We experimentally demonstrate the optical transmission at 1550 nm of the fundamental slot modes (quasi-TM modes) in horizontal single and multiple slot waveguides and ring resonators consisting of deposited amorphous silicon and silicon dioxide. We demonstrate that the horizontal multiple slot configuration provides enhanced optical confinement in low index slot regions compared to a horizontal single slot structure with the same total SiO2 layer thickness by comparing their thermo-optic coefficients for the horizontal slot ring resonators. We show in these early structures that horizontal slot waveguides have low propagation loss of 6 ~ 7 dB/cm. The waveguide loss is mainly due to a-Si material absorption. The addition of a- Si/SiO2 interfaces does not introduce significant scattering loss in a horizontal multiple slot waveguide compared to a horizontal single slot waveguide.
© 2007 Optical Society of AmericaPDF Article