Abstract

Three-wavelength digital holography is applied to obtain surface height measurements over several microns of range, while simultaneously maintaining the low noise precision of the single wavelength phase measurement. The precision is preserved by the use of intermediate synthetic wavelength steps generated from the three wavelengths and the use of hierarchical optical phase unwrapping. As the complex wave-front of each wavelength can be captured simultaneously in one digital image, real-time performance is achievable.

© 2008 Optical Society of America

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References

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2008 (1)

2007 (4)

2006 (1)

2005 (1)

2003 (2)

2002 (1)

C. F. Lo, X. Peng, and L. Cai, “Surface normal guided method for two-dimensional phase unwrapping,” Optik 113, 439–447 (2002).

2000 (1)

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79–85 (2000).
[Crossref]

1999 (1)

1996 (3)

W. Osten, W. Nadeborn, and P. Andrä, “General hierarchical approach in absolute phase measurement,” Proc. SPIE 2860, 2–13 (1996).
[Crossref]

Y. Zou, G. Pedrini, and H. Tiziani, “Surface contouring in a video frame by changing the wavelength of a diode laser,” Opt. Eng. 35, 1074–1079 (1996).
[Crossref]

W. Nadeborn, P. Andra, and W. Osten “A Robust Procedure for Absolute Phase Measurement,” Opt. Laser Eng. 24, 245–260 (1996).
[Crossref]

1994 (1)

1993 (1)

1991 (2)

U. Skudayski and W. P. Jüptner, “Synthetic wavelength interferometry for the extension of the dynamic range,” Proc. SPIE 1508, 68–72. (1991).
[Crossref]

P. de Groot and S. Kishner, “Synthetic wavelength stabilization for two-color laser-diode interferometry,” Appl. Opt. 30, 4026–4033 (1991).
[Crossref] [PubMed]

1988 (1)

1985 (1)

1973 (1)

1967 (1)

J. W. Goodman and R. W. Lawrence, “Digital image formation from electronically detected holograms,” Appl. Phys. Lett. 11, 77–79 (1967).
[Crossref]

Andra, P.

W. Nadeborn, P. Andra, and W. Osten “A Robust Procedure for Absolute Phase Measurement,” Opt. Laser Eng. 24, 245–260 (1996).
[Crossref]

Andrä, P.

W. Osten, W. Nadeborn, and P. Andrä, “General hierarchical approach in absolute phase measurement,” Proc. SPIE 2860, 2–13 (1996).
[Crossref]

Bevilacqua, F.

Bingham, P. R

K. W. Tobin, P. R Bingham, and J. R Price, “Optical Spatial Heterodyned Interferometry and Inspection of Micro-Electro-Mechanical Systems,” Proc. SPIE,  6356, 63560G (2007).
[Crossref]

Cai, L.

C. F. Lo, X. Peng, and L. Cai, “Surface normal guided method for two-dimensional phase unwrapping,” Optik 113, 439–447 (2002).

Charrière, F.

Cheng, Y.-Y.

Colomb, T.

Coppola, G.

Cuche, E.

Dakoff, A.

Dandliker, R.

de Groot, P.

De Nicola, S.

Depeursinge, C.

Emery, Y.

Ferraro, P.

Finizio, A.

Gass, J.

Goodman, J. W.

J. W. Goodman and R. W. Lawrence, “Digital image formation from electronically detected holograms,” Appl. Phys. Lett. 11, 77–79 (1967).
[Crossref]

Grilli, S.

Huntley, J. M.

Ishii, Y.

Jüptner, W.

U. Schnars and W. Jüptner, Digital Holography: Digital Hologram Recording, Numerical Reconstruction, and Related Techniques (Springer, 2005).

Jüptner, W. P.

U. Schnars and W. P. Jüptner, “Direct recording of holograms by a CCD target and numerical reconstruction,” Appl. Opt. 33, 179–81 (1994).
[Crossref] [PubMed]

U. Skudayski and W. P. Jüptner, “Synthetic wavelength interferometry for the extension of the dynamic range,” Proc. SPIE 1508, 68–72. (1991).
[Crossref]

Kato, M.

Kim, M.

Kim, M. K.

Kishner, S.

Kühn, J.

Laporta, P.

Lawrence, R. W.

J. W. Goodman and R. W. Lawrence, “Digital image formation from electronically detected holograms,” Appl. Phys. Lett. 11, 77–79 (1967).
[Crossref]

Lo, C. F.

C. F. Lo, X. Peng, and L. Cai, “Surface normal guided method for two-dimensional phase unwrapping,” Optik 113, 439–447 (2002).

Lo, C. M.

Mann, C.

Marquet, P.

Miccio, L.

Montfort, F.

Nadeborn, W.

