Abstract

We demonstrated the potential application of III-V/polymer nanowires for photonic integrated circuits in a previous paper. Hereby, we report the use of a spot size converter based on 2D reverse nanotaper structure in order to improve the coupling efficiency between the nanowire and optical fiber. A total coupling enhancement of up to a factor 60 has been measured from an 80 nm × 300 nm cross-section tip which feeds an 300 nm-side square nanowire at its both ends. Simultaneously, micro-radius bends have been fabricated to increase the circuit density; for a radius of 5 μm, the 90° bend losses were measured as low as 0.60 dB and 0.80 dB for TE and TM polarizations respectively.

© 2007 Optical Society of America

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  1. M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
    [CrossRef]
  2. A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
    [CrossRef]
  3. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouzaida and L. Mollard, "Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett. 28, 1150-1152 (2003).
    [CrossRef] [PubMed]
  4. D. Taillaert W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode Fibers, "IEEE J. Quantum Electron. 38, 949-955 (2002).
    [CrossRef]
  5. L. Vivien, S. Laval, E. Cassan, X. Le Roux and D. Pascal, "2-D taper for low-loss coupling between polarization-insensitive microwaveguides and single-mode optical fibers," J. Lightwave Technol. 21, 2429-2433, (2003).
    [CrossRef]
  6. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. I. Takahashi, M. Takahashi et al., "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Top. Quantum Electron. 11, 232-240 (2005).
    [CrossRef]
  7. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
    [CrossRef]
  8. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada and H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fiber, "Electron. Lett. 38, 1669-1670 (2002).
    [CrossRef]
  9. V. R. Almeida, R. R. Panepucci and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1304 (2003).
    [CrossRef] [PubMed]
  10. S. J. McNab, N. Moll and Y. A. Vlasov, "Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides," Opt. Express 11, 2927-2939 (2003), http://www.opticsexpress.org/abstract.cfm?id=77823
    [CrossRef] [PubMed]
  11. D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
    [CrossRef]
  12. J. C. Chen and S. Jungling, "Computational of high-order waveguide modes by imaginary-distance beam propagation method," Opt. Quantum Electron. 26, 199-205 (1994).
    [CrossRef]
  13. Y. Chung and N. Dagli, "An assessment of finite difference beam propagation method," IEEE J. Quantum Electron. 26, 1335-1339 (1990).
    [CrossRef]
  14. H. Deng, G. H. Jin, J. Harari, J. P. Vilcot and D. Decoster, "Investigation of 3-D semivectorial finite-difference beam propagation method for bent waveguides, "J. Lightwave Technol. 16, 915-922 (1998).
    [CrossRef]
  15. D. Lauvernier, J. P. Vilcot, M. Francois, and D. Decoster, "Optimization of HSQ resist e-beam processing technique on GaAs material," Microelectron. Eng. 75, 177-182 (2004).
    [CrossRef]
  16. D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
    [CrossRef]
  17. D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
    [CrossRef]
  18. R.J. Deri and E. Kapon, "Low-loss III-V semiconductor optical waveguides," IEEE J. Quantum Electron. 27, 626-640 (1991)
    [CrossRef]
  19. Y.A. Vlasov and S.J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004), http://www.opticsexpress.org/abstract.cfm?id=79595
    [CrossRef] [PubMed]
  20. A. Sakai, T. Fukuzawa and T. Baba, "Estimation of polarization crosstalk at a micro-bend in Si-photonic wire waveguide," J. Lightwave Technol. 22, 520-525 (2004)
    [CrossRef]

2006

D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
[CrossRef]

2005

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. I. Takahashi, M. Takahashi et al., "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Top. Quantum Electron. 11, 232-240 (2005).
[CrossRef]

D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
[CrossRef]

D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
[CrossRef]

2004

Y.A. Vlasov and S.J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004), http://www.opticsexpress.org/abstract.cfm?id=79595
[CrossRef] [PubMed]

A. Sakai, T. Fukuzawa and T. Baba, "Estimation of polarization crosstalk at a micro-bend in Si-photonic wire waveguide," J. Lightwave Technol. 22, 520-525 (2004)
[CrossRef]

