Abstract

The Maskless DNA Array Synthesizer (MAS) is very efficient and flexible device on custom designed DNA array fabricating. To make the MAS’s focal plane keep stable is important during the chip synthesizing process. In this paper we bring a creative idea using con-focal method to verify focal plane of MAS machine. That method is very sensitive on focal plane verification and could be used on other optical lithography system or the projecting system, which need real time focal plane precision control.

© 2007 Optical Society of America

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Errata

Wei Huang and Franco Cerrina, "The con-focal method on verifying focal plane of MAS machine: erratum," Opt. Express 15, 1954-1954 (2007)
https://www.osapublishing.org/oe/abstract.cfm?uri=oe-15-4-1954

References

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  1. Sangeet Singh-Gasson &Roland D. Green, "Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array," Nature Biotechnol. 17,974 (1999).
    [CrossRef]
  2. T. Wilson, C. R. J. Sheppard, Theory and Practice of Scanning Optical Microscopy, (Academic Press, London, 1984), Chap. 3.
  3. C.J.R. Sheppard and D.M. Shotton, Confocal Laser Scanning Microscopy, (Springer, New York, 1997), Chap. 3.

1999 (1)

Sangeet Singh-Gasson &Roland D. Green, "Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array," Nature Biotechnol. 17,974 (1999).
[CrossRef]

Nature Biotechnol. (1)

Sangeet Singh-Gasson &Roland D. Green, "Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array," Nature Biotechnol. 17,974 (1999).
[CrossRef]

Other (2)

T. Wilson, C. R. J. Sheppard, Theory and Practice of Scanning Optical Microscopy, (Academic Press, London, 1984), Chap. 3.

C.J.R. Sheppard and D.M. Shotton, Confocal Laser Scanning Microscopy, (Springer, New York, 1997), Chap. 3.

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Figures (8)

Fig. 1.
Fig. 1.

The process of maskless array photolithography approach for DNA chip

Fig. 2.
Fig. 2.

The idea of the device with DLP Maskless array Synthesizer

Fig. 3.
Fig. 3.

Con-focal system in on focus and defocus condition

Fig. 4.
Fig. 4.

The setup of DLP focus verification system

Fig. 5.
Fig. 5.

The 4 in 9 pattern and its image

Fig. 6.
Fig. 6.

The intensity change in different focal shift

Fig.7.
Fig.7.

On focus position

Fig. 8.
Fig. 8.

Defocus position

Equations (3)

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I ( v ) = [ 2 J 1 ( v ) v ] 2
v = 2 π r 1 sin α λ
I ( v ) = [ 2 J 1 ( v ) v ] 4

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