Abstract

Electrostatic comb-drive micro actuator with submicron comb fingers was connected to silicon microring resonator to consist a wavelength-selective add-drop switch at 1.5µm wavelength with variable coupling mechanism. A 500nm wide 260nm thick 63.4µm long silicon microring waveguide was suspended in air with low-loss suspension arms. The air gap between the microring and the input/output waveguides was adjusted by the voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input port to a drop port was varied 32.9dB by applying the voltages from 0V to 28.2V. At 28.2V, transmittance from the input port to a through port decreased by 7.83dB from that at 0V, and 55% of the intensity was transmitted to the drop port. The full-width-half-maximum bandwidth of the dropped light was 0.5nm, corresponding to a Q-value of 3150.

© 2008 Optical Society of America

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  1. B. Jalali and S. Fathpour, "Silicon photonics," J. Lightwave Technol. 24,4600-4615 (2006).
    [CrossRef]
  2. H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
    [CrossRef]
  3. A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
    [CrossRef]
  4. W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
    [CrossRef]
  5. K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
    [CrossRef]
  6. A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
    [CrossRef]
  7. E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
    [CrossRef]
  8. A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
    [CrossRef] [PubMed]
  9. C. Gunn, "CMOS photonics for high-speed interconnects," IEEE Micro,  26,58-66 (2006).
    [CrossRef]
  10. T. Kato, S. Suzuki, Y. Kokubun, S. T. Chu, "Coupling-loss reduction of a vertically coupled microring resonator filter by spot-size matched busline waveguide," Appl. Opt. 41,4394-4399 (2002).
    [CrossRef] [PubMed]
  11. T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43,1002-1005 (2004).
    [CrossRef]
  12. Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
    [CrossRef]
  13. W. M. J. Green, R. L. Lee, G. A. DeRose, A. Scherer, A. Yariv, "Hybrid InGaAsP-InP Mach-Zehnder racetrack resonator for thermooptic switching and coupling control," Opt. Express 13,1651-1659 (2005).
    [CrossRef] [PubMed]
  14. U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
    [CrossRef]
  15. T. J. Wang, C. H. Chu, C. Y. Lin, "Electro-optically tunable microring resonators on lithium niobate," Opt. Lett. 32,2777-2779 (2007).
    [CrossRef] [PubMed]
  16. K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
    [CrossRef]
  17. G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
    [CrossRef]
  18. J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
    [CrossRef]
  19. T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
    [CrossRef]
  20. L. Martines and M. Lipson, "High confinement suspended micro-ring resonators in silicon-on-insulator," Opt. Express 14,6259-6263 (2006).
    [CrossRef]
  21. Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
    [CrossRef]
  22. K. Okamoto, Fundamentals of optical waveguides. Tokyo, Corona Press, pp.158-165 (1996).

2008

E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
[CrossRef]

2007

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

T. J. Wang, C. H. Chu, C. Y. Lin, "Electro-optically tunable microring resonators on lithium niobate," Opt. Lett. 32,2777-2779 (2007).
[CrossRef] [PubMed]

2006

L. Martines and M. Lipson, "High confinement suspended micro-ring resonators in silicon-on-insulator," Opt. Express 14,6259-6263 (2006).
[CrossRef]

B. Jalali and S. Fathpour, "Silicon photonics," J. Lightwave Technol. 24,4600-4615 (2006).
[CrossRef]

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
[CrossRef]

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
[CrossRef]

C. Gunn, "CMOS photonics for high-speed interconnects," IEEE Micro,  26,58-66 (2006).
[CrossRef]

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

2005

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

W. M. J. Green, R. L. Lee, G. A. DeRose, A. Scherer, A. Yariv, "Hybrid InGaAsP-InP Mach-Zehnder racetrack resonator for thermooptic switching and coupling control," Opt. Express 13,1651-1659 (2005).
[CrossRef] [PubMed]

2004

T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43,1002-1005 (2004).
[CrossRef]

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

2003

Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
[CrossRef]

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

2002

2001

A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
[CrossRef]

Arakawa, Y.

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

Baba, T.

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
[CrossRef]

Baets, R. G.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Beckx, S.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Bogaerts, W.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Bolivar, P. H.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Bopp, M.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Bulgan, E.

E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
[CrossRef]

Campbell, K.

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Chu, C. H.

Chu, S. T.

Chu, T.

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

Cohen, O.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Coronel, P.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Dainesi, P.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Declercq, M.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

DeRose, G. A.

Dumon, P.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Fainman, Y.

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Fathpour, S.

Fujita, H.

Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
[CrossRef]

Fukazawa, T.

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

Fukuta, Y.

Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
[CrossRef]

Goebuchi, Y.

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
[CrossRef]

Green, W. M. J.

Groisman, A.

