Abstract

Nanoscale features as small as 65 ± 5 nm have been formed reproducibly by using 520 nm femtosecond pulsed excitation of a 4,4'-bis(di-n-butylamino)biphenyl chromophore to initiate crosslinking in a triacrylate blend. Dosimetry studies of the photoinduced polymerization were performed on chromophores with sizable two-photon absorption cross-sections at 520 and 730 nm. These studies show that sub-diffraction limited line widths are obtained in both cases with the lines written at 520 nm being smaller. Three-dimensional multiphoton lithography at 520 nm has been used to fabricate polymeric woodpile photonic crystal structures that show stop bands in the near-infrared spectral region.

© 2007 Optical Society of America

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  2. W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
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    [CrossRef]
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  19. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
    [CrossRef]

2005 (3)

K. Takada, H.-B. Sun, and S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122 - 071121 (2005).
[CrossRef]

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

2004 (1)

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

2003 (1)

2002 (3)

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

M. Straub, and M. Gu, "Near-infrared photonic crystals with higher-order bandgaps generated by two-photon photopolymerization," Opt. Lett. 27, 1824-1826 (2002).

2001 (3)

P. Galajda, and P. Ormos, "Complex micromachines produced and driven by light," Appl. Phys. Lett. 78, 249 - 251 (2001).
[CrossRef]

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

2000 (3)

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

1999 (1)

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

1998 (1)

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

1996 (1)

Alain, V.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Amari, N.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Ananthavel, S.

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

Ananthavel, S. P.

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Andraud, C.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Anemian, R.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Baldeck, P.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Barlow, S.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Bauer, C. A.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Beljonne, D.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

Biswas, R.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Braun, K.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

Braun, K. L.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Bredas, J. L.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

Bur, J.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Busch, K.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Cammack, J. K.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Campagnola, P. J.

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

Chichkov, B. N.

Cronauer, C.

Cumpston, B. H.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Deubel, M.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Domann, G.

Dyer, D. L.

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Egbert, A.

Ehrlich, J. E.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Epling, G. A.

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

Erskine, L. L.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Fleming, J. G.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Fröhlich, L.

Galajda, P.

P. Galajda, and P. Ormos, "Complex micromachines produced and driven by light," Appl. Phys. Lett. 78, 249 - 251 (2001).
[CrossRef]

Goodman, S. L.

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

Gu, M.

Heikal, A. A.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Hetherington, D. L.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Ho, K. M.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Houbertz, R.

Hu, Z.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

Juodkazis, S.

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Kawata, S.

K. Takada, H.-B. Sun, and S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122 - 071121 (2005).
[CrossRef]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

Kewitsch, A. S.

Kuebler, S. M.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Kurtz, S. R.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Lee, I. Y. S.

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Lemercier, G.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Lin, S. Y.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Marder, S. R.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Martineau, C.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

McCord-Maughon, D.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Meyer-Friedrichsen, T.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Misawa, H.

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Miwa, M.

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Mizeikis, V.

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Mulatier, J.-C.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Ober, C. K.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Ormos, P.

P. Galajda, and P. Ormos, "Complex micromachines produced and driven by light," Appl. Phys. Lett. 78, 249 - 251 (2001).
[CrossRef]

Ostendorf, A.

Parker, T. C.

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

Pereira, S.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Perry, J. W.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Pitts, J. D.

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

Pond, S. J. K.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Popall, M.

Qin, J.

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Rockel, H.

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Rumi, M.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Schulz, J.

Seet, K. K.

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Serbin, J.

Sigalas, M. M.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Smith, B. K.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Soukoulis, C. M.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Stellacci, F.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Stephan, O.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Straub, M.

Sun, H.-B.

K. Takada, H.-B. Sun, and S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122 - 071121 (2005).
[CrossRef]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

Takada, K.

K. Takada, H.-B. Sun, and S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122 - 071121 (2005).
[CrossRef]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

Tanaka, T.

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

Thayumanavan, S.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

Von Freymann, G.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Wang, I.

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

Watanabe, T.

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

Wegener, M.

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Wenseleers, W.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Wu, X.-L.

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

Yariv, A.

Yu, T.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Zhang, Y.

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Zhou, W.

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Zubrzycki, W.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Adv. Mater. (1)

F. Stellacci, C. A. Bauer, T. Meyer-Friedrichsen, W. Wenseleers, V. Alain, S. M. Kuebler, S. J. K. Pond, Y. Zhang, S. R. Marder, and J. W. Perry, "Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning," Adv. Mater. 14, 194-198 (2002).
[CrossRef]

Appl. Phys. Lett. (2)

P. Galajda, and P. Ormos, "Complex micromachines produced and driven by light," Appl. Phys. Lett. 78, 249 - 251 (2001).
[CrossRef]

K. Takada, H.-B. Sun, and S. Kawata, "Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting," Appl. Phys. Lett. 86, 071122 - 071121 (2005).
[CrossRef]

CR Chimie (1)

G. Lemercier, J.-C. Mulatier, C. Martineau, R. Anemian, C. Andraud, I. Wang, O. Stephan, N. Amari, P. Baldeck, "Two-photon absorption: from optical power limiting to 3D microfabrication," CR Chimie 8, 1308-1316 (2005).

J. Am. Chem. Soc. (1)

M. Rumi, J. E. Ehrlich, A. A. Heikal, J. W. Perry, S. Barlow, Z. Hu, D. McCord-Maughon, T. C. Parker, H. Rockel, S. Thayumanavan, S. R. Marder, D. Beljonne, and J. L. Bredas, "Structure-property relationships for two-photon absorbing chromophores: Bis-Donor Diphenylpolyene and Bis(styryl)benzene Derivatives," J. Am. Chem. Soc. 122, 9500-9510 (2000).
[CrossRef]

J. Photopolym. Sci. Technol. (1)

S. M. Kuebler, M. Rumi, T. Watanabe, K. Braun, B. H. Cumpston, A. A. Heikal, L. L. Erskine, S. Thayumanavan, S. Barlow, S. R. Marder, and J. W. Perry, "Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication," J. Photopolym. Sci. Technol. 14, 657 - 668 (2001).

Macromolecules (1)

J. D. Pitts, P. J. Campagnola, G. A. Epling, and S. L. Goodman, "Submicron multiphoton free-form fabrication of proteins and polymers: studies of reaction efficiencies and applications in sustained release," Macromolecules 33, 1514-1523 (2000).
[CrossRef]

Nanotechnology (1)

S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-849 (2005).
[CrossRef]

Nat. Mater. (1)

M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444 - 447 (2004).
[CrossRef]

Nature (3)

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697 - 698 (2001).
[CrossRef]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51 - 54 (1999).

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Opt. Lett. (3)

Proc. SPIE (1)

S. M. Kuebler, B. H. Cumpston, S. Ananthavel, S. Barlow, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, S. R. Marder, J. W. Perry, "Three-dimensional microfabrication using two-photon activated chemistry," Proc. SPIE 3937, 97-105 (2000).

Science (1)

W. Zhou, S. M. Kuebler, K. L. Braun, T. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, "An Efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication," Science 296, 1106-1109 (2002).
[CrossRef]

Other (2)

M. Rumi, School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, Georgia 30332-0400 (unpublished results, 2006).

K. Takada, H.-B. Sun, and S. Kawata, "The study on spatial resolution in two-photon induced polymerization," Proc. SPIE 6110, 61100A-1 - 61100A-7 (2006).

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