Abstract

We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers, Bragg reflectors/couplers and various interferometers.

© 2008 Optical Society of America

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  7. C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
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    [CrossRef]
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2008 (1)

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

2007 (2)

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

C. L. Lee, E. Gu, and M. D. Dawson, "Micro-cylindrical and micro-ring lenses in CVD diamond," Diamond Relat. Mater. 16,944-948 (2007).
[CrossRef]

2006 (3)

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

2005 (2)

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

2004 (2)

D. S. Hwang, T. Saito, and N. Fujimori, "New etching process for device fabrication using diamond," Diamond Relat. Mater. 13,2207-2210 (2004).
[CrossRef]

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

2003 (1)

2002 (2)

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

2001 (1)

E. Knill, R. Laflamme, and G. J. Milburn, "A scheme for efficient quantum computation with linear optics," Nature 409, 46-52 (2001).
[CrossRef] [PubMed]

Ampem-Lassen, E.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Ando, Y.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

Baldwin, J. W.

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Beveratos, A.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Briouri, R.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Butler, J. E.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Casey, B. G.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Choi, H. W.

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

Choi, Y-S.

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Dawson, M. D.

C. L. Lee, E. Gu, and M. D. Dawson, "Micro-cylindrical and micro-ring lenses in CVD diamond," Diamond Relat. Mater. 16,944-948 (2007).
[CrossRef]

Dawson, M.D.

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

Dobson, P. S.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Enlund, J.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

Feygelson, T.

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Fujimori, N.

D. S. Hwang, T. Saito, and N. Fujimori, "New etching process for device fabrication using diamond," Diamond Relat. Mater. 13,2207-2210 (2004).
[CrossRef]

Gacoin, T.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Gibson, B. C.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Grangier, P.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Greentree, A. D.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Gu, E.

C. L. Lee, E. Gu, and M. D. Dawson, "Micro-cylindrical and micro-ring lenses in CVD diamond," Diamond Relat. Mater. 16,944-948 (2007).
[CrossRef]

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

Hirao, T.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

Hiscocks, M. P.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Houston, B. H.

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

Hu, E. L.

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Huntington, S. T.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Hwang, D. S.

D. S. Hwang, T. Saito, and N. Fujimori, "New etching process for device fabrication using diamond," Diamond Relat. Mater. 13,2207-2210 (2004).
[CrossRef]

Isberg, J.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

Jamieson, D. N.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Kaalund, C. J.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Karlsson, M.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

M. Karlsson and F. Nikolajeff, "Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region," Opt. Express 11,502-507 (2003).
[CrossRef] [PubMed]

Knill, E.

E. Knill, R. Laflamme, and G. J. Milburn, "A scheme for efficient quantum computation with linear optics," Nature 409, 46-52 (2001).
[CrossRef] [PubMed]

Kobashi, K.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

Kühn, S.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Ladouceur, F.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Laflamme, R.

E. Knill, R. Laflamme, and G. J. Milburn, "A scheme for efficient quantum computation with linear optics," Nature 409, 46-52 (2001).
[CrossRef] [PubMed]

Lee, C. L.

C. L. Lee, E. Gu, and M. D. Dawson, "Micro-cylindrical and micro-ring lenses in CVD diamond," Diamond Relat. Mater. 16,944-948 (2007).
[CrossRef]

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

Lee, J. C.

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Lister, K. A.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Macintyre, D. S.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Milburn, G. J.

E. Knill, R. Laflamme, and G. J. Milburn, "A scheme for efficient quantum computation with linear optics," Nature 409, 46-52 (2001).
[CrossRef] [PubMed]

Moore, D.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Murphy, H.

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

Nikolajeff, F.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

M. Karlsson and F. Nikolajeff, "Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region," Opt. Express 11,502-507 (2003).
[CrossRef] [PubMed]

Nishibayashi, Y.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

Olivero, P.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Olsson, J.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

Oura, K.

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

Pate, B. B.

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Poizat, J-P.

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

Prawer, S.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Rabeau, J.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Reichart, P.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Rubanov, S.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Saito, T.

D. S. Hwang, T. Saito, and N. Fujimori, "New etching process for device fabrication using diamond," Diamond Relat. Mater. 13,2207-2210 (2004).
[CrossRef]

Salzman, J.

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Simpson, D.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Thoms, S.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Trpkovski, S.

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

Twitchen, D. J.

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

Wang, C. F.

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Weaver, J. M. R.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Wilkinson, C. D. W.

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Yang, J.

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Zalalutdinov, M.

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

Zalalutdinov, M. K.

