Abstract

– We demonstrate predictable resonance wavelength shifts in silicon micro-resonators by varying their perimeters using high-resolution lithography. The linear coefficient between the resonance wavelength shifts and the perimeter changes is determined with detailed experiments, and found to be nearly constant across the C and L bands in telecommunications. This empirical coefficient is also compared to that obtained from simulations on straight waveguides. Based on the linear model, without post-fabrication trimming or tuning, an eight-channel wavelength de-multiplexer with reasonably predicted average channel spacing ~ 1.8±0.1 nm (3dB bandwidth ~ 0.7±0.1 nm) is demonstrated at telecommunication bands in a silicon chip for the first time. This filter has out-of-band rejection ratio ~ 40 dB, low channel crosstalk ≤ 30 dB and low channel dropping loss ≤ 4±1 dB except for degraded performance in one channel due to fabrication imperfections.

© 2007 Optical Society of America

Full Article  |  PDF Article

Corrections

Shijun Xiao, Maroof H. Khan, Hao Shen, and Minghao Qi, "Multiple-channel silicon micro-resonator based filters for WDM applications: erratum," Opt. Express 15, 9386-9386 (2007)
https://www.osapublishing.org/oe/abstract.cfm?uri=oe-15-15-9386

References

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  1. T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
    [CrossRef]
  2. M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
    [CrossRef] [PubMed]
  3. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometer-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
    [CrossRef] [PubMed]
  4. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
    [CrossRef]
  5. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
    [CrossRef]
  6. A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
    [CrossRef]
  7. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
    [CrossRef]
  8. S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.
  9. S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
    [CrossRef]
  10. C. W. Holzwarth, et al. “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” IEEE J. Vac. Sci. Technol. B 24, 3244–3247 (2006).
    [CrossRef]
  11. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14, 9431–9435 (2006).
    [CrossRef] [PubMed]
  12. Eric Dulkeith, Fengnian Xia, Laurent Schares, William M. J. Green, and Yurii A. Vlasov, “Group index and group velocity dispersion in silicon-on-insulator photonic wires,” Opt. Express 14, 3853–3863 (2006)
    [CrossRef] [PubMed]
  13. A. C. Turner, C. Manolatou, B. S. Schmidt, M. Lipson, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006)
    [CrossRef] [PubMed]
  14. M. A. Foster, et al, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
    [CrossRef] [PubMed]
  15. Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12, 1622–1631 (2004).
    [CrossRef] [PubMed]
  16. B. E. Little, et al, “Very high-order microring resonator filters for WDM applications,” IEEE Photon. Technol. Lett. 16, 2263–2265 (2004).
    [CrossRef]
  17. M. S. Rasras, et al, “Tunable narrowband optical filter in CMOS,” OFC 2006, PDP 13.

2006 (9)

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
[CrossRef]

C. W. Holzwarth, et al. “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” IEEE J. Vac. Sci. Technol. B 24, 3244–3247 (2006).
[CrossRef]

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14, 9431–9435 (2006).
[CrossRef] [PubMed]

Eric Dulkeith, Fengnian Xia, Laurent Schares, William M. J. Green, and Yurii A. Vlasov, “Group index and group velocity dispersion in silicon-on-insulator photonic wires,” Opt. Express 14, 3853–3863 (2006)
[CrossRef] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, M. Lipson, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006)
[CrossRef] [PubMed]

M. A. Foster, et al, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[CrossRef] [PubMed]

M. S. Rasras, et al, “Tunable narrowband optical filter in CMOS,” OFC 2006, PDP 13.

2005 (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometer-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[CrossRef] [PubMed]

2004 (3)

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12, 1622–1631 (2004).
[CrossRef] [PubMed]

B. E. Little, et al, “Very high-order microring resonator filters for WDM applications,” IEEE Photon. Technol. Lett. 16, 2263–2265 (2004).
[CrossRef]

2003 (1)

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

1999 (1)

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

1998 (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Barwicz, T.

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Bolivar, P. H.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

Campenhout, J. V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Chu, S. T.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Dulkeith, Eric

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Foster, M. A.

