Abstract

Abstract

We present an analytical model to quantify losses in resonators and bends without uncertain contributions from fiber coupling in/out or waveguide cleavage facets. With resonators in add-drop configuration, intrinsic losses are calculated from the free spectral range, through-port extinction and drop-port bandwidth. We fabricated and characterized silicon-on-insulator resonator for loss analysis. At 1.55 µm, racetrack resonators with a bending radius of 4.5 µm show intrinsic losses as small as 0.14±0.014 dB/round-trip. Meanwhile, intrinsic losses increase up to 1.23 dB/round-trip in the racetrack resonator that has a bending radius of 2.25 µm. Losses in a 180o bend are estimated as a half of the intrinsic losses in these racetrack resonators, i.e., 0.07±0.007 dB/turn for a bending radius of 4.5 µm and 0.62 dB/turn for a bending radius of 2.25 µm. Loss in a 90° bend with a radius of 4.5 µm is determined to be 0.06±0.006 dB/turn at 1.55 µm. The losses in 180° or 90° bends are found to be mainly due to the transition loss between waveguide bends and straight waveguides.

© 2007 Optical Society of America

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  1. K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
    [CrossRef]
  2. K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890, (2001).
    [CrossRef]
  3. Y. Vlasov and S. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004).
    [CrossRef] [PubMed]
  4. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
    [CrossRef]
  5. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
    [CrossRef] [PubMed]
  6. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431-9435 (2006).
    [CrossRef] [PubMed]
  7. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
    [CrossRef]
  8. M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Multistage high-order microring-resonator add-drop filters," Opt. Lett. 31, 2571-2573 (2006).
    [CrossRef] [PubMed]
  9. S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.
  10. A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
    [CrossRef]
  11. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
    [CrossRef]
  12. V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
    [CrossRef]
  13. R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
    [CrossRef]
  14. D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
    [CrossRef]
  15. S. Zhen, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride: rib waveguide dimension dependence," IEEE J. Sel. Top. Quantum Electron. 12, 1380-1387, (2006).
    [CrossRef]
  16. B. E. Little,  et al, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
    [CrossRef]

2006 (3)

2005 (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

2004 (3)

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Y. Vlasov and S. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004).
[CrossRef] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

2003 (1)

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

2002 (1)

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

2001 (2)

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890, (2001).
[CrossRef]

2000 (1)

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

1998 (2)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

1997 (1)

B. E. Little,  et al, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Absil, P. P.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

Agarwal, A.

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Barwicz, T.

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bolivar, P. H.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Calhoun, L. C.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

Campenhout, J. V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Chen, H.

S. Zhen, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride: rib waveguide dimension dependence," IEEE J. Sel. Top. Quantum Electron. 12, 1380-1387, (2006).
[CrossRef]

Chu, S. T.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Foresi, J.

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Grover, R.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

Haus, H. A.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Henschel, W.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Ho, P. -T.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

Ho, S. T.

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

Hryniewicz, J. V.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

Ibrahim, T. A.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

Ippen, E. P.

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Multistage high-order microring-resonator add-drop filters," Opt. Lett. 31, 2571-2573 (2006).
[CrossRef] [PubMed]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Johnson, F. G.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

Kärtner, F. X.

Khan, M. H.

S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.

Kimerling, L. C.

K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890, (2001).
[CrossRef]

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Kurz, H.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Lee, K. K.

K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890, (2001).
[CrossRef]

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

Lim, D. R.

K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890, (2001).
[CrossRef]

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

Lipson, M.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431-9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

Little, B. E.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

B. E. Little,  et al, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Luan, H.C.

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

McNab, S.

Mönster, M.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Niehusmann, J.

Poon, A. W.

S. Zhen, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride: rib waveguide dimension dependence," IEEE J. Sel. Top. Quantum Electron. 12, 1380-1387, (2006).
[CrossRef]

Popovíc, M. A.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

Qi, M.

S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.

Rafizadeh, D.

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

Rakich, P. T.

Schmidt, B.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431-9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

Shakya, J.

Shen, S.

