Abstract

A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the “dimpled” taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3×106) and a planar microring (Q = 4.8×106).

© 2007 Optical Society of America

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  24. I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
    [CrossRef]
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    [CrossRef] [PubMed]
  30. M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
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  31. M. Borselli, T. J. Johnson, C. P. Michael, M. D. Henry, and O. Painter, "Surface encapsulation for low-loss silicon photonics," (unpublished).
  32. For doublet modes, the quality factor used in Fig. 4(c) is the average Q between the two standing-wave modes.
  33. For silicon wafers with 14-20Ω·cm resistivity, free-carrier absorption [34] limits microcavities to Q < 9×107-1.4×108 at λo = 1532 nm.
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    [CrossRef]
  35. M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

2007 (2)

2006 (4)

I.-K. Hwang, G.-H. Kim, and Y.-H. Lee, "Optimization of coupling between photonic crystal resonator and curved microfiber," IEEE J. Quantum Electron. 42, 131-136 (2006).
[CrossRef]

M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
[CrossRef]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. C. Magi, D. J. Moss, and B. J. Eggleton, "Efficient coupling to chalcognide glass photonic crystal waveguides via silica optical fiber nanowires," Opt. Express 14, 1070-1078 (2006).
[CrossRef] [PubMed]

G. Roelkens, D. V. Thourhout, and R. Baets, "High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay," Opt. Express 14, 11622-11630 (2006).
[CrossRef]

2005 (4)

P. E. Barclay, K. Srinivasan, and O. Painter, "Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper," Opt. Express 13, 801 (2005).
[CrossRef] [PubMed]

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13, 1515 (2005).
[CrossRef] [PubMed]

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

2004 (1)

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

2003 (2)

A. Sure, T. Dillon, J. Murakowski, C. Lin, D. Pustai, and D. Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express 11, 3555-3561 (2003).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

2002 (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

2000 (1)

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

1999 (1)

M. Cai, G. Hunziker, and K. Vahala, "Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system," IEEE Photon. Technol. Lett. 11, 686-687 (1999).
[CrossRef]

1998 (2)

1994 (1)

M. L. Gorodetsky and V. S. Ilchenko, "High-Q optical whispering-gallery microresonators: precession approach for spherical mode analysis and emission patterns with prism couplers," Opt. Commun. 113, 133-143 (1994).
[CrossRef]

1987 (1)

R. A. Soref and B. R. Bennett, "Electro optical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

Aers, G.

Ang, T. W.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Baets, R.

G. Roelkens, D. V. Thourhout, and R. Baets, "High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay," Opt. Express 14, 11622-11630 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Barclay, P. E.

Barnett, B. C.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Bennett, B. R.

R. A. Soref and B. R. Bennett, "Electro optical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

Besse, P. A.

Bienstman, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Block, B. A.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Bogaerts, W.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Bona, G.-L.

Borselli, M.

M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
[CrossRef]

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13, 1515 (2005).
[CrossRef] [PubMed]

Cadien, K.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Cai, M.

M. Cai, G. Hunziker, and K. Vahala, "Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system," IEEE Photon. Technol. Lett. 11, 686-687 (1999).
[CrossRef]

Daele, P. V.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Dalacu, D.

Dillon, T.

Eckner, J.

Eggleton, B. J.

Erni, D.

Evans, A. G. R.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Fr´ed´erick, S.

Freeman, D.

Gamper, E.

Germann, R.

Gorodetsky, M. L.

M. L. Gorodetsky and V. S. Ilchenko, "High-Q optical whispering-gallery microresonators: precession approach for spherical mode analysis and emission patterns with prism couplers," Opt. Commun. 113, 133-143 (1994).
[CrossRef]

Grillet, C.

Hunziker, G.

M. Cai, G. Hunziker, and K. Vahala, "Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system," IEEE Photon. Technol. Lett. 11, 686-687 (1999).
[CrossRef]

Hwang, I.-K.

I.-K. Hwang, G.-H. Kim, and Y.-H. Lee, "Optimization of coupling between photonic crystal resonator and curved microfiber," IEEE J. Quantum Electron. 42, 131-136 (2006).
[CrossRef]

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Ilchenko, V. S.

