Abstract

We demonstrate real-time depth profiling of ultrafast micro-machining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 μm. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic.

©2007 Optical Society of America

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References

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  1. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
    [Crossref]
  2. W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
    [Crossref]
  3. D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
    [Crossref]
  4. B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
    [Crossref] [PubMed]
  5. R. Lausten and P. Balling “On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery,” Appl. Phys. Lett. 79, 884–886 (2001).
    [Crossref]
  6. C. S. Nielsen and P. Balling “Deep drilling of metals with ultrashort laser pulses: A two-stage process,” J. Appl. Phys. 99, 093101 (2006).
    [Crossref]
  7. A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
    [Crossref]
  8. R. Huber, D.C Adler, and J. G. Fujimoto, “Buffered Fourier domain mode locking: unidirectional swept laser sources for optical coherence tomography imaging at 370,000 lines/s,” Opt. Lett. 31, 2975–2977 (2006).
    [Crossref] [PubMed]

2007 (1)

B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
[Crossref] [PubMed]

2006 (3)

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

C. S. Nielsen and P. Balling “Deep drilling of metals with ultrashort laser pulses: A two-stage process,” J. Appl. Phys. 99, 093101 (2006).
[Crossref]

R. Huber, D.C Adler, and J. G. Fujimoto, “Buffered Fourier domain mode locking: unidirectional swept laser sources for optical coherence tomography imaging at 370,000 lines/s,” Opt. Lett. 31, 2975–2977 (2006).
[Crossref] [PubMed]

2004 (1)

D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
[Crossref]

2003 (1)

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

2001 (1)

R. Lausten and P. Balling “On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery,” Appl. Phys. Lett. 79, 884–886 (2001).
[Crossref]

1996 (1)

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Adler, D.C

Alvensleben, F. von

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Anglos, D.

D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
[Crossref]

Balling, P.

C. S. Nielsen and P. Balling “Deep drilling of metals with ultrashort laser pulses: A two-stage process,” J. Appl. Phys. 99, 093101 (2006).
[Crossref]

R. Lausten and P. Balling “On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery,” Appl. Phys. Lett. 79, 884–886 (2001).
[Crossref]

Bouma, B. E.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
[Crossref] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

Chichkov, B.N.

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Drexler, W.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

Fercher, A. F.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

Fujimoto, J. G.

Hitzenberger, C. K.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

Huber, R.

Lasser, T.

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

Lausten, R.

R. Lausten and P. Balling “On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery,” Appl. Phys. Lett. 79, 884–886 (2001).
[Crossref]

Momma, C.

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Nielsen, C. S.

C. S. Nielsen and P. Balling “Deep drilling of metals with ultrashort laser pulses: A two-stage process,” J. Appl. Phys. 99, 093101 (2006).
[Crossref]

Nolte, S.

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Oh, W. Y.

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

Papadakis, V.

D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
[Crossref]

Papazoglou, D. G.

D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
[Crossref]

Tearney, G. J.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
[Crossref] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

Tunnermann, A.

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Vakoc, B. J.

B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
[Crossref] [PubMed]

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

Yun, S. H.

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

Appl. Phys. A (1)

B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A 63, 109–115 (1996).
[Crossref]

Appl. Phys. Lett. (2)

W. Y. Oh, S. H. Yun, B. J. Vakoc, G. J. Tearney, and B. E. Bouma, “Ultrahigh-speed optical frequency domain imaging and application to laser ablation monitoring,” Appl. Phys. Lett. 88, 103902 (2006).
[Crossref]

R. Lausten and P. Balling “On-the-fly depth profiling during ablation with ultrashort laser pulses: A tool for accurate micromachining and laser surgery,” Appl. Phys. Lett. 79, 884–886 (2001).
[Crossref]

J. Anal. At. Spectrom. (1)

D. G. Papazoglou, V. Papadakis, and D. Anglos “In situ interferometric depth and topography monitoring in LIBS elemental profiling of multi-layer structures,” J. Anal. At. Spectrom. 19, 483–488 (2004).
[Crossref]

J. Appl. Phys. (1)

C. S. Nielsen and P. Balling “Deep drilling of metals with ultrashort laser pulses: A two-stage process,” J. Appl. Phys. 99, 093101 (2006).
[Crossref]

J. Biomed. Opt. (1)

B. J. Vakoc, G. J. Tearney, and B. E. Bouma “Real-time microscopic visualization of tissue response to laser thermal therapy,” J. Biomed. Opt. 12, 020501 (2007).
[Crossref] [PubMed]

Opt. Lett. (1)

Rep. Prog. Phys. (1)

A. F. Fercher, W. Drexler, C. K. Hitzenberger, and T. Lasser, “Optical coherence tomography-principles and applications,” Rep. Prog. Phys. 66, 239–303 (2003).
[Crossref]

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Figures (3)

Fig. 1.
Fig. 1. Schematic of the experimental setup. While adjustable, the reference arm and galvanometer mirrors are stationary for the experiments.

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Fig. 2.
Fig. 2. Normalized spectra emitted by the laser and measured by the InGaAs spectrometer. Inset shows measured point spread function with Gaussian fit of FWHM of 6 μm.

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Fig. 3.
Fig. 3. Two representative M-mode images of the ablation created by the system. Arrows are intended as a guide for the eye to regions of increased cutting speed.

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