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

D. Lauvernier, J. P. Vilcot, M. Francois, and D. Decoster, "Optimization of HSQ resist e-beam processing technique on GaAs material," Microelectron. Eng. 75, 177-182 (2004).
[CrossRef]

2003

2002

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada and H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fiber, "Electron. Lett. 38, 1669-1670 (2002).
[CrossRef]

D. Taillaert W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode Fibers, "IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

1998

1994

J. C. Chen and S. Jungling, "Computational of high-order waveguide modes by imaginary-distance beam propagation method," Opt. Quantum Electron. 26, 199-205 (1994).
[CrossRef]

1991

R.J. Deri and E. Kapon, "Low-loss III-V semiconductor optical waveguides," IEEE J. Quantum Electron. 27, 626-640 (1991)
[CrossRef]

1990

Y. Chung and N. Dagli, "An assessment of finite difference beam propagation method," IEEE J. Quantum Electron. 26, 1335-1339 (1990).
[CrossRef]

Almeida, V. R.

Baba, T.

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bouzaida, N.

Bozler, C.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Cassan, E.

Chen, J. C.

J. C. Chen and S. Jungling, "Computational of high-order waveguide modes by imaginary-distance beam propagation method," Opt. Quantum Electron. 26, 199-205 (1994).
[CrossRef]

Chung, Y.

Y. Chung and N. Dagli, "An assessment of finite difference beam propagation method," IEEE J. Quantum Electron. 26, 1335-1339 (1990).
[CrossRef]

Dagli, N.

Y. Chung and N. Dagli, "An assessment of finite difference beam propagation method," IEEE J. Quantum Electron. 26, 1335-1339 (1990).
[CrossRef]

Decoster, D.

D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
[CrossRef]

D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
[CrossRef]

D. Lauvernier, J. P. Vilcot, M. Francois, and D. Decoster, "Optimization of HSQ resist e-beam processing technique on GaAs material," Microelectron. Eng. 75, 177-182 (2004).
[CrossRef]

H. Deng, G. H. Jin, J. Harari, J. P. Vilcot and D. Decoster, "Investigation of 3-D semivectorial finite-difference beam propagation method for bent waveguides, "J. Lightwave Technol. 16, 915-922 (1998).
[CrossRef]

Deng, H.

Deri, R.J.

R.J. Deri and E. Kapon, "Low-loss III-V semiconductor optical waveguides," IEEE J. Quantum Electron. 27, 626-640 (1991)
[CrossRef]

Donval, A.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Fijol, J.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Fike, E.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Francois, M.

D. Lauvernier, J. P. Vilcot, M. Francois, and D. Decoster, "Optimization of HSQ resist e-beam processing technique on GaAs material," Microelectron. Eng. 75, 177-182 (2004).
[CrossRef]

Frish, M.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Fritze, M.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Fukuda, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. I. Takahashi, M. Takahashi et al., "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Top. Quantum Electron. 11, 232-240 (2005).
[CrossRef]

Fukuzawa, T.

Garidel, S.

D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
[CrossRef]

D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
[CrossRef]

D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
[CrossRef]

Harari, J.

Heitzmann, M.

Jacobson, S.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Jin, G. H.

Jungling, S.

J. C. Chen and S. Jungling, "Computational of high-order waveguide modes by imaginary-distance beam propagation method," Opt. Quantum Electron. 26, 199-205 (1994).
[CrossRef]

Kapon, E.

R.J. Deri and E. Kapon, "Low-loss III-V semiconductor optical waveguides," IEEE J. Quantum Electron. 27, 626-640 (1991)
[CrossRef]

Keast, C.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Keating, P.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Kessler, B.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Knecht, J.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Lardenois, S.

Lauvernier, D.

D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
[CrossRef]

D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
[CrossRef]

D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
[CrossRef]

D. Lauvernier, J. P. Vilcot, M. Francois, and D. Decoster, "Optimization of HSQ resist e-beam processing technique on GaAs material," Microelectron. Eng. 75, 177-182 (2004).
[CrossRef]

Laval, S.

