Abstract

A color filter incorporating a subwavelength patterned grating in a metal film perforated with a square array of circular apertures on a quartz substrate was accomplished. Its performance was enhanced by applying a dielectric overlay to the grating layer so as to match the refractive indices of the media on either side of it. The device was designed by utilizing the finite-difference time-domain method and implemented by adopting the electron-beam direct-writing technique. Two different devices were fabricated with the structural parameters: the grating height of 50 nm and the pitch of 340 nm for the red color and 260 nm for the green color. For the red color filter the center wavelength was 680 nm and the peak transmission 57%, while for the green color one the center wavelength was 550 nm and the peak transmission 50%. It was confirmed the introduction of the index matching overlay led to an increase of ~15% in the transmission efficiency and helped combine double bands into a single dominant band as well, thereby improving the color selectivity of the filter.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. Y. Cho, Y. K. Choi, and S. H. Sohn, "Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter," Appl. Phys. Lett. 89, 051102-1~051102-3 (2006).
    [CrossRef]
  2. P. B. Catrysse, W. Suh, S. Fan, and M. Peeters, "One-mode model for patterned metal layers inside integrated color pixels," Opt. Lett. 29, 974-976 (2004).
    [CrossRef] [PubMed]
  3. Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
    [CrossRef]
  4. L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
    [CrossRef] [PubMed]
  5. T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
    [CrossRef]
  6. H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
    [CrossRef]
  7. C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007).
    [CrossRef] [PubMed]
  8. A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
    [CrossRef]
  9. M. A. Ordal, L. L. Long, R. J. Bell, S. E. Bell, R. R. Bell, R. W. Alexander, Jr., and C. A. Ward, "Optical properties of the metals, Al, Co, Cu, Au, Fe, Pb, Ni, Pd, Pt, Ag, Ti and W in the infrared and far infrared," Appl. Opt. 22, 1099-1119 (1983).
    [CrossRef] [PubMed]
  10. J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
    [CrossRef]

2007 (1)

C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007).
[CrossRef] [PubMed]

2006 (1)

Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
[CrossRef]

2005 (1)

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

2004 (1)

2001 (2)

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

1999 (1)

J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
[CrossRef]

1998 (1)

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

1983 (1)

Alexander, R. W.

Bell, R. J.

Bell, R. R.

Bell, S. E.

Bower, J. E.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Carr, D.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Catrysse, P. B.

Chan, H. B.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Cirelli, R.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Ebbesen, T. W.

C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007).
[CrossRef] [PubMed]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Fan, S.

Ferry, E.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Garcia-Vidal, F. J.

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
[CrossRef]

Genet, C.

C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007).
[CrossRef] [PubMed]

Ghaemi, H. F.

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Hane, K.

Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
[CrossRef]

Kanamori, Y.

Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
[CrossRef]

Kim, T. J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Klemens, F. P.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Krishnan, A.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Lezaec, H. J.

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Lezec, H. J.

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Long, L. L.

Marcet, Z.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Martin-Moreno, L.

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Miner, J. F.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Ordal, M. A.

Pai, C. S.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Peeters, M.

Pellerin, K. M.

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

Pendry, J.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Pendry, J. B.

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
[CrossRef]

Porto, J. A.

J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
[CrossRef]

Shimono, M.

Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
[CrossRef]

Suh, W.

Taylor, J. A.

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

Thio, T.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Ward, C. A.

Wolf, P. A.

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Wolff, P. A.

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Appl. Opt. (1)

Bell Labs Technical J. (1)

H. B. Chan, Z. Marcet, D. Carr, J. E. Bower, R. Cirelli, E. Ferry, F. P. Klemens, J. F. Miner, C. S. Pai, and J. A. Taylor, "Transmission enhancement in an array of subwavelength slits in aluminum due to surface plasmon resonances," Bell Labs Technical J. 10, 143-150 (2005).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

Y. Kanamori, M. Shimono, and K. Hane, "Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrate," IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
[CrossRef]

Nature (2)

C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007).
[CrossRef] [PubMed]

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. Wolf, "Extraordinary optical transmission through subwavelength hole arrays," Nature 391, 667-669 (1998).
[CrossRef]

Opt. Commun. (1)

A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, "Evanescently coupled resonance in surface plasmon enhanced transmission," Opt. Commun. 200, 1-7 (2001).
[CrossRef]

Opt. Lett. (1)

Phys. Rev. Lett. (2)

L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, and T. W. Ebbesen, "Theory of extraordinary optical transmission through subwavelength hole arrays," Phys. Rev. Lett. 86, 1114-1117 (2001).
[CrossRef] [PubMed]

J. A. Porto, F. J. Garcia-Vidal, and J. B. Pendry, "Transmission resonances on metallic gratings with very narrow slits," Phys. Rev. Lett. 83, 2845-2848 (1999).
[CrossRef]

Other (1)

Y. Cho, Y. K. Choi, and S. H. Sohn, "Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter," Appl. Phys. Lett. 89, 051102-1~051102-3 (2006).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1.
Fig. 1.

Configuration of the proposed color filter using a subwavelength patterned grating in Al.

Fig. 2.
Fig. 2.

Theoretical transfer characteristics with and without the index-matching overlay (a) Dev I (b) Dev II.

Fig. 3.
Fig. 3.

Fabrication procedure for the proposed device.

Fig. 4.
Fig. 4.

Scanning electron micrographs of the fabricated color filters (a) Dev I (b) Dev II.

Fig. 5.
Fig. 5.

Measured spectral response of the devices and the captured images for input white light (a) Dev I (b) Dev II.

Fig. 6.
Fig. 6.

Theoretical results on the effect of the grating height upon (a) the transmission (b) the bandwidth and the peak transmission.

Metrics