S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.

Smith, H. I.

Socci, L.

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Thoen, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Thourhout, D. V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Tiberio, R. C.

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

Van, V.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

Vlasov, Y.

Vörckel, A.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Wahlbrink, T.

Watts, M. R.

Wiaux, V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Wouters, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Xiao, S.

S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.

Xu, Q.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431-9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

Zhang, J. P.

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

Zhen, S.

S. Zhen, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride: rib waveguide dimension dependence," IEEE J. Sel. Top. Quantum Electron. 12, 1380-1387, (2006).
[CrossRef]

Appl. Phys. Lett. (1)

K. K. Lee, D. R. Lim, H.C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617 (2000).
[CrossRef]

IEEE J. Lightwave Technol. (5)

V. Van, P. P. Absil, J. V. Hryniewicz and P. -T. Ho, "Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model," IEEE J. Lightwave Technol. 19, 1734-1739, (2001).
[CrossRef]

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P. -T. Ho, "Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters," IEEE J. Lightwave Technol. 20, 900-905, (2002).
[CrossRef]

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, "Propagation loss measurements in semiconductor microcavity ring and disk resonators," IEEE J. Lightwave Technol. 16, 1308-1314, (1998).
[CrossRef]

S. Xiao, M. H. Khan, S. Shen and M. Qi, "Silicon-on-insulator microring add-drop filters with free spectral ranges over 30 nm," submitted, IEEE J. Lightwave Technol.

B. E. Little,  et al, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

S. Zhen, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride: rib waveguide dimension dependence," IEEE J. Sel. Top. Quantum Electron. 12, 1380-1387, (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef] [PubMed]

Opt. Express (2)

Opt. Lett. (3)

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Figures (4)

Fig. 1.
Fig. 1.

Theoretical model (a) and schematic power responses (b) of a micro-resonator

Fig. 2.
Fig. 2.

Generalized racetrack resonator for the estimation of losses in 180° and 90° bends. For an accurate estimation, L≪πR should hold.

Fig. 3.
Fig. 3.

(a)–(b). Scanning electron micrographs of two fabricated add-drop micro-resonator.

Fig. 4.
Fig. 4.

Comparison of theoretical (red and green lines) and measured (blue and black dots) responses of resonators at two wavelengths.

Tables (2)

Tables Icon

Table 1 Loss parameters for the large micro-resonator shown in Fig. 3(a)

Tables Icon

Table.2 Loss parameters for the small micro-resonator shown in Fig. 3(b)

Equations (8)

Equations on this page are rendered with MathJax. Learn more.

T through = ( λ λ o ) 2 + ( FSR 4 π ) 2 ( κ d 2 + κ p 2 κ e 2 ) 2 ( λ λ o ) 2 + ( FSR 4 π ) 2 ( κ d 2 + κ p 2 + κ e 2 ) 2
T drop = 4 × ( FSR 4 π ) 2 ( κ d 2 × κ e 2 ) ( λ λ o ) 2 + ( FSR 4 π ) 2 ( κ d 2 + κ p 2 + κ e 2 ) 2
( FSR 2 π ) × ( κ e 2 + κ d 2 + κ p 2 ) = δ λ d
T through = ( λ λ o ) 2 + ( FSR 4 π ) 2 ( κ p 2 ) 2 ( λ λ o ) 2 + ( δ λ d 2 ) 2
κ p 2 = 2 π × δ λ d γ t FSR
κ e 2 = κ d 2 = π × δ λ d ( 1 γ t ) FSR
Δ ( κ p 2 ) κ p 2 = Δ ( δ λ d ) δ λ d + Δ ( γ t 1 2 ) γ t 1 2 Δ ( FSR ) FSR Δ ( δ λ d ) δ λ d + Δ ( γ t 1 2 ) γ t 1 2 + Δ ( FSR ) FSR
Δ Q i Q i = Δ ( δ λ d ) δ λ d + Δ ( γ t 1 2 ) γ t 1 2 Δ ( δ λ d ) δ λ d + Δ ( γ t 1 2 ) γ t 1 2

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