Abstract

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

© 2007 Optical Society of America

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References

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  1. H. A. Macleod, “Monitor of optical coatings,” Appl. Opt. 20, 82–89 (1981).
    [CrossRef] [PubMed]
  2. C. C. Lee and K. Wu, “In situ sensitive optical monitoring with error compensation,” Opt. Lett. 32, 2118–2120 (2007).
    [CrossRef] [PubMed]
  3. S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
    [CrossRef]
  4. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
    [CrossRef]
  5. B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).
  6. J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
    [CrossRef]
  7. H. A. Macleod, Thin Film Optical Filters, 3nd ed (Inst. of Physics Publishing2001).
  8. Y. R. Chen and C. C. Lee, “Monitoring of Multilayer by Admittance Diagram”, in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007) , paper PWC7.
  9. B. Chun, C. K. Hwangbo, and J. S. Kim, “Optical monitoring of nonquarter-wave layers of dielectric multilayer filters using optical admittance,” Opt. Express 14, 2473–2480 (2006)
    [CrossRef] [PubMed]
  10. A. Tikhonravov and M. Trubetskov, “Eliminating of cumulative effect of thickness errors in monochromatic monitoring of optical coating production: theory,” Appl. Opt. 46, 2084 (2007).
    [CrossRef] [PubMed]

2007 (2)

2006 (1)

2005 (1)

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

2004 (1)

S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
[CrossRef]

1981 (1)

Brock, N.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Chen, Y. R.

Y. R. Chen and C. C. Lee, “Monitoring of Multilayer by Admittance Diagram”, in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007) , paper PWC7.

Chun, B.

Dligatch, S.

S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
[CrossRef]

Hayes, J.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).

Hwangbo, C. K.

Kim, J. S.

Kimbrough, B.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Lee, C. C.

C. C. Lee and K. Wu, “In situ sensitive optical monitoring with error compensation,” Opt. Lett. 32, 2118–2120 (2007).
[CrossRef] [PubMed]

Y. R. Chen and C. C. Lee, “Monitoring of Multilayer by Admittance Diagram”, in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007) , paper PWC7.

Macleod, H. A.

H. A. Macleod, “Monitor of optical coatings,” Appl. Opt. 20, 82–89 (1981).
[CrossRef] [PubMed]

H. A. Macleod, Thin Film Optical Filters, 3nd ed (Inst. of Physics Publishing2001).

Martin, B.

S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
[CrossRef]

Millerd, J.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Netterfield, R.

S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
[CrossRef]

North-Morris, M.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Novak, M.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Tikhonravov, A.

Trubetskov, M.

Wu, K.

Wyant, J.

B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).

Wyant, J. C.

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

Appl. Opt. (2)

Opt. Express (1)

Opt. Lett. (1)

Proc. of SPIE (1)

J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, “Modern Approaches in Phase Measuring Metrology,” Proc. of SPIE 5856, 14–22 (2005)
[CrossRef]

Thin Solid Films (1)

S. Dligatch, R. Netterfield, and B. Martin, “Application of in-situ ellipsometry to the fabrication of multi-layered coatings with sub-nanometre accuracy,” Thin Solid Films 455– 456, 376–379 (2004).
[CrossRef]

Other (4)

N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE5875, 58750F (2005).
[CrossRef]

B. Kimbrough, J. Millerd, J. Wyant, and J. Hayes, “Low Coherence Vibration Insensitive Fizeau Interferometer,” Proc. SPIE6292, 62920F (2006).

H. A. Macleod, Thin Film Optical Filters, 3nd ed (Inst. of Physics Publishing2001).

Y. R. Chen and C. C. Lee, “Monitoring of Multilayer by Admittance Diagram”, in Conference on Optical Interference Coatings, Technical Digest (CD) (Optical Society of America, 2007) , paper PWC7.

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Figures (6)

Fig. 1.
Fig. 1.

Scheme of transmission optical monitoring system.

Fig. 2.
Fig. 2.

Scheme of reflection optical monitoring system.

Fig. 3.
Fig. 3.

Layout of the polarizer array

Fig. 4.
Fig. 4.

Multiple reflections in the substrate for transmission monitoring system

Fig. 5.
Fig. 5.

Multiple reflections in the substrate for reflection monitoring system

Fig. 6.
Fig. 6.

Admittance loci simulation of homogenous and inhomogenous thin films

Equations (16)

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I 0 ° = I s ( 1 ρ r ) 2 τ at 2 1 ρ st 2 ρ r 2 I 90 ° = I p ( 1 ρ r ) 2 ρ at 2 1 ρ st 2 ρ r 2
I S 0 P 1 = 1 2 ( I p ρ r 2 ρ st 2 1 ρ r 2 τ at 2 + I s ρ r 2 1 ρ r 2 τ at 2 + 2 I s I p 1 ρ r 2 τ at 2 ρ r ρ st cos θ )
I S 1 P 2 = 1 2 ρ r 2 ρ st 2 ( I p ρ r 2 ρ st 2 1 ρ r 2 τ at 2 + I s ρ r 2 1 ρ r 2 τ at 2 + 2 I s I p 1 ρ r 2 τ at 2 ρ r ρ st cos θ )
= ρ r 2 ρ st 2 I S 0 P 1
I S 2 P 3 = ( ρ r 2 ρ st 2 ) 2 I S 0 P 1 ; I S 3 P 4 = ( ρ r 2 ρ st 2 ) 3 I S 0 P 1 ; . . . . . . . . . . I SNPN = ( ρ r 2 ρ st 2 ) N I S 0 P 1 ;
I + 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ st ρ r cos θ
I 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ st ρ r cos θ
δ st = [ arccos ( I + 45 ° I 45 ° 2 I 0 ° I 90 ° ρ st ρ r ) ] 2 s + Γ
I 0 ° = I s ρ r 2 + I s ( 1 ρ r ) 4 ρ st 2 1 ρ st 2 ρ r 2 I 90 ° = I p ρ r 2 + I p ( 1 ρ r ) 4 ρ st 2 1 ρ st 2 ρ r 2
I + 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) cos θ
I 45 ° = 1 2 ( I 0 ° + I 90 ° ) + I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) cos θ
δ st = { arccos [ ( I + 45 ° I 45 ° ) 2 I 0 ° I 90 ° ρ r ρ st ( 1 ρ r 2 + ( 1 ρ r ) 2 I 0 ° I 90 ° ) ] } 2 s + Γ
n s ( α + i β ) n s + ( α + i β ) = ρ st e i δ s t .
α = n s ( 1 ρ st 2 ) 1 + ρ st 2 + 2 ρ st cos δ st , β = 2 n s ρ st sin δ st 1 + ρ st 2 + 2 ρ st cos δ st
α + i β = in sin δ + ( α + i β ) cos δ cos δ + i α β n sin δ
δ = arctan [ ± ( α 2 α α α 2 + α β 2 α β 2 α β + α β ) ] n = ± ( α α ) ( α 2 α α α 2 + α β 2 α β 2 ) ( α α )

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