M. L. Gorodetsky and V. S. Ilchenko, "High-Q optical whispering-gallery microresonators: precession approach for spherical mode analysis and emission patterns with prism couplers," Opt. Commun. 113, 133-143 (1994).
[CrossRef]

Johnson, T. J.

M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
[CrossRef]

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13, 1515 (2005).
[CrossRef] [PubMed]

Josey, M. R.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Kim, G.-H.

I.-K. Hwang, G.-H. Kim, and Y.-H. Lee, "Optimization of coupling between photonic crystal resonator and curved microfiber," IEEE J. Quantum Electron. 42, 131-136 (2006).
[CrossRef]

Kim, S.-H.

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Kim, S.-K.

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Kippenberg, T. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

Kobrinsky, M. J.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Krishna, S.

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

Lapointe, J.

Lee, M. W.

Lee, S. H.

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Lee, Y.

Lee, Y.-H.

I.-K. Hwang, G.-H. Kim, and Y.-H. Lee, "Optimization of coupling between photonic crystal resonator and curved microfiber," IEEE J. Quantum Electron. 42, 131-136 (2006).
[CrossRef]

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Leuthold, J.

Lin, C.

List, S.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Luther-Davies, B.

Madden, S.

Magi, E. C.

Massarek, I.

Melchior, H.

Mesel, K. D.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Mohammed, E.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Monat, C.

Moss, D. J.

Murakowski, J.

Offrein, B. J.

Painter, O.

M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
[CrossRef]

P. E. Barclay, K. Srinivasan, and O. Painter, "Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper," Opt. Express 13, 801 (2005).
[CrossRef] [PubMed]

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13, 1515 (2005).
[CrossRef] [PubMed]

Painter, O. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

Poole, P. J.

Prather, D.

Pustai, D.

Reed, G. T.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Reshotko, M.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Roberton, F.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Rode, A.

Roelkens, G.

Routley, P. R.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Ruan, Y.

Smith, C.

Smith, C. L.

Smith, C. L. C.

Soref, R. A.

R. A. Soref and B. R. Bennett, "Electro optical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

Spillane, S. M.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

Spühler, M. M.

Srinivasan, K.

P. E. Barclay, K. Srinivasan, and O. Painter, "Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper," Opt. Express 13, 801 (2005).
[CrossRef] [PubMed]

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

Stintz, A.

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

Sure, A.

Taillaert, D.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Thourhout, D. V.

Vahala, K.

M. Cai, G. Hunziker, and K. Vahala, "Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system," IEEE Photon. Technol. Lett. 11, 686-687 (1999).
[CrossRef]

Vahala, K. J.

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

Vonsovici, A.

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

Williams, R. L.

Yang, J.-K.

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

Young, I.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Zheng, J.-F.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

Appl. Phys. Lett. (3)

I.-K. Hwang, S.-K. Kim, J.-K. Yang, S.-H. Kim, S. H. Lee, and Y.-H. Lee, "Curved-microfiber photon coupling for photonic crystal light emitter," Appl. Phys. Lett. 87, 131,107 (2005).
[CrossRef]

M. Borselli, T. J. Johnson, and O. Painter, "Measuring the role of surface chemistry in silicon microphotonics," Appl. Phys. Lett. 88, 131,114 (2006).
[CrossRef]

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "Highly efficient unibond silicon-on-insulator blazed grating couplers," Appl. Phys. Lett. 77, 4214 (2000).
[CrossRef]

IEEE J. Quantum Electron. (3)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. V. Daele, I. Moerman, S. Verstuyft, K. D. Mesel, and R. Baets, "An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38, 949-955 (2002).
[CrossRef]

R. A. Soref and B. R. Bennett, "Electro optical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

I.-K. Hwang, G.-H. Kim, and Y.-H. Lee, "Optimization of coupling between photonic crystal resonator and curved microfiber," IEEE J. Quantum Electron. 42, 131-136 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

M. Cai, G. Hunziker, and K. Vahala, "Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system," IEEE Photon. Technol. Lett. 11, 686-687 (1999).
[CrossRef]

Intel Technol. J. (1)

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Roberton, S. List, I. Young, and K. Cadien, "On-chip optical interconnects," Intel Technol. J. 8, 129-141 (2004).