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Gunn, C.

C. Gunn, "CMOS photonics for high-speed interconnects," IEEE Micro,  26,58-66 (2006).
[CrossRef]

Hane, K.

E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
[CrossRef]

Hara, G.

A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
[CrossRef]

Henschel, W.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Hirano, T.

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

Ionescu, A. M.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Ishida, S.

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

Ito, T.

T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43,1002-1005 (2004).
[CrossRef]

Jaenen, P.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Jalali, B.

Jones, R.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Kanamori, Y.

E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
[CrossRef]

Kato, T.

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
[CrossRef]

T. Kato, S. Suzuki, Y. Kokubun, S. T. Chu, "Coupling-loss reduction of a vertically coupled microring resonator filter by spot-size matched busline waveguide," Appl. Opt. 41,4394-4399 (2002).
[CrossRef] [PubMed]

Kobayashi, N.

G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
[CrossRef]

Kokubun, Y.

G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
[CrossRef]

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
[CrossRef]

T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43,1002-1005 (2004).
[CrossRef]

T. Kato, S. Suzuki, Y. Kokubun, S. T. Chu, "Coupling-loss reduction of a vertically coupled microring resonator filter by spot-size matched busline waveguide," Appl. Opt. 41,4394-4399 (2002).
[CrossRef] [PubMed]

Kurz, H.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Lee, M. M.

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

Lee, R. L.

Leuenberger, D.

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

Levy, U.

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Liao, L.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Lin, C. Y.

Lipson, M.

Liu, A.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Martines, L.

Monster, M.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Mookherjea, S.

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Moselund, K. E.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Motegi, A.

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

Nicolaescu, R.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Ohno, F.

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

Paniccia, M.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Rubin, D.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Samara-Bublo, D.

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Sasaki, A.

A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
[CrossRef]

Sasaki, K.

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

Scherer, A.

Sekiguchi, G.

G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
[CrossRef]

Skotnicki, T.

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Suzuki, S.

Taillaert, D.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Thourhout, D.V.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Toshiyoshi, H.

Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
[CrossRef]

Vorckel, A.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Wang, T. J.

Wiaux, V.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Wouters, J.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

Wu, M. C.

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

Yamada, H.

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

Yao, J.

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

Yariv, A.

Appl. Opt.

Appl. Phys. Lett.

E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92,101110 (2008).
[CrossRef]

U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88,11107 (2006).
[CrossRef]

Electron. Lett.

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide grating of 70x60?m2 size based on Si photonic wire waveguides," Electron. Lett. 41,801-802 (2005).
[CrossRef]

IEEE J. Sel. Topics Quantum Electron.

H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12,1371-1379 (2006).
[CrossRef]

IEEE J. Sel.Topics Quantum Electron.

W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel.Topics Quantum Electron. 12,1394-1401 (2006).
[CrossRef]

IEEE Micro

C. Gunn, "CMOS photonics for high-speed interconnects," IEEE Micro,  26,58-66 (2006).
[CrossRef]

IEEE Photon. Technol. Lett.

A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15,921-923 (2003).
[CrossRef]

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18,538-540 (2006).
[CrossRef]

G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18,2141-2143 (2006).
[CrossRef]

IEEE Sel. Topics Quantum Electron.

J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13,202-208 (2007).
[CrossRef]

J. Lightwave Technol.

Jpn. J. Appl. Phys.

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43,646-647 (2004).
[CrossRef]

Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42,3690-3694 (2003).
[CrossRef]

A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-?? optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40,L383-L385 (2001).
[CrossRef]

T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43,1002-1005 (2004).
[CrossRef]

Nature

A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature,  427,615-618 (2004).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Sensors Actuators A

K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A,  130-131,220-227 (2006).
[CrossRef]

Other

K. Okamoto, Fundamentals of optical waveguides. Tokyo, Corona Press, pp.158-165 (1996).

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Figures (4)

Fig. 1.
Fig. 1.

(a). Schematic diagram of microring resonator wavelength-selective add-drop switch with a microactuator, (b) Actual arrangement of the device components, (c) An application of the proposed device for the wavelength division multiplex system.

Fig. 2.
Fig. 2.

Optical micrograph of the fabricated microring wavelength-selective add-drop switch.

Fig. 3.
Fig. 3.

Infrared camera images, (a) microring switch without input light, (b) with 1557.94nm resonant input light at the actuator voltage of 28.2V, (c) with 1556.94nm off-resonant input light at 28.2V, (d) with 1557.94nm resonant input light at 0V.

Fig. 4.
Fig. 4.

(a). Drop efficiency measured as a function of the wavelength at the voltage of 28.2V, (b) drop efficiency measured as a function of the applied voltage at the resonant wavelength of 1576.04nm. The solid curves show the calculation results.

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