Abstract

A Michelson interferometer based on an optical set-up allowing multiple reflection between two plane mirrors performs the multiplication of the optical path by a factor N, proportionally increasing the resolution of the measurement. A multiplication factor of almost two orders of magnitude has been demonstrated with a simple set-up. The technique can be applied to any interferometric measurement where the classical interferometer limits due to fringe nonlinearities and quantum noise are an issue. Applications in precision engineering, vibration analysis, nanometrology, and spectroscopy are foreseen.

© 2008 Optical Society of America

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  1. A. A. Michelson and E. W. Morley, "On the Relative Motion of the Earth and the Luminiferous Ether," Am. J. Sci. 34, 333-335 (1887).
  2. M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
    [CrossRef]
  3. P. L. M. Heydemann, "Determination and correction of quadrature fringe measurement errors in interferometers," Appl. Opt. 20, 3382-3384 (1981).
    [CrossRef]
  4. W. How and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng. 14,91-98 (1992).
    [CrossRef]
  5. EMRP T3.J1.4.NANOTRACE "New traceability routes for nanometrology," www.emrponline.eu.
  6. M. Pisani and M. Astrua, "Angle apmplification for nanoradian measurements," Appl. Opt. 45, 1725-1729 (2006).
    [CrossRef]

2006

1992

W. How and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng. 14,91-98 (1992).
[CrossRef]

1989

M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
[CrossRef]

1981

1887

A. A. Michelson and E. W. Morley, "On the Relative Motion of the Earth and the Luminiferous Ether," Am. J. Sci. 34, 333-335 (1887).

Astrua, M.

Heydemann, P. L. M.

How, W.

W. How and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng. 14,91-98 (1992).
[CrossRef]

Michelson, A. A.

A. A. Michelson and E. W. Morley, "On the Relative Motion of the Earth and the Luminiferous Ether," Am. J. Sci. 34, 333-335 (1887).

Morley, E. W.

A. A. Michelson and E. W. Morley, "On the Relative Motion of the Earth and the Luminiferous Ether," Am. J. Sci. 34, 333-335 (1887).

Nakayama, K.

M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
[CrossRef]

Pisani, M.

Tanaka, M.

M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
[CrossRef]

Wilkening, G.

W. How and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng. 14,91-98 (1992).
[CrossRef]

Yamagami, T.

M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
[CrossRef]

Am. J. Sci.

A. A. Michelson and E. W. Morley, "On the Relative Motion of the Earth and the Luminiferous Ether," Am. J. Sci. 34, 333-335 (1887).

Appl. Opt.

IEEE Trans. Instrum. Meas.

M. Tanaka, T. Yamagami, and K. Nakayama, "Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels," IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
[CrossRef]

Prec. Eng.

W. How and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Prec. Eng. 14,91-98 (1992).
[CrossRef]

Other

EMRP T3.J1.4.NANOTRACE "New traceability routes for nanometrology," www.emrponline.eu.

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