Abstract

This study presents a simple method for determining the optical constants of an anisotropic thin film. The sensitivity of enhanced polarization conversion reflectance to optical constants is also calculated and analyzed. Based on the sensitivity calculation, the principal indices and columnar tilt angle can be derived from the polarization conversion reflectance angular spectrum.

© 2007 Optical Society of America

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References

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    [CrossRef]
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2006 (2)

Y. J. Jen and C.Y. Peng, "Narrow-band and broad-band polarization conversion reflection filters," Appl. Phys. Lett. 89, 041128 (2006). http://apl.aip.org/apl/top.jsp
[CrossRef]

Y. J. Jen and C. L. Chiang, "Optical thickness and anisotropic orientation of a birefringent thin film: analysis from explicit expressions for reflection and transmission coefficients," Opt. Eng. 45, 023802 (2006). http://scitation.aip.org/journals/doc/OPEGAR-ft/vol_45/iss_2/023802_1.html
[CrossRef]

2005 (1)

Y. J. Jen, C. H. Hsieh and T. S. Lo, "Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation," Opt. Commun. 224, 269-277 (2005). http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVF-4DGD4JP-1&_user=4462129&_coverDate=01%2F03%2F2005&_alid=514382637&_rdoc=1&_fmt=full&_orig=search&_cdi=5533&_sort=d&_st=4&_docanchor=&_acct=C000053837&_version=1&_urlVersion=0&_userid=4462129&md5=af91299e67249853b95193f09c220403
[CrossRef]

2004 (1)

2002 (1)

1998 (2)

1995 (1)

H. Wang, "Reflection/transmission measurements of anisotropic films with one of the principal axes in the direction of columnar growth," J. Mod. Opt. 42, 497-505 (1995). http://web.ebscohost.com/ehost/detail?vid=1&hid=6&sid=cda59d34-b4ff-4fd6-ae6a-8a417dca0258%40sessionmgr7
[CrossRef]

1994 (1)

1993 (1)

1972 (1)

Arnold, M.

Berreman, D. W.

Chiang, C. L.

Y. J. Jen and C. L. Chiang, "Optical thickness and anisotropic orientation of a birefringent thin film: analysis from explicit expressions for reflection and transmission coefficients," Opt. Eng. 45, 023802 (2006). http://scitation.aip.org/journals/doc/OPEGAR-ft/vol_45/iss_2/023802_1.html
[CrossRef]

Dollase, W.

Endelema, D.

Flory, F.

Hazel, J.

Hodgkinson, I.

Hodgkinson, I. J.

Hsieh, C. H.

Y. J. Jen, C. H. Hsieh and T. S. Lo, "Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation," Opt. Commun. 224, 269-277 (2005). http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVF-4DGD4JP-1&_user=4462129&_coverDate=01%2F03%2F2005&_alid=514382637&_rdoc=1&_fmt=full&_orig=search&_cdi=5533&_sort=d&_st=4&_docanchor=&_acct=C000053837&_version=1&_urlVersion=0&_userid=4462129&md5=af91299e67249853b95193f09c220403
[CrossRef]

Jen, Y. J.

Y. J. Jen and C.Y. Peng, "Narrow-band and broad-band polarization conversion reflection filters," Appl. Phys. Lett. 89, 041128 (2006). http://apl.aip.org/apl/top.jsp
[CrossRef]

Y. J. Jen and C. L. Chiang, "Optical thickness and anisotropic orientation of a birefringent thin film: analysis from explicit expressions for reflection and transmission coefficients," Opt. Eng. 45, 023802 (2006). http://scitation.aip.org/journals/doc/OPEGAR-ft/vol_45/iss_2/023802_1.html
[CrossRef]

Y. J. Jen, C. H. Hsieh and T. S. Lo, "Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation," Opt. Commun. 224, 269-277 (2005). http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVF-4DGD4JP-1&_user=4462129&_coverDate=01%2F03%2F2005&_alid=514382637&_rdoc=1&_fmt=full&_orig=search&_cdi=5533&_sort=d&_st=4&_docanchor=&_acct=C000053837&_version=1&_urlVersion=0&_userid=4462129&md5=af91299e67249853b95193f09c220403
[CrossRef]

Lo, T. S.

Y. J. Jen, C. H. Hsieh and T. S. Lo, "Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation," Opt. Commun. 224, 269-277 (2005). http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVF-4DGD4JP-1&_user=4462129&_coverDate=01%2F03%2F2005&_alid=514382637&_rdoc=1&_fmt=full&_orig=search&_cdi=5533&_sort=d&_st=4&_docanchor=&_acct=C000053837&_version=1&_urlVersion=0&_userid=4462129&md5=af91299e67249853b95193f09c220403
[CrossRef]

Pelletier, E.

