Abstract

This paper reports a novel and effective method to fabricate microlens arrays on polycarbonate films by hybrid extrusion rolling embossing. The metallic cylinder mold bearing an array of micro-holes is fabricated using photolithography with dry film resist. During the extrusion rolling embossing process, the extruded PC film is immediately pressed against the surface of the roller mold. Under the influence of the rolling pressure and surface tension, an array of convex microlenses is formed. The uniformity and optical properties have been verified. An efficient continuous mass production technique has been demonstrated.

© 2007 Optical Society of America

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    [CrossRef]
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    [CrossRef]
  10. N. S. Ong, Y. H. Koh and Y. Q. Fu, "Microlens array produced using hot embossing process," Microelectron. Eng. 60, 365-379 (2002).
    [CrossRef]
  11. S.-M. Kim and S. Kang, "Replication qualities and optical properties of UV-moulded microlens arrays," J. Phys. D: Appl. Phys. 36, 2451-2456 (2003).
    [CrossRef]
  12. C. Y. Chang, S.Y. Yang, and J. L. Sheh, "A roller embossing process for rapid fabrication of microlens arrays on glass substrates," Microsyst. Technol. 12, 754-759 (2006).
    [CrossRef]

2007

2006

2004

2003

S.-M. Kim and S. Kang, "Replication qualities and optical properties of UV-moulded microlens arrays," J. Phys. D: Appl. Phys. 36, 2451-2456 (2003).
[CrossRef]

W. X. Yu, and X. -C. Yuan, "UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask," Opt. Express 11, 2253-2258 (2003).

2002

1990

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, "The manufacture of microlenses by melting photoresist," Meas. Sci. Technol. 1, 759-766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[CrossRef]

J. Phys. D: Appl. Phys.

S.-M. Kim and S. Kang, "Replication qualities and optical properties of UV-moulded microlens arrays," J. Phys. D: Appl. Phys. 36, 2451-2456 (2003).
[CrossRef]

Meas. Sci. Technol.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, "The manufacture of microlenses by melting photoresist," Meas. Sci. Technol. 1, 759-766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[CrossRef]

Microelectron. Eng.

N. S. Ong, Y. H. Koh and Y. Q. Fu, "Microlens array produced using hot embossing process," Microelectron. Eng. 60, 365-379 (2002).
[CrossRef]

Microsyst. Technol.

C. Y. Chang, S.Y. Yang, and J. L. Sheh, "A roller embossing process for rapid fabrication of microlens arrays on glass substrates," Microsyst. Technol. 12, 754-759 (2006).
[CrossRef]

Microsystem Technologies

B.K. Lee, D.S. Kim and T.H. Kwon, "Replication of microlens arrays by injection molding, Microsystem Technologies,"  10, 531-535 (2004).
[CrossRef]

Opt. Express

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