Abstract

We demonstrate optical microresonators in polycrystalline silicon with quality factors of 20,000. We also demonstrate polycrystalline resonators vertically coupled to crystalline silicon waveguides. Electrically active photonic structures fabricated in deposited polysilicon layers would enable the large-scale integration of photonics with current CMOS microelectronics.

© 2007 Optical Society of America

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2007 (4)

2006 (4)

P. Koonath, T. Indukuri, and B. Jalali, "Monolithic 3-D Silicon Photonics," J. Lightwave Technol. 24, 1796-1804 (2006).
[CrossRef]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006).
[CrossRef] [PubMed]

R. S. Sposili and J. S. Im, "Sequential lateral solidification of thin silicon films on SiO2," Appl. Phys. Lett. 69, 2864-2866 (2006).
[CrossRef]

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

2005 (4)

A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005).
[CrossRef]

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

M. Lipson, "Guiding, Modulating, and Emitting Light on Silicon-Challenges and Opportunities," J. Lightwave Technol. 23, 4222-4238 (2005).
[CrossRef]

2004 (1)

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

2003 (1)

2002 (1)

2000 (2)

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

D. A. B.  Miller, "Optical interconnects to silicon," IEEE J. Sel. Top. Quantum Electron.  6, 1312−1317 (2000).
[CrossRef]

1999 (2)

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

1998 (1)

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

1997 (1)

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

1987 (2)

1986 (1)

T. Sameshima, S. Usui, and M. Sekiya, "XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's," IEEE Electron Device Lett. 7, 276-278 (1986).
[CrossRef]

Agarwal, A. M.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

Almeida, V. R.

Bellutii, P.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Bennett, B. R.

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

Biswas, R.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Bowers, J. E.

Bur, Jim

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Chetrit, Y.

Chu, S. T.

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

Ciftcioglu, B.

Cohen, O.

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006).
[CrossRef] [PubMed]

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Dal Negro, L.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Daldosso, N.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Dalton, L. R.

Denton, J. P.

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

Duan, X.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

Fang, A.

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

Fang, A. W.

Fleming, J. G.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Foresi, J.

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

Fujimoto, H. H.

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Galli, G.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Hak, D.

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

Hamel, S.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Harke, A.

A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005).
[CrossRef]

Haus, H. A.

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

Henry, C. H.

Hetherington, D. L.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Ho, K. M.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Im, J. S.

R. S. Sposili and J. S. Im, "Sequential lateral solidification of thin silicon films on SiO2," Appl. Phys. Lett. 69, 2864-2866 (2006).
[CrossRef]

Indukuri, T.

Izhaky, N.

Jalali, B.

Jones, R.

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006).
[CrossRef] [PubMed]

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Katz, L. E.

Kazarinov, R. F.

Kimerling, L. C.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Kompocholis, C.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Koonath, P.

Krause, M.

A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005).
[CrossRef]

Kurtz, S. R.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Laine, J. P.

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

Lee, H. J.

Lee, K. K.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Liao, L.

A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15, 660-668 (2007).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

Lim, D. R.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Lin, S. Y.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Lipson, M.

Little, B. E.

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

B. E.  Little, S. T.  Chu, H. A.  Haus, J.  Foresi, and J. P.  Laine, "Microring resonator channel dropping filters," J. Lightwave Technol.  15, 998-1005 (1997).
[CrossRef]

Liu, A.

A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15, 660-668 (2007).
[CrossRef] [PubMed]

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Lui, A.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Manipatruni, S.

Melchiorri, M.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Miller, D. A. B.

D. A. B.  Miller, "Optical interconnects to silicon," IEEE J. Sel. Top. Quantum Electron.  6, 1312−1317 (2000).
[CrossRef]

Morse, M.

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Mueller, J.

A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005).
[CrossRef]

Neudeck, G. W.

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

Nguyen, H.

Nicolaescu, R.

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Orlowsky, K. J.

Pae, S.

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

Panepucci, R. R.

Paniccia, M.

A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15, 660-668 (2007).
[CrossRef] [PubMed]

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Paniccia, M. J.

Park, H.

Pavesi, L.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Preble, S. F.

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nature Photon. 1, 293 - 296 (2007).
[CrossRef]

Pucker, G.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Rabiei, P.

Rong, H.

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

Rubin, D.

A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15, 660-668 (2007).
[CrossRef] [PubMed]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Samara-Rubio, D.

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Sameshima, T.

T. Sameshima, S. Usui, and M. Sekiya, "XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's," IEEE Electron Device Lett. 7, 276-278 (1986).
[CrossRef]

Sbrana, F.

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

Schmidt, B.

Sekaric, L.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon.  1, 65-71 (2007).
[CrossRef]

Sekiya, M.

T. Sameshima, S. Usui, and M. Sekiya, "XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's," IEEE Electron Device Lett. 7, 276-278 (1986).
[CrossRef]

Shakya, J.

Sigalas, M. M.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Smith, B. K.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Soref, R. A.

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

Sposili, R. S.

R. S. Sposili and J. S. Im, "Sequential lateral solidification of thin silicon films on SiO2," Appl. Phys. Lett. 69, 2864-2866 (2006).
[CrossRef]

Steier, W. H.

Su, T.

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

Usui, S.

T. Sameshima, S. Usui, and M. Sekiya, "XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's," IEEE Electron Device Lett. 7, 276-278 (1986).
[CrossRef]

Vlasov, Y.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon.  1, 65-71 (2007).
[CrossRef]

Williamson, A.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Xia, F.

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon.  1, 65-71 (2007).
[CrossRef]

Xu, Q.

Yi, J. H.

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Zhang, C.

Zubrzycki, W.