J. Lightwave Technol. (2)

Opt. Commun. (1)

M. L. Gorodetsky and V. S. Ilchenko, "High-Q optical whispering-gallery microresonators: precession approach for spherical mode analysis and emission patterns with prism couplers," Opt. Commun. 113, 133-143 (1994).
[CrossRef]

Opt. Express (7)

A. Sure, T. Dillon, J. Murakowski, C. Lin, D. Pustai, and D. Prather, "Fabrication and characterization of three-dimensional silicon tapers," Opt. Express 11, 3555-3561 (2003).
[CrossRef] [PubMed]

P. E. Barclay, K. Srinivasan, and O. Painter, "Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper," Opt. Express 13, 801 (2005).
[CrossRef] [PubMed]

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13, 1515 (2005).
[CrossRef] [PubMed]

C. Grillet, C. Smith, D. Freeman, S. Madden, B. Luther-Davies, E. C. Magi, D. J. Moss, and B. J. Eggleton, "Efficient coupling to chalcognide glass photonic crystal waveguides via silica optical fiber nanowires," Opt. Express 14, 1070-1078 (2006).
[CrossRef] [PubMed]

G. Roelkens, D. V. Thourhout, and R. Baets, "High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay," Opt. Express 14, 11622-11630 (2006).
[CrossRef]

C. Grillet, C. Monat, C. L. Smith, B. J. Eggleton, D. J. Moss, S. Frederick, D. Dalacu, P. J. Poole, J. Lapointe, G. Aers, and R. L. Williams, "Nanowire coupling to photonic crystal nanocavities for single photon sources," Opt. Express 15, 1267-1276 (2007).
[CrossRef] [PubMed]

M. W. Lee, C. Grillet, C. L. C. Smith, D. J. Moss, B. J. Eggleton, D. Freeman, B. Luther-Davies, S. Madden, A. Rode, Y. Ruan, and Y. Lee, "Photosensitive post tuning of chalcogenide photonic crystal waveguides," Opt. Express 15, 1277-1285 (2007).
[CrossRef] [PubMed]

Phys. Rev. B (1)

K. Srinivasan, A. Stintz, S. Krishna, and O. Painter, "Photoluminescence measurements of quantum-dotcontaining semiconductor microdisk resonators using optical fiber taper waveguides," Phys. Rev. B 72, 205,318 (2005).
[CrossRef]

Phys. Rev. Lett. (1)

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, "Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics," Phys. Rev. Lett. 91, 043,902 (2003).
[CrossRef]

Other (15)

P. E. Barclay, K. Srinivasan, and O. Painter, "Design of photonic crystal waveguides for evanescent coupling to optical fiber tapers and integration with high-Q cavities," J. Opt. Soc. Am. B 20, 2274-2284 (2003). URL http://www.opticsinfobase.org/abstract.cfm?URI=josab-20-11-2274.
[CrossRef]

P. J. Paddon,M. K. Jackson, J. F. Young, and S. Lam, "Photonic input/output port," U.S. Patent 7031562, Apr. 18, 2006.

M. Cai and K. Vahala, "Highly efficient optical power transfer to whispering-gallery modes by use of a symmetrical dual-coupling configuration," Opt. Lett. 25, 260-262 (2000). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-25-4-260.
[CrossRef]

P. E. Barclay, K. Srinivasan, M. Borselli, and O. Painter, "Efficient input and output fiber coupling to a photonic crystal waveguide," Opt. Lett. 29, 697-699 (2004). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-29-7-697.
[CrossRef] [PubMed]

H. Ishikawa, H. Tamaru, and K. Miyano, "Microsphere resonators strongly coupled to a plane dielectric substrate: coupling via the optical near field," J. Opt. Soc. Am. A 17, 802-813 (2000). URL http://www.opticsinfobase.org/abstract.cfm?URI=josaa-17-4-802.
[CrossRef]