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Adv. Mater. (1)

P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, "Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond," Adv. Mater. 17,2427-2430 (2005).
[CrossRef]

Appl. Phys. Lett. (1)

C. F. Wang, Y-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, "Observation of whispering gallery modes in nanocrystalline diamond microdisks," Appl. Phys. Lett. 90,081110-1 (2007).
[CrossRef]

Carbon (1)

J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D. J. Twitchen, "Anisotropic dry etching of boron doped single crystal CVD diamond," Carbon 43,1839-1842 (2005).
[CrossRef]

Diamond Relat. Mater. (6)

C. L. Lee, E. Gu, and M. D. Dawson, "Micro-cylindrical and micro-ring lenses in CVD diamond," Diamond Relat. Mater. 16,944-948 (2007).
[CrossRef]

C. L. Lee, H. W. Choi, E. Gu, M.D. Dawson, and H. Murphy, "Fabrication and characterization of diamond micro-optics," Diamond Relat. Mater. 15,725-728 (2006).
[CrossRef]

D. S. Hwang, T. Saito, and N. Fujimori, "New etching process for device fabrication using diamond," Diamond Relat. Mater. 13,2207-2210 (2004).
[CrossRef]

Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura, "Smooth and high-rate reactive ion etching of diamond," Diamond Relat. Mater. 11,824-827 (2002).
[CrossRef]

M. P. Hiscocks, C. J. Kaalund, F. Ladouceur, S. T. Huntington, B. C. Gibson, S. Trpkovski, D. Simpson, E. Ampem-Lassen, S. Prawer, and J. E. Butler, "Reactive ion etching of waveguide structures in diamond," Diamond Relat. Mater. 17,1831-1834 (2008).
[CrossRef]

J. W. Baldwin, M. K. Zalalutdinov, T. Feygelson, B. B. Pate, J. E. Butler, and B. H. Houston, "Nanocrystalline diamond resonator array for RF signal processing," Diamond Relat. Mater. 15,2061-2067 (2006).
[CrossRef]

Eur. Phys. J. D (1)

A. Beveratos, S. Kühn, R. Briouri, T. Gacoin, J-P. Poizat, and P. Grangier, "Room temperature stable singlephoton source," Eur. Phys. J. D 18, 191-196 (2002).
[CrossRef]

J. Vac. Sci. Technol. B (1)

J. W. Baldwin, M. Zalalutdinov, T. Feygelson, J. E. Butler, and B. H. Houston, "Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films," J. Vac. Sci. Technol. B 24,50 -54 (2006).
[CrossRef]

Microelectron. Eng. (1)

K. A. Lister, B. G. Casey, P. S. Dobson, S. Thoms, D. S. Macintyre, C. D. W. Wilkinson, and J. M. R. Weaver, "Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond," Microelectron. Eng. 73-74,319-322 (2004).
[CrossRef]

Nature (1)

E. Knill, R. Laflamme, and G. J. Milburn, "A scheme for efficient quantum computation with linear optics," Nature 409, 46-52 (2001).
[CrossRef] [PubMed]

Opt. Express (1)

Other (8)

<jrn>. Y. Ando, Y. Nishibayashi, and A. Sawabe, "‘Nano-rods of single crystalline diamond," Diamond Relat. Mater. 13,633-637 (2004).</jrn>
[CrossRef]

P. W. Leech, G. K. Reeves, and A. S. Holland, "Patterning and reactive ion etching of diamond films using light coupling masks," in: Mater. Res. Soc. Symp. Proc. 820, R5.2.1-R5.2.6 (2004).

C. H. Bennett and G. Brassard, "Quantum cryptography: Public key distribution and coin tossing," Proceedings of the IEEE International Conference on Computer Systems and Signal Processing, (Institute of Electrical and Electronics Engineers, Bangalore, 1984), pp. 175-179.

G. E. Harlow, The nature of diamonds (Cambridge: The Press Syndicate of the University of Cambridge, 1998).

D. Twitchen, "High purity diamond growth" Quantum Diamond Workshop, July 18th Victoria (2007).

FIMMWAVE, Photon Design, http://www.photond.com.

F. Ladouceur and J. D. Love, Silica-Based Buried Channel Waveguides and Devices (Chapman & Hall, 1995), Chap. 9.

M. B. H. Breese, D. N. Jamieson, and P. J. C. King, Material Analysis Using a Nuclear Microprobe, (John Wiley and Sons Inc. New York, 1996).

Supplementary Material (1)

» Media 1: MPG (3674 KB)     

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Figures (8)

Fig. 1.
Fig. 1.

Single TE mode of diamond ridge waveguide

Fig. 2.
Fig. 2.

Plot of substrate loss for varying airgap thickness in diamond ridge waveguide structure. a. Analytical treatment. b. Simulated using FIMMWAVE.

Fig. 3.
Fig. 3.

TRIM Monte Carlo simulation of the damage density profile induced by 2 MeV He +ions.

Fig. 4.
Fig. 4.

Optical microscope reflection image of the surface of reactive ion etched sample. 7 ridge waveguide structures can be seen running horizontally across the sample. The waveguides range in length from 1 mm up to 2.7 mm. RIE depth is 1.5 µm.

Fig. 5.
Fig. 5.

SEM image of total internal reflection mirror cut into one end of the waveguide.

Fig. 6.
Fig. 6.

Optical microscope images of the waveguide with graphite etched from beneath structure. (a) depicts a transmission image and (b) shows a reflection image. Both image widths are ~1mm.

Fig. 7.
Fig. 7.

Intensity plot for second order mode of fabricated ridge waveguide.

Fig. 8.
Fig. 8.

(a) Schematic of the input waveguide coupling and output light-collection system. (b) and (c) show 80 µm section of waveguide with light coupling in through mirror in bottom right and the multimode output from the mirror in top left corner. (d) shows a close up of mode pattern on output mirror, the variation in the waveguide output modal pattern due to differing input launch conditions can be seen online (Media 1).

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