Peng, C.Y.

Y. J. Jen and C.Y. Peng, "Narrow-band and broad-band polarization conversion reflection filters," Appl. Phys. Lett. 89, 041128 (2006). http://apl.aip.org/apl/top.jsp
[CrossRef]

Sambles, J. R.

Schubert, M.

Silva, L. D.

Wang, H.

H. Wang, "Reflection/transmission measurements of anisotropic films with one of the principal axes in the direction of columnar growth," J. Mod. Opt. 42, 497-505 (1995). http://web.ebscohost.com/ehost/detail?vid=1&hid=6&sid=cda59d34-b4ff-4fd6-ae6a-8a417dca0258%40sessionmgr7
[CrossRef]

Wu, Q. H.

Yang, F.

Appl. Opt. (2)

Appl. Phys. Lett. (1)

Y. J. Jen and C.Y. Peng, "Narrow-band and broad-band polarization conversion reflection filters," Appl. Phys. Lett. 89, 041128 (2006). http://apl.aip.org/apl/top.jsp
[CrossRef]

J. Mod. Opt. (1)

H. Wang, "Reflection/transmission measurements of anisotropic films with one of the principal axes in the direction of columnar growth," J. Mod. Opt. 42, 497-505 (1995). http://web.ebscohost.com/ehost/detail?vid=1&hid=6&sid=cda59d34-b4ff-4fd6-ae6a-8a417dca0258%40sessionmgr7
[CrossRef]

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. B (1)

Opt. Commun. (1)

Y. J. Jen, C. H. Hsieh and T. S. Lo, "Optical constant determination of an anisotropic thin film via surface plasmon resonance: analyzed by sensitivity calculation," Opt. Commun. 224, 269-277 (2005). http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVF-4DGD4JP-1&_user=4462129&_coverDate=01%2F03%2F2005&_alid=514382637&_rdoc=1&_fmt=full&_orig=search&_cdi=5533&_sort=d&_st=4&_docanchor=&_acct=C000053837&_version=1&_urlVersion=0&_userid=4462129&md5=af91299e67249853b95193f09c220403
[CrossRef]

Opt. Eng. (1)

Y. J. Jen and C. L. Chiang, "Optical thickness and anisotropic orientation of a birefringent thin film: analysis from explicit expressions for reflection and transmission coefficients," Opt. Eng. 45, 023802 (2006). http://scitation.aip.org/journals/doc/OPEGAR-ft/vol_45/iss_2/023802_1.html
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Other (3)

I. J. Hodgkinson and Q. H. Wu, Birefringent Thin Films and Polarizing Elements (World Scientific, USA, 1997).
[CrossRef]

F. Horowitz, Structure-Induced Optical Anisotropy in Thin Film (PhD dissertation, University of Arizona, Optical Sciences Center, 1983).

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North Holland, Amsterdam, 1979).

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Figures (8)

Fig. 1.
Fig. 1.

(a). Principal axes of the anisotropic thin film 1, 2, 3 and the surface coordinates (x, y, z) of the system. (b) The enhanced polarization conversion system (0: prism/1: anisotropic thin film (δ=90°)/2: air)

Fig. 2.
Fig. 2.

The characteristics (αmax, Rmax and αpp) of enhanced PCR from the BK7 prism/anisotropic thin film/air system.

Fig. 3.
Fig. 3.

(a). Relation among αmax, φ and d1 (b). Relation among Rmax, φ and d1 (c). Relation among αpp, φ and d1.

Fig. 4.
Fig. 4.

(a). Relation among αmax, n2 and n3 (b). Relation among Rmax, n2 and n3 (c). Relation among αpp, n2 and n3.

Fig. 5.
Fig. 5.

Schematic diagram of measurement system.

Fig. 6.
Fig. 6.

The area of the triangle converges at tilt angle φ=30° on the n2- n3 plane.

Fig. 7.
Fig. 7.

The cross section SEM image of the MgF2 film with the tilt angle of 30°.

Fig. 8.
Fig. 8.

The fitted and measured dispersion of the principal indices of n2(λ) and n3(λ).

Tables (1)

Tables Icon

Table 1. The sensitivity of PCR (αmax , Rmax and αpp) to optical constants (φ,d1, n2 and n3) for a typical low-refractive thin film with optical constants (n1=1.321, n2=1.320, n3=1.336, φ=30° and d1=900 nm)

Equations (1)

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r sp = r sp ( a ) + j , k = e , o t sj ( a ) e i Λ j r jk ( b ) e i Λ k + t kp ( a ) + j , k , m , n = e , o t sj ( a ) e iΛj r jk ( b ) e i Λ k + r km ( a ) e i Λ m r mn ( b ) e i Λ m + t np ( a ) +

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