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (3)

M.  Melchiorri, N.  Daldosso, F.  Sbrana, L.  Pavesi, G.  Pucker, C.  Kompocholis, P.  Bellutii, and A.  Lui, "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett.  86, 121111 (2005).
[CrossRef]

R. S. Sposili and J. S. Im, "Sequential lateral solidification of thin silicon films on SiO2," Appl. Phys. Lett. 69, 2864-2866 (2006).
[CrossRef]

L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, "Light emission from silicon-rich nitride nanostructures," Appl. Phys. Lett. 88, 183103 (2006).
[CrossRef]

Electron. Lett. (1)

A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005).
[CrossRef]

IEEE Electron Device Lett. (2)

S. Pae, T. Su, J. P. Denton, and G. W. Neudeck, "Multiple Layers of Silicon-on-Insulator Islands Fabrication by Selective Epitaxial Growth," IEEE Electron Device Lett. 20, 194-196 (1999).
[CrossRef]

T. Sameshima, S. Usui, and M. Sekiya, "XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's," IEEE Electron Device Lett. 7, 276-278 (1986).
[CrossRef]

IEEE J. Quantum Electron. (1)

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

D. A. B.  Miller, "Optical interconnects to silicon," IEEE J. Sel. Top. Quantum Electron.  6, 1312−1317 (2000).
[CrossRef]

J. Electron. Mater. (1)

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides: effect of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength," J. Electron. Mater. 29, 1380-1386 (2000).
[CrossRef]

J. Lightwave Technol. (4)

Nature (3)

H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005).
[CrossRef] [PubMed]

S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, "A three-dimensional photonic crystal operating at infrared wavelengths," Nature 394, 251-253 (1998).
[CrossRef]

A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004).
[CrossRef] [PubMed]

Nature Photon. (2)

F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon.  1, 65-71 (2007).
[CrossRef]

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nature Photon. 1, 293 - 296 (2007).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Proc. SPIE (1)

D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus, and L. C. Kimerling, "Micron-sized channel dropping filters using silicon waveguide devices," Proc. SPIE 3847, 65-71 (1999).
[CrossRef]

Other (10)

T. A. Carbone, P. Plourde, and E. Karagiannis, "Correlation of ellipsometric volume fraction to polysilicon grainsize from transmission electron microscopy," in Proceedings of Advanced Semiconductor Manufacturing Conference (IEEE/SEMI, 1999), pp. 359-367.

SILVACO International, 4701, Patrick Henry Drive, Blg 1, Santa Clara, California.

J. M. Fedeli, M. Migette, L. Di Cioccio, L. El Melhaoui, R. Orobtchouk, C. Seassal, P. RojoRomeo, F. Mandorlo, D. Marris-Morini, and L. Vivien, "Incorporation of a photonic layer at the metallization levels of a CMOS circuit," in Proceedings of IEEE International Conference on Group IV Photonics (IEEE, 2006), pp. 200-202.

A. Shacham, K. Bergman, and L. P. Carloni, "On the Design of a Photonic Network-on-Chip," in Proceedings of IEEE International Symposium on Networks-on-Chips (IEEE, 2007), pp. 53-64.

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, "Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics," in Proceedings of IEEE International Conference on Group IV Photonics (IEEE, 2006), pp. 255-257.

L. Liao, "Low Loss Polysilicon Waveguides for Silicon Photonics" (Master's thesis, MIT, 1997).

L. L. Kazmerski, Polycrystalline and Amorphous Thin Films and Devices (Academic, 1980).

T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed. (Kluwer, 1998).
[CrossRef]

A. Huang, G. Li, Y. Liang, S. Mirsaidi, A. Narasimha, T. Pinguet, and C. Gunn, "A 10Gb/s photonic modulator and WDM MUX/DEMUX integrated with electronics in 0.13μm SOI CMOS," presented at 2006 IEEE International Solid-State Circuits Conference, San Francisco, CA, USA, 2006.

P. A. Maki, M. Fritze, D. R. Lim, B. E. Little, S. C. Palmateer, L. C. Kimerling, and H. A. Haus, "High-Q silicon-based microring resonators fabricated using 248 nm optical lithography," in Proceedings of Conference on Lasers and Electro-Optics (IEEE, 2000), pp. 691-692.

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Figures (5)

Fig. 1.
Fig. 1.

Optical microscope image and scanning electron microscope (SEM) inset of a polysilicon waveguide side coupled to a polysilicon ring resonator.

Fig. 2.
Fig. 2.

(a): Quasi-TM polarized optical mode calculated with a finite element mode solver. (b): Transmission spectrum for a 40 µm radius polysilicon ring resonator annealed at a maximum temperature of 1100°C.

Fig. 3.
Fig. 3.

Coupling region between two defect etched polysilicon waveguides showing an average grain size of approximately 300 nm.

Fig. 4.
Fig. 4.

Process flow for vertical coupling sample. (a): Definition of crystalline silicon waveguides by e-beam lithography and etching. (b): Deposition of TEOS oxide by PECVD. (c): Deposition of amorphous silicon layer, and anneal steps to crystallize amorphous silicon to polycrystalline silicon. (d): Definition of polysilicon resonators by e-beam lithography and etching. (e): Deposition of oxide cladding by PECVD.

Fig. 5.
Fig. 5.

Polysilicon racetrack resonators coupled to crystalline silicon waveguides. (a): Cross-section SEM of the structure before oxide cladding. Inset: Definition of r and coupling length L 0. (b) and (c): Quasi-TM polarized transmission as a function of wavelength for (b) r=40 µm, L 0=3 µm and (c) r=10 µm, L 0=5 µm.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

1 Q loaded = 1 Q 0 + 1 Q coupling ,
Q loaded = 1 2 Q 0 = π · n g λ 0 · α ring ,

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