Abstract

A high speed and low loss silicon optical modulator based on carrier depletion has been made using an original structure consisting of a p-doped slit embedded in the intrinsic region of a lateral pin diode. This design allows a good overlap between the optical mode and carrier density variations. Insertion loss of 5 dB has been measured with a contrast ratio of 14 dB for a 3 dB bandwidth of 10 GHz.

© 2008 Optical Society of America

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  1. G.T. Reed, "The optical age of silicon," Nature 427, 595-596 (2004).
    [CrossRef]
  2. International Technology Roadmap for Semiconductors (ITRS), 2006 Edition, Interconnect topic.
  3. G. Chen, H. Chen, M. Haurylau, N. Nelson, P.M. Fauchet, E.G. Friedman, D. Albonesi "Predictions of CMOS compatible on-chip optical interconnect," SLIP’  05, 2-3 april 2005, San Francisco, USA.
  4. R.S. Jacobsen, K.N. Andersen, P.I. Borel, J. Fage-Pedersen, L.H. Frandsen, O. Hansen, M. Kristensen, A.V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsidri, A. Bjarklev, "Strained silicon as a new electro-optical material," Nature 441, 199-202 (2006).
    [CrossRef]
  5. P. Yu, J. Wu, B. Zhu, "Enhanced quantum-confined Pockels effect in SiGe superlattices," Phys. Rev. B 73, 235328 (2006).
    [CrossRef]
  6. Y. Kuo, Y.K. Lee, Y. Ge, S. Ren, J.E. Roth, T.I. Kamins, D.A.B. Miller, J.S. Harris, "Strong quantum-confined Stark effect in germanium quantum well structures on silicon," Nature 437, 1334-1336 (2005).
    [CrossRef]
  7. J.E. Roth, O. Fidaner, Y. Schaevitz, Y. Kuo, T.I. Kamins, J.S. Harris, D.A.B. Miller, "Optical modulator on silicon employing germanium quantum wells," Opt. Express 15, 5851-5859 (2007).
    [CrossRef]
  8. J. Liu, D. Pan, S. Jongthammanurak, S. Wada, L.C. Kimerling, J. Michel, "Design of monolithically integrated GeSi electroabsorption modulators and photodetectors on an SOI platform," Opt. Express 15, 623-628 (2007).
  9. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, M. Lipson, "12.5 Gbit/s carrier-injection-based silicon microring silicon modulators," Opt Express 15, 430-436 (2007).
  10. B. Schmidt, Q. Xu, J. Shakya, S. Manipatruni, M. Lipson, "Compact electro-optic modulator on silicon-on insulator substrates using cavities with ultrasmall modal volumes," Opt. Express,  15, 3140-3148 (2007).
    [CrossRef]
  11. L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U.D. Keil, T. Franck, "High speed silicon Mach Zehnder modulator," Opt. Express 133129-3135 (2005).
    [CrossRef]
  12. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15 (2), 660-668 (2007).
  13. F.Y. Gardes, G.T. Reed, N.G. Emerson, C.E. Png, "A sub-micron depletion-type photonic modulator in Silicon On Insulator," Opt. Express 13, 8845-8854 (2006).
  14. D. Marris, A. Cordat, D. Pascal, A. Koster, E. Cassan, L. Vivien, S. Laval, "Design of a SiGe/Si quantum-well optical modulator," J. Sel. Top. Quantum Electron. 9, 747-754, (2003).
  15. A. Lupu, D. Marris, D. Pascal, J-L. Cercus, A. Cordat, V. Le Thanh, S. Laval, "Experimental evidence for index modulation by carrier depletion in SiGe/Si multiple quantum well structures," App. Phys. Lett. 85, 887-890 (2004).
    [CrossRef]
  16. D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J-M. Fédéli, J-F. Damlencourt, "Optical modulation by carrier depletion in a silicon PIN diode," Opt. Express,  14, 10838-10843, 2006
    [CrossRef]
  17. R.A. Soref, B.R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron.,  QE-23, 123-129 (1987).
  18. A. Koster, E. Cassan, S. Laval, L. Vivien, D. Pascal, "Ultra-compact splitter for submicrometer silicon-on-insulator rib waveguides," J. Opt. Soc. Am. A,  21, 2180-2185 (2004).
    [CrossRef]
  19. ISE software, http://www.synopsys.com
  20. D. Marris-Morini, X. Le Roux, D. Pascal, L. Vivien, E. Cassan, J-M. Fédéli, J-F. Damlencourt, D. Bouville, J. Palomo, S. Laval, "High speed all-silicon optical modulator," J. Lumin. 121, 387-390 (2006).

2007 (5)

2006 (5)

D. Marris-Morini, X. Le Roux, D. Pascal, L. Vivien, E. Cassan, J-M. Fédéli, J-F. Damlencourt, D. Bouville, J. Palomo, S. Laval, "High speed all-silicon optical modulator," J. Lumin. 121, 387-390 (2006).

F.Y. Gardes, G.T. Reed, N.G. Emerson, C.E. Png, "A sub-micron depletion-type photonic modulator in Silicon On Insulator," Opt. Express 13, 8845-8854 (2006).