V. S. Ilchenko, X. S. Yao, and L. Maleki, "Pigtailing the high-Q cavity: a simple fiber coupler for optical whispering-gallery modes," Opt. Lett. 24, 723-725 (1999). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-24-11-723.
[CrossRef]

N. Dubreuil, J. C. Knight, D. K. Leventhal, V. Sandoghdar, J. Hare, and V. Lefèvre, "Eroded monomode optical fiber for whispering-gallery mode excitation in fused-silica microspheres," Opt. Lett. 20, 813-815 (1995). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-20-8-813.
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J. C. Knight, G. Cheung, F. Jacques, and T. A. Birks, "Phase-matched excitation of whispering-gallery-mode resonances by a fiber taper," Opt. Lett. 22, 1129-1131 (1997). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-22-15-1129.
[CrossRef] [PubMed]

D. C. Montgomery, Introduction to Statistical Quality Control (John Wiley & Sons, Ltd., New York, 1991).

L. Pavesi and D. J. Lockwood, eds., Silicon Photonics, vol. 94 of Topics in Applied Physics (Springer-Verlag, Berlin, 2004).

V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1304 (2003). URL http://www.opticsinfobase.org/abstract.cfm?URI=ol-28-15-1302.
[CrossRef] [PubMed]

I. Day, I. Evans, A. Knights, F. Hopper, S. Roberts, J. Johnston, S. Day, J. Luff, H. Tsang, and M. Asghari, "Tapered silicon waveguides for low insertion loss highly-efficient high-speed electronic variable optical attenuators," in IEEE OFC 2003, vol. 1, pp. 249-251 (IEEE, 2003).

M. Borselli, T. J. Johnson, C. P. Michael, M. D. Henry, and O. Painter, "Surface encapsulation for low-loss silicon photonics," (unpublished).

For doublet modes, the quality factor used in Fig. 4(c) is the average Q between the two standing-wave modes.

For silicon wafers with 14-20Ω·cm resistivity, free-carrier absorption [34] limits microcavities to Q < 9×107-1.4×108 at λo = 1532 nm.

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Figures (5)

Fig. 1.
Fig. 1.

(a) Schematic of a “dimpled” taper coupled to an undercut microdisk. (b) Optical image of the taper probe. The taper diameter at the center of the dimple is ~1.2 μm. (c) At the center of a 5×5 array, the dimpled taper probe is critically coupled to a microdisk but not coupled to any of the neighboring disks. The scale bars are (a) 5μm, (b) 50μm, and (c) 20 μm.

Fig. 2.
Fig. 2.

Non-resonant insertion loss (a) as a function of axial position (xô) as a narrow cantilever is moved along the taper length and (b) as a function of transverse position (zô) as the dimple is raised above a mesa. (c) Inferred dimple taper profile at “low,” “medium,” and “high” tension.

Fig. 3.
Fig. 3.

Reducing noise through higher taper tension. Without averaging multiple scans, ten consecutive traces of a microdisk “doublet” resonance [29] display greater displacement noise at low tension (a) than at higher tension (b). (c) Noise power spectra with the same tensions as in Fig. 2(a,c).

Fig. 4.
Fig. 4.

(a) Sample transmission spectrum for a single microdisk. (b) Coupling dependence on the disk-taper gap for a TE p = 3 mode of the device in Fig 1(c). (c) Distribution of wavelengths and quality factors for the TE p = 1–3 modes near 1532 nm. The solid diamond indicates the mode tested in (b). Spatial distribution for the (d) wavelength, (e) quality factor, and (f) doublet splitting of the TE p = 1 modes.

Fig. 5.
Fig. 5.

SEM images of rings after the final chemical treatments and 30-nm thermal oxidation: (a) top-view of a ring with a 20-μm diameter and 2-μm width and (b) side view showing smooth ring sidewalls and a slight BOX undercut due to the final chemical treatments. The scale bars are (a) 20mm and (b) 200 nm. (c) Transmission spectrum of a high-Q mode at λ o = 1428.7 nm in a ring with an 80-μm diameter and a 2-μm width.

Tables (1)

Tables Icon

Table 1. Average mode parameters for microdisk array

Metrics