Abstract

An effective terahertz (THz) imaging technology is presented for achieving tomographic image. A THz pulse reflective focal-plane imaging system is built up and the tomographic image of a metallic cross hidden by a high resistivity Si wafer is achieved. Using the reflected pulses from each interface, the thickness of each layer can be calculated with calculation error below 2.5%. This work demonstrates that the THz pulse focal-plane tomography can be used to analysis interior configuration of the object.

© 2007 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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2006 (4)

2005 (4)

N. Li, J. Shen, J. Sun, L. Liang, X. Xu, M. Lu, and Y. Jia, "Study on the THz spectrum of methamphetamine," Opt. Express 13, 6750-6755 (2005), http://www.opticsinfobase.org/abstract.cfm?URI=oe-13-18-6750.
[CrossRef]

N. C. J. Valk, W. A. M. Marel, and P. C. M. Planken, "Terahertz polarization imaging," Opt. Lett. 30, 2802-2804 (2005).
[CrossRef] [PubMed]

H. Zhong, J. Xu, X. Xie, T. Yuan, R. Reightler, E. Madaras, and X.-C. Zhang, "Nondestructive Defect Identification With Terahertz Time-of-Flight Tomography," IEEE. Sens. J. 5, 203-208 (2005).
[CrossRef]

J. Nishizawa, T. Sasaki, K. Suto, T. Yamada, T. Tanabe, T. Tanno, T. Sawai, and Y. Miura, "THz imaging of nucleobases and cancerous tissue using a GaP THz-wave generator," Opt. Commun. 244, 469-474 (2005).
[CrossRef]

2000 (2)

P. Y. Han, G. C. Cho, and X.-C. Zhang, "Time-domain transillumination of biological tissues with terahertz pulses," Opt. Lett. 25, 242-244 (2000).
[CrossRef]

Z. Jiang, X. G. Xu, and X.-C. Zhang, "Improvement of terahertz imaging with a dynamic subtraction technique," Appl. Optics 39, 2982-2987 (2000).
[CrossRef]

1999 (2)

D. M. Mittleman, M. Gupta, R. Neelamani, R. G. Baraniuk, J. V. Rudd, and M. Koch, "Recent advances in terahertz imaging," Appl. Phys. B 68, 1085-1094 (1999).
[CrossRef]

Z. Jiang, X.-C. Zhang, "2D measurement and spatio-temporal coupling of few-cycle THz pulses," Opt. Express 5, 243-248 (1999), http://www.opticsinfobase.org/abstract.cfm?URI=oe-5-11-243.
[CrossRef] [PubMed]

1997 (1)

1996 (2)

D. M. Mittleman, R. H. Jacobsen, and M. C. Nuss, "T-Ray Imaging," IEEE.J. Sel. Top. Quant. 2, 679-692 (1996).
[CrossRef]

Q. Wu, T. D. Hewitt, and X.-C. Zhang, "Two-dimensional electro-optic imaging of THz beams," Appl. Phys. Lett. 69, 1026-1028 (1996).
[CrossRef]

1990 (1)

M. Exter and D. Grischkowsky, "Optical and electric properties of doped silicon from 0.1 to 2 THz," Appl. Phys. Lett. 56, 1694-1696 (1990).
[CrossRef]

Appl. Optics (1)

Z. Jiang, X. G. Xu, and X.-C. Zhang, "Improvement of terahertz imaging with a dynamic subtraction technique," Appl. Optics 39, 2982-2987 (2000).
[CrossRef]

Appl. Phys. B (1)

D. M. Mittleman, M. Gupta, R. Neelamani, R. G. Baraniuk, J. V. Rudd, and M. Koch, "Recent advances in terahertz imaging," Appl. Phys. B 68, 1085-1094 (1999).
[CrossRef]

Appl. Phys. Lett. (2)

Q. Wu, T. D. Hewitt, and X.-C. Zhang, "Two-dimensional electro-optic imaging of THz beams," Appl. Phys. Lett. 69, 1026-1028 (1996).
[CrossRef]

M. Exter and D. Grischkowsky, "Optical and electric properties of doped silicon from 0.1 to 2 THz," Appl. Phys. Lett. 56, 1694-1696 (1990).
[CrossRef]

IEEE. Sens. J. (1)

H. Zhong, J. Xu, X. Xie, T. Yuan, R. Reightler, E. Madaras, and X.-C. Zhang, "Nondestructive Defect Identification With Terahertz Time-of-Flight Tomography," IEEE. Sens. J. 5, 203-208 (2005).
[CrossRef]

J. Sel. Top. Quant. (1)

D. M. Mittleman, R. H. Jacobsen, and M. C. Nuss, "T-Ray Imaging," IEEE.J. Sel. Top. Quant. 2, 679-692 (1996).
[CrossRef]

Opt. Commun. (1)

J. Nishizawa, T. Sasaki, K. Suto, T. Yamada, T. Tanabe, T. Tanno, T. Sawai, and Y. Miura, "THz imaging of nucleobases and cancerous tissue using a GaP THz-wave generator," Opt. Commun. 244, 469-474 (2005).
[CrossRef]

Opt. Express (5)

Opt. Lett. (4)

Other (2)

Y. Chen, H.-B. Liu, M. J. Fitch, R. Osiander, J. B. Spicer, M. Shur, X.-C. Zhang, "THz Diffuse Reflectance Spectra of Selected Explosives and Related Compounds," in Terahertz for Military and Security Applications III, R. J. Hwu, D. L. Woolard, M. J. Rosker, eds, Proc. SPIE 5790, 19-24 (2005).
[CrossRef]

M. Usami, M. Yamashita, K Fukushima, C. Otani, and K. Kawase, "Terahertz wideband spectroscopic imaging based on two-dimensional electro-optic sampling technique," Appl. Phys. Lett.  86, 141109 1-3 (2005).
[CrossRef]

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Figures (6)

Fig. 1.
Fig. 1.

Schematic layout of the THz pulse reflective focus-plane imaging system.

Fig. 2.
Fig. 2.

Sketch map of the sample. A metallic cross hidden by a 0.4mm thick high resistivity Si wafer.

Fig. 3.
Fig. 3.

Reflective index of Si wafer measured by transmission THz-TDS in nitrogen purged cell.

Fig. 4.
Fig. 4.

Time domain signal of (a) reference THz pulse (averaged over all pixels), (b) reflected pulse from the cross and (c) reflected pulse from the metallic mirror.

Fig. 5.
Fig. 5.

2D transverse distribution images of (a) the Si wafer front surface, (b) the cross, and (c) the metallic mirror.

Fig. 6.
Fig. 6.

Spatial-temporal distribution of reflected THz pulses from the sample.

Tables (1)

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Table 1. Calculation result of the thickness of each layer.

Equations (2)

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d = Δ t × c 2 n
A ( ω ) = A 0 ( ω ) exp ( τ ) exp ( ω 2 σ τ 2 2 )

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