D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J-M. Fédéli, J-F. Damlencourt, "Optical modulation by carrier depletion in a silicon PIN diode," Opt. Express,  14, 10838-10843, 2006
[CrossRef]

R.S. Jacobsen, K.N. Andersen, P.I. Borel, J. Fage-Pedersen, L.H. Frandsen, O. Hansen, M. Kristensen, A.V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsidri, A. Bjarklev, "Strained silicon as a new electro-optical material," Nature 441, 199-202 (2006).
[CrossRef]

P. Yu, J. Wu, B. Zhu, "Enhanced quantum-confined Pockels effect in SiGe superlattices," Phys. Rev. B 73, 235328 (2006).
[CrossRef]

2005 (3)

Y. Kuo, Y.K. Lee, Y. Ge, S. Ren, J.E. Roth, T.I. Kamins, D.A.B. Miller, J.S. Harris, "Strong quantum-confined Stark effect in germanium quantum well structures on silicon," Nature 437, 1334-1336 (2005).
[CrossRef]

G. Chen, H. Chen, M. Haurylau, N. Nelson, P.M. Fauchet, E.G. Friedman, D. Albonesi "Predictions of CMOS compatible on-chip optical interconnect," SLIP’  05, 2-3 april 2005, San Francisco, USA.

L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U.D. Keil, T. Franck, "High speed silicon Mach Zehnder modulator," Opt. Express 133129-3135 (2005).
[CrossRef]

2004 (3)

G.T. Reed, "The optical age of silicon," Nature 427, 595-596 (2004).
[CrossRef]

A. Lupu, D. Marris, D. Pascal, J-L. Cercus, A. Cordat, V. Le Thanh, S. Laval, "Experimental evidence for index modulation by carrier depletion in SiGe/Si multiple quantum well structures," App. Phys. Lett. 85, 887-890 (2004).
[CrossRef]

A. Koster, E. Cassan, S. Laval, L. Vivien, D. Pascal, "Ultra-compact splitter for submicrometer silicon-on-insulator rib waveguides," J. Opt. Soc. Am. A,  21, 2180-2185 (2004).
[CrossRef]

2003 (1)

D. Marris, A. Cordat, D. Pascal, A. Koster, E. Cassan, L. Vivien, S. Laval, "Design of a SiGe/Si quantum-well optical modulator," J. Sel. Top. Quantum Electron. 9, 747-754, (2003).

1987 (1)

R.A. Soref, B.R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron.,  QE-23, 123-129 (1987).

App. Phys. Lett. (1)

A. Lupu, D. Marris, D. Pascal, J-L. Cercus, A. Cordat, V. Le Thanh, S. Laval, "Experimental evidence for index modulation by carrier depletion in SiGe/Si multiple quantum well structures," App. Phys. Lett. 85, 887-890 (2004).
[CrossRef]

IEEE J. Quantum Electron. (1)

R.A. Soref, B.R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron.,  QE-23, 123-129 (1987).

J. Lumin. (1)

D. Marris-Morini, X. Le Roux, D. Pascal, L. Vivien, E. Cassan, J-M. Fédéli, J-F. Damlencourt, D. Bouville, J. Palomo, S. Laval, "High speed all-silicon optical modulator," J. Lumin. 121, 387-390 (2006).

J. Opt. Soc. Am. A (1)

J. Sel. Top. Quantum Electron. (1)

D. Marris, A. Cordat, D. Pascal, A. Koster, E. Cassan, L. Vivien, S. Laval, "Design of a SiGe/Si quantum-well optical modulator," J. Sel. Top. Quantum Electron. 9, 747-754, (2003).

Nature (3)

Y. Kuo, Y.K. Lee, Y. Ge, S. Ren, J.E. Roth, T.I. Kamins, D.A.B. Miller, J.S. Harris, "Strong quantum-confined Stark effect in germanium quantum well structures on silicon," Nature 437, 1334-1336 (2005).
[CrossRef]

G.T. Reed, "The optical age of silicon," Nature 427, 595-596 (2004).
[CrossRef]

R.S. Jacobsen, K.N. Andersen, P.I. Borel, J. Fage-Pedersen, L.H. Frandsen, O. Hansen, M. Kristensen, A.V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsidri, A. Bjarklev, "Strained silicon as a new electro-optical material," Nature 441, 199-202 (2006).
[CrossRef]

Opt Express (1)

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, M. Lipson, "12.5 Gbit/s carrier-injection-based silicon microring silicon modulators," Opt Express 15, 430-436 (2007).

Opt. Express (7)

Phys. Rev. B (1)

P. Yu, J. Wu, B. Zhu, "Enhanced quantum-confined Pockels effect in SiGe superlattices," Phys. Rev. B 73, 235328 (2006).
[CrossRef]

SLIP (1)

G. Chen, H. Chen, M. Haurylau, N. Nelson, P.M. Fauchet, E.G. Friedman, D. Albonesi "Predictions of CMOS compatible on-chip optical interconnect," SLIP’  05, 2-3 april 2005, San Francisco, USA.

Other (2)

International Technology Roadmap for Semiconductors (ITRS), 2006 Edition, Interconnect topic.

ISE software, http://www.synopsys.com

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