W. Nadeborn, P. Andra, and W. Osten “A Robust Procedure for Absolute Phase Measurement,” Opt. Laser Eng. 24, 245–260 (1996).
[Crossref]

W. Osten, W. Nadeborn, and P. Andrä, “General hierarchical approach in absolute phase measurement,” Proc. SPIE 2860, 2–13 (1996).
[Crossref]

Osellame, R.

Osten, W.

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79–85 (2000).
[Crossref]

W. Osten, W. Nadeborn, and P. Andrä, “General hierarchical approach in absolute phase measurement,” Proc. SPIE 2860, 2–13 (1996).
[Crossref]

W. Nadeborn, P. Andra, and W. Osten “A Robust Procedure for Absolute Phase Measurement,” Opt. Laser Eng. 24, 245–260 (1996).
[Crossref]

Parshall, D.

Paturzo, M.

Pedrini, G.

Y. Zou, G. Pedrini, and H. Tiziani, “Surface contouring in a video frame by changing the wavelength of a diode laser,” Opt. Eng. 35, 1074–1079 (1996).
[Crossref]

Peng, X.

C. F. Lo, X. Peng, and L. Cai, “Surface normal guided method for two-dimensional phase unwrapping,” Optik 113, 439–447 (2002).

Pierattini, G.

Polhemus, C.

Price, J. R

K. W. Tobin, P. R Bingham, and J. R Price, “Optical Spatial Heterodyned Interferometry and Inspection of Micro-Electro-Mechanical Systems,” Proc. SPIE,  6356, 63560G (2007).
[Crossref]

Prongue, D.

Saldner, H.

Schnars, U.

U. Schnars and W. P. Jüptner, “Direct recording of holograms by a CCD target and numerical reconstruction,” Appl. Opt. 33, 179–81 (1994).
[Crossref] [PubMed]

U. Schnars and W. Jüptner, Digital Holography: Digital Hologram Recording, Numerical Reconstruction, and Related Techniques (Springer, 2005).

Seebacher, S.

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79–85 (2000).
[Crossref]

Skudayski, U.

U. Skudayski and W. P. Jüptner, “Synthetic wavelength interferometry for the extension of the dynamic range,” Proc. SPIE 1508, 68–72. (1991).
[Crossref]

Thalmann, R.

Tiziani, H.

Y. Zou, G. Pedrini, and H. Tiziani, “Surface contouring in a video frame by changing the wavelength of a diode laser,” Opt. Eng. 35, 1074–1079 (1996).
[Crossref]

Tobin, K. W.

K. W. Tobin, P. R Bingham, and J. R Price, “Optical Spatial Heterodyned Interferometry and Inspection of Micro-Electro-Mechanical Systems,” Proc. SPIE,  6356, 63560G (2007).
[Crossref]

Wada, A.

Wagner, C.

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79–85 (2000).
[Crossref]

Warnasooriya, N.

Wyant, J. C.

Yu, L.

Zou, Y.

Y. Zou, G. Pedrini, and H. Tiziani, “Surface contouring in a video frame by changing the wavelength of a diode laser,” Opt. Eng. 35, 1074–1079 (1996).
[Crossref]

Appl. Opt. (7)

Appl. Phys. Lett. (1)

J. W. Goodman and R. W. Lawrence, “Digital image formation from electronically detected holograms,” Appl. Phys. Lett. 11, 77–79 (1967).
[Crossref]

Opt. Eng. (2)

Y. Zou, G. Pedrini, and H. Tiziani, “Surface contouring in a video frame by changing the wavelength of a diode laser,” Opt. Eng. 35, 1074–1079 (1996).
[Crossref]

C. Wagner, W. Osten, and S. Seebacher, “Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring,” Opt. Eng. 39, 79–85 (2000).
[Crossref]

Opt. Express (4)

Opt. Laser Eng. (1)

W. Nadeborn, P. Andra, and W. Osten “A Robust Procedure for Absolute Phase Measurement,” Opt. Laser Eng. 24, 245–260 (1996).
[Crossref]

Opt. Lett. (4)

Optik (1)

C. F. Lo, X. Peng, and L. Cai, “Surface normal guided method for two-dimensional phase unwrapping,” Optik 113, 439–447 (2002).

Proc. SPIE (3)

U. Skudayski and W. P. Jüptner, “Synthetic wavelength interferometry for the extension of the dynamic range,” Proc. SPIE 1508, 68–72. (1991).
[Crossref]

K. W. Tobin, P. R Bingham, and J. R Price, “Optical Spatial Heterodyned Interferometry and Inspection of Micro-Electro-Mechanical Systems,” Proc. SPIE,  6356, 63560G (2007).
[Crossref]

W. Osten, W. Nadeborn, and P. Andrä, “General hierarchical approach in absolute phase measurement,” Proc. SPIE 2860, 2–13 (1996).
[Crossref]

Other (1)

U. Schnars and W. Jüptner, Digital Holography: Digital Hologram Recording, Numerical Reconstruction, and Related Techniques (Springer, 2005).

Supplementary Material (1)

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