Le Roux, X.

Leblanc, J.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Legrand, C.

D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
[CrossRef]

Lipson, M.

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Manolatou, C.

M. Fritze, J. Knecht, C. Bozler, C. Keast, J. Fijol, S. Jacobson, P. Keating, J. Leblanc, E. Fike, B. Kessler, M. Frish and C. Manolatou, "Fabrication of three-dimensional mode converters for silicon-based integrated optics," J. Vac. Sci. Technol. B 21, 2897-2902, (2003).
[CrossRef]

Masum Choudhury, A. N. M. M.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Mc Murtry, S.

D. Lauvernier, J. P. Vilcot, S. Garidel, S. Mc Murtry, and D. Decoster, "Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures, Electron. Lett. 41, 1170-1171 (2005)
[CrossRef]

McNab, S. J.

McNab, S.J.

Moll, N.

Mollard, L.

Morita, H.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada and H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fiber, "Electron. Lett. 38, 1669-1670 (2002).
[CrossRef]

Orobtchouk, R.

Oron, M.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Oron, R.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Panepucci, R. R.

Pascal, D.

Richardson, D.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Sakai, A.

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada and H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fiber, "Electron. Lett. 38, 1669-1670 (2002).
[CrossRef]

Stanczyk, T. R.

A. N. M. M. Masum Choudhury, T. R. Stanczyk, D. Richardson, A. Donval, R. Oron, M. Oron, "Method of improving light coupling efficiency between optical fibers and silicon waveguides," IEEE Photon. Technol. Lett. 17, 1881-1883 (2005).
[CrossRef]

Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Takahashi, J. I.

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P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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H. Deng, G. H. Jin, J. Harari, J. P. Vilcot and D. Decoster, "Investigation of 3-D semivectorial finite-difference beam propagation method for bent waveguides, "J. Lightwave Technol. 16, 915-922 (1998).
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[CrossRef]

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P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

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P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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[CrossRef]

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D. Lauvernier, S. Garidel, M. Zegaoui, J.P. Vilcot, D. Decoster, "GaAs/polymer optical nanowires: fabrication and characterization," Electron. Lett. 42, 217-219 (2006)
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[CrossRef]

IEEE Photon. Technol. Lett.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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[CrossRef]

D. Lauvernier, S. Garidel, C. Legrand and J. P. Vilcot, "Realization of sub-micron patterns on GaAs using a HSQ etching mask," Microelectron. Eng. 77, 210-216 (2005).
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Figures (5)

Fig. 1.
Fig. 1.

Schematic structure of the GaAs/BCB reverse linear nanotaper.

Fig. 2.
Fig. 2.

Mode mismatch loss added to reflection loss versus the tip width w considering a coupling with (a) a cleaved and (b) a lensed fiber.

Fig. 3.
Fig. 3.

Total nanotaper coupling loss versus the tip width w for 2 nanotaper lengths (90 and 150 μm). A lensed fiber is considered as launching conditions.

Fig. 4.
Fig. 4.

SEM views of (a) HSQ pattern of a 90° bend (1μm radius), (b) GaAs 80nm-wide tip after RIE, and (c) cleaved waveguide (tip) facet.

Fig. 5.
Fig. 5.

Near field views, in TE polarization, of different waveguide structures showed in inserts; (a) classical reference InP-based waveguide, (b) 300 nm × 300 nm nanowire, (c) 80 nm × 300 nm reverse nanotaper tip.

Tables (4)

Tables Icon

Table 1. Measured and calculated input coupling efficiency enhancements (input nanotaper coupled to a lensed fiber)

Tables Icon

Table 2. Measured coupling efficiency enhancements using only output nanotaper coupled to a cleaved fiber (CeffC) and both input and output nanotapers (Ctot)

Tables Icon

Table 3. Measured 90° bend losses in TE polarization

Tables Icon

Table 4. Measured 90° Bend Losses in TM Polarization

Equations (1)

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L tot = L excess + 1 × L straight

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