Gaeta, A. L.

Green, William M. J.

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Haus, H. A.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Henschel, W.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

Holzwarth, C. W.

C. W. Holzwarth, et al. “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” IEEE J. Vac. Sci. Technol. B 24, 3244–3247 (2006).
[CrossRef]

Ippen, E. P.

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Kaneko, T.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

Kärtner, F. X.

Khan, M. H.

S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.

Kimerling, L. C.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Kokubun, Y.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

Kurz, H.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

Lipson, M.

Little, B. E.

B. E. Little, et al, “Very high-order microring resonator filters for WDM applications,” IEEE Photon. Technol. Lett. 16, 2263–2265 (2004).
[CrossRef]

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Liu, T.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
[CrossRef]

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Manolatou, C.

McNab, S.

Mönster, M.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

Nawrocka, M. S.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
[CrossRef]

Pan, W.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

Panepucci, R. R.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
[CrossRef]

Popovic, M. A.

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

Popovíc, M. A.

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometer-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[CrossRef] [PubMed]

Qi, M.

S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.

Rakich, P. T.

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

Rasras, M. S.

M. S. Rasras, et al, “Tunable narrowband optical filter in CMOS,” OFC 2006, PDP 13.

Sato, S.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett. 11, 691–693 (1999).
[CrossRef]

Schares, Laurent

Schmidt, B.

Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14, 9431–9435 (2006).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometer-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[CrossRef] [PubMed]

Schmidt, B. S.

Shakya, J.

Sharping, J. E.

Shen, S.

S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.

Smith, H. I.

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

Socci, L.

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Thoen, E. R

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[CrossRef]

Thourhout, D. V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
[CrossRef]

Turner, A. C.

Vlasov, Y.

Vlasov, Yurii A.

Vörckel, A.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, “Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers,” IEEE Photon. Technol. Lett. 15, 921–923 (2003).
[CrossRef]

Wang, X.

M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89, 071110 (2006).
[CrossRef]

Watts, M. R.

M. A. Popovíc, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, “Multistage high-order microring-resonator add-drop filters,” Opt. Lett. 31, 2571–2573 (2006).
[CrossRef] [PubMed]

T. Barwicz, M. A. Popović, M. R. Watts, P. T. Rakich, E. P. Ippen, and H. I. Smith, “Fabrication of add-drop filters based on frequency-matched Microring Resonators,” IEEE J. Lightwave Technol. 24, 2207–2218 (2006).
[CrossRef]

Wiaux, V.

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Wouters, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, “Low loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328–1330 (2004).
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S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.

Xu, Q.

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C. W. Holzwarth, et al. “Accurate resonant frequency spacing of microring filters without postfabrication trimming,” IEEE J. Vac. Sci. Technol. B 24, 3244–3247 (2006).
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B. E. Little, et al, “Very high-order microring resonator filters for WDM applications,” IEEE Photon. Technol. Lett. 16, 2263–2265 (2004).
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Opt. Express (4)

Opt. Lett. (1)

Other (2)

S. Xiao, M. H. Khan, S. Shen, and M. Qi, “Fabrication and characterization of silicon-on-insulator micro-resonators and add-drop filters with free spectral range over 30 nm,” submitted, IEEE J. Lightwave Technol.

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Figures (7)

Fig. 1.
Fig. 1.

Theoretical model of changing the resonator’s perimeter to shift its resonating wavelength.

Fig. 2.
Fig. 2.

Scanning-electron-micrograph image of one fabricated micro-resonator channel dropping filter.

Fig. 3.
Fig. 3.

Measured through-port response (dotted red) and one drop-port’s response (solid blue) of a two-channel dropping filter. The drop-port response is normalized to the through-port response. (b) is a zoom-in view of (a). In (b), the two resonances are seen for wavelengths ~ 1538.5 and 1543.5 nm respectively.

Fig. 4.
Fig. 4.

Resonance wavelength shift vs. perimeter change. (a) is for reference resonance wavelength λo~1542 nm, and (b) is for reