energy, high-brightness Q-switched Tm3+-doped fiber laser using an electro-optic modulator,” Opt. Commun. 218, 337–344 (2003).
[CrossRef]

D. D. Zalvidea, N.A. Russo, R. Duchowicz, M. Delgado-Pinar, A. Diez, J. L. Cruz, and M. V. Andrés, “High-repetition rate acoustic-induced Q-switched all-fiber laser,” Opt. Commun. 244, 315–319 (2005).
[CrossRef]

T. V. Andersen, P. Pérez-Millan, S. R. Keiding, S. Agger, R. Duchowicz, and M. V. Andrés, “All-fiber actively Q-switched Yb-doped laser,” Opt. Commun. 260, 251–256 (2006).
[CrossRef]

Opt. Eng. (1)

Y.-A. Peter, H. P. Herzig, E. Rochat, R. Dändliker, C. Marxer, and N. F. de Rooij, “Pulsed fiber laser using micro-electro-mechanical mirrors,” Opt. Eng. 38, 636–640 (1999).
[CrossRef]

Opt. Express (1)

Opt. Express, (1)

W. Shin, B.-A. Yu, Y. L. Lee, T. J. Yu, T. J. Eom, Y.-C. Noh, J. Lee, and D.-K. Ko, “Tunable Q-switched erbium-doped fiber laser based on digital micro-mirror array,” Opt. Express, 14, 5357–5364 (2006).
[CrossRef]

Opt. Lett. (1)

Other (2)

P. Blondy, D. Bouyge, A. Crunteanu, and A. Pothier, “A wide Tuning Range MEMS Switched Patch Antenna,” IEEE MTT-S, San Francisco, USA, June 11–16, 2006.

G. M. Rebeiz, “Mechanics of Beam and Diaphragm Structures,” in RF MEMS, (John Wiley & Sons, Hoboken, New Jersey, 2003).

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Figures (7)

Fig. 1.
Fig. 1.

Design and principle of operation of the cantilever-type micro-mirror.

Fig. 2.
Fig. 2.

Scanning Electron Microscope photography of a MOEMS row of different lengths (200 to 350 microns).

Fig. 3.
Fig. 3.

(a). Surface reconstruction of 4 cantilever-type micro-mirrors from interferometric measurements. 3(b) Corresponding geometrical profile of the longest MOEMS (125-µm long).

Fig. 4.
Fig. 4.

Experimental setup for the observation of reflectivity variations; 2: measure of reflectivity; 4: power level control. The green rays define the beam propagation before and after reflection on the MOEMS for the on-state case (V≠0), i.e. when the beam is correctly redirected towards the laser cavity. The red rays represent the deflected beam for the off-state (V=0). The hatched area shows the light losses, imposed by the deflection. N.A.: Numerical Aperture.

Fig. 5.
Fig. 5.

Applied voltage (in black) and reflected optical signal (in red) showing the mechanical oscillations of a 100 µm-long cantilever for three different positions of the incident focused beam along the micro-mirror length: a) close to the mobile extremity of the cantilever, b) at the middle of the membrane length, c) close to the anchorage.

Fig. 7.
Fig. 7.

The experimental design of the fibre laser system including the optical MOEMS device.

Fig. 8.
Fig. 8.

Laser pulses shape at different micro-mirror actuation frequencies: a) 50 kHz and b) 200 kHz; c) 400 kHz and d) 800 kHz.

Equations (1)

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ω = 1.019 h L 2 E ρ [ 14 ]

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