Abstract

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. H. A. Macleod, "Monitor of optical coatings," Appl. Opt. 20, 82-89 (1981).
    [CrossRef] [PubMed]
  2. C. C. Lee and K. Wu, "In situ sensitive optical monitoring with error compensation," Opt. Lett. 32, 2118-2120 (2007).
    [CrossRef] [PubMed]
  3. S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
    [CrossRef]
  4. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
    [CrossRef]
  5. B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).
  6. J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
    [CrossRef]
  7. H. A. Macleod, Thin Film Optical Filters, 3nd ed., (Inst. of Physics Publishing 2001).
  8. Y. R. Chen, C. C. Lee, "Monitoring of Multilayer by Admittance Diagram", in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007), paper PWC7.
  9. B. Chun, C. K. Hwangbo, and J. S. Kim, "Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance," Opt. Express 14, 2473-2480 (2006)
    [CrossRef] [PubMed]
  10. A. Tikhonravov and M. Trubetskov, "Eliminating of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theory," Appl. Opt. 46, 2084 (2007).
    [CrossRef] [PubMed]

2007 (2)

2006 (2)

B. Chun, C. K. Hwangbo, and J. S. Kim, "Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance," Opt. Express 14, 2473-2480 (2006)
[CrossRef] [PubMed]

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

2005 (2)

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

2004 (1)

S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
[CrossRef]

1981 (1)

Brock, N.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Chun, B.

Dligatch, S.

S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
[CrossRef]

Hayes, J.

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Hwangbo, C. K.

Kim, J. S.

Kimbrough, B.

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Lee, C. C.

Macleod, H. A.

Martin, B.

S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
[CrossRef]

Millerd, J.

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

Netterfield, R.

S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
[CrossRef]

North-Morris, M.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

Novak, M.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

Tikhonravov, A.

Trubetskov, M.

Wu, K.

Wyant, J.

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

Wyant, J. C.

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

Appl. Opt. (2)

Opt. Express (1)

Opt. Lett. (1)

Proc. of SPIE (1)

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology," Proc. of SPIE 5856, 14-22 (2005)
[CrossRef]

Proc. SPIE (2)

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, " Dynamic interferometry, " Proc. SPIE 5875, 58750F (2005).
[CrossRef]

B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, 62920F (2006).

Thin Solid Films (1)

S. Dligatch, R. Netterfield, and B. Martin, "Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy," Thin Solid Films 455-456, 376-379 (2004).
[CrossRef]

Other (2)

H. A. Macleod, Thin Film Optical Filters, 3nd ed., (Inst. of Physics Publishing 2001).

Y. R. Chen, C. C. Lee, "Monitoring of Multilayer by Admittance Diagram", in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007), paper PWC7.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1.
Fig. 1.

Scheme of transmission optical monitoring system.

Fig. 2.
Fig. 2.

Scheme of reflection optical monitoring system.

Fig. 3.
Fig. 3.

Layout of the polarizer array

Fig. 4.
Fig. 4.

Multiple reflections in the substrate for transmission monitoring system

Fig. 5.
Fig. 5.

Multiple reflections in the substrate for reflection monitoring system

Fig. 6.
Fig. 6.

Admittance loci simulation of homogenous and inhomogenous thin films

Equations (16)

Equations on this page are rendered with MathJax. Learn more.

I 0 ° = I s ( 1 ρ r ) 2 τ at 2 1 ρ st 2 ρ r 2 I 90 ° = I p ( 1 ρ r ) 2 ρ at 2 1 ρ st 2 ρ r 2
I S 0 P 1 = 1 2 ( I p ρ r 2 ρ st 2 1 ρ r 2 τ at 2 + I s ρ r 2 1 ρ r 2 τ at 2 + 2 I s I p 1 ρ r 2 τ at 2 ρ r ρ st cos θ )
I S 1 P 2 = 1 2 ρ r 2 ρ st 2 ( I p ρ r 2 ρ st 2 1 ρ r 2 τ at 2 + I s ρ r 2 1 ρ r 2 τ at 2 + 2 I s I p 1 ρ r 2 τ at 2 ρ r ρ st cos θ )
= ρ r 2 ρ st 2 I S 0 P 1
I S 2 P 3 = ( ρ r 2 ρ st 2 ) 2 I S 0 P 1 ; I S 3 P 4 = ( ρ r 2 ρ st 2 ) 3 I S 0 P 1 ; . . . . . . . . . . I SNPN = ( ρ r 2 ρ st 2 ) N I S 0 P 1 ;
I + 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ st ρ r cos θ
I 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ st ρ r cos θ
δ st = [ arccos ( I + 45 ° I 45 ° 2 I 0 ° I 90 ° ρ st ρ r ) ] 2 s + Γ
I 0 ° = I s ρ r 2 + I s ( 1 ρ r ) 4 ρ st 2 1 ρ st 2 ρ r 2 I 90 ° = I p ρ r 2 + I p ( 1 ρ r ) 4 ρ st 2 1 ρ st 2 ρ r 2
I + 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) cos θ
I 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) cos θ
δ st = { arccos [ ( I + 45 ° I 45 ° ) 2 I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) ] } 2 s + Γ
n s ( α + i β ) n s + ( α + i β ) = ρ st e i δ s t .
α = n s ( 1 ρ st 2 ) 1 + ρ st 2 + 2 ρ st cos δ st , β = 2 n s ρ st sin δ st 1 + ρ st 2 + 2 ρ st cos δ st
α + i β = in sin δ + ( α + i β ) cos δ cos δ + i α β n sin δ
δ = arctan [ ± ( α 2 α α α 2 + α β 2 α β 2 α β + α β ) ] n = ± ( α α ) ( α 2 α α α 2 + α β 2 α β 2 ) ( α α )

Metrics