An effective terahertz (THz) imaging technology is presented for achieving tomographic image. A THz pulse reflective focal-plane imaging system is built up and the tomographic image of a metallic cross hidden by a high resistivity Si wafer is achieved. Using the reflected pulses from each interface, the thickness of each layer can be calculated with calculation error below 2.5%. This work demonstrates that the THz pulse focal-plane tomography can be used to analysis interior configuration of the object.
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