Abstract

Self-organized nanostructures that provide antireflection properties grow on PMMA caused by plasma ion etching. A new procedure uses a thin initial layer prior to the etching step. Different types of antireflective structures can now be produced in a shorter time and with fewer limitations on the type of polymer that can be used. The durability of the structured surfaces can be improved by the deposition of additional thin films.

© 2007 Optical Society of America

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  1. U. Schulz, "Review of modern techniques to generate antireflective properties on thermoplastic polymers," Appl. Opt. 45, 1608-1618 (2006).
    [CrossRef]
  2. Bäumer, S.  (ed.) Handbook of Plastic Optics (Wiley-VCH, Frankfurt, 2005).
  3. P.B. Clapham, M.C. Hutley, "Reduction of lens reflection by the "moth eye" principle," Nature 244, 281-282 (1973).
    [CrossRef]
  4. T. Sawitowski, N. Beyer, F. Schulz, "Bio-inspired anti-reflective surfaces by imprinting processes," in: The Nano-Micro Interface, H.J. Fecht, M. Werner, eds. (Wiley-VCH, Weinheim, 2004).
  5. Munzert, P. , Uhlig, H. , Scheler, M. , Schulz, U. , Kaiser, N.  Method for reducing boundary surface reflection of plastic substrates and substrate modified in such manner and use thereof. WIPO PCT publication WO04024805C1, 13 May 2004.
  6. A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
    [CrossRef]
  7. S. Rousset et al., "Self organized epitaxial growth on spontaneous nanopatterned templates," C.R. Phys. 6, 33-46 (2005).
  8. R.M. Bradley, J.M. Harper, "Theory of ripple topography induced by ion bombardment," J. Vac. Sci. Technol. A 6, 2390-2395 (1988).
    [CrossRef]
  9. M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
    [CrossRef]
  10. S. Pongratz, A. Zöller, "Plasma ion assisted deposition: A promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
    [CrossRef]
  11. A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
    [CrossRef]
  12. A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
    [CrossRef]
  13. Y. Kanamori, K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
    [CrossRef]

2006 (1)

2005 (2)

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

S. Rousset et al., "Self organized epitaxial growth on spontaneous nanopatterned templates," C.R. Phys. 6, 33-46 (2005).

2003 (1)

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

2002 (1)

Y. Kanamori, K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
[CrossRef]

1999 (1)

A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
[CrossRef]

1996 (1)

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

1992 (1)

S. Pongratz, A. Zöller, "Plasma ion assisted deposition: A promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
[CrossRef]

1988 (1)

R.M. Bradley, J.M. Harper, "Theory of ripple topography induced by ion bombardment," J. Vac. Sci. Technol. A 6, 2390-2395 (1988).
[CrossRef]

1973 (1)

P.B. Clapham, M.C. Hutley, "Reduction of lens reflection by the "moth eye" principle," Nature 244, 281-282 (1973).
[CrossRef]

Behnisch, J.

A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
[CrossRef]

Bradley, R.M.

R.M. Bradley, J.M. Harper, "Theory of ripple topography induced by ion bombardment," J. Vac. Sci. Technol. A 6, 2390-2395 (1988).
[CrossRef]

Clapham, P.B.

P.B. Clapham, M.C. Hutley, "Reduction of lens reflection by the "moth eye" principle," Nature 244, 281-282 (1973).
[CrossRef]

Coen, M.C.

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

Compagnini, G.

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Foti, G.

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Fragala, M.E.

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Groening, P.

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

Hane, K.

Y. Kanamori, K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
[CrossRef]

Harper, J.M.

R.M. Bradley, J.M. Harper, "Theory of ripple topography induced by ion bombardment," J. Vac. Sci. Technol. A 6, 2390-2395 (1988).
[CrossRef]

Holländer, A.

A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
[CrossRef]

Hutley, M.C.

P.B. Clapham, M.C. Hutley, "Reduction of lens reflection by the "moth eye" principle," Nature 244, 281-282 (1973).
[CrossRef]

Kaiser, N.

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

Kaless, A.

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

Kanamori, Y.

Y. Kanamori, K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
[CrossRef]

Lehmann, R.

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

Licciardello, A.

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Munzert, P.

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

Pongratz, S.

S. Pongratz, A. Zöller, "Plasma ion assisted deposition: A promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
[CrossRef]

Puglisi, O.

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Rousset, S.

S. Rousset et al., "Self organized epitaxial growth on spontaneous nanopatterned templates," C.R. Phys. 6, 33-46 (2005).

Schlapbach, L.

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

Schulz, U.

U. Schulz, "Review of modern techniques to generate antireflective properties on thermoplastic polymers," Appl. Opt. 45, 1608-1618 (2006).
[CrossRef]

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

Wilken, R.

A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
[CrossRef]

Zöller, A.

S. Pongratz, A. Zöller, "Plasma ion assisted deposition: A promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
[CrossRef]

Appl. Opt. (1)

Appl. Surf. Sci. (1)

M.C. Coen, R. Lehmann, P. Groening, L. Schlapbach, "Modification of the micro- and nanotopography of several polymers by plasma treatments," Appl. Surf. Sci. 207, 276-286 (2003).
[CrossRef]

C.R. Phys. (1)

S. Rousset et al., "Self organized epitaxial growth on spontaneous nanopatterned templates," C.R. Phys. 6, 33-46 (2005).

J. Vac. Sci. Technol. A (2)

R.M. Bradley, J.M. Harper, "Theory of ripple topography induced by ion bombardment," J. Vac. Sci. Technol. A 6, 2390-2395 (1988).
[CrossRef]

S. Pongratz, A. Zöller, "Plasma ion assisted deposition: A promising technique for optical coatings," J. Vac. Sci. Technol. A 10, 1897-1904 (1992).
[CrossRef]

Nature (1)

P.B. Clapham, M.C. Hutley, "Reduction of lens reflection by the "moth eye" principle," Nature 244, 281-282 (1973).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. B (1)

A. Licciardello, M.E. Fragala, G. Foti, G. Compagnini, O. Puglisi, "Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate," Nucl. Instrum. Methods Phys. Res. B 116, 168-172 (1996).
[CrossRef]

Opt. Rev. (1)

Y. Kanamori, K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
[CrossRef]

Surf. Coat. Technol. (2)

A. Holländer, R. Wilken, J. Behnisch, "Subsurface chemistry in the plasma treatment of polymers," Surf. Coat. Technol. 116-119, 788-791 (1999).
[CrossRef]

A. Kaless, U. Schulz, P. Munzert, N. Kaiser, "NANO-motheye antireflection pattern by plasma treatment of polymers," Surf. Coat. Technol. 200, 58-61 (2005).
[CrossRef]

Other (3)

Bäumer, S.  (ed.) Handbook of Plastic Optics (Wiley-VCH, Frankfurt, 2005).

T. Sawitowski, N. Beyer, F. Schulz, "Bio-inspired anti-reflective surfaces by imprinting processes," in: The Nano-Micro Interface, H.J. Fecht, M. Werner, eds. (Wiley-VCH, Weinheim, 2004).

Munzert, P. , Uhlig, H. , Scheler, M. , Schulz, U. , Kaiser, N.  Method for reducing boundary surface reflection of plastic substrates and substrate modified in such manner and use thereof. WIPO PCT publication WO04024805C1, 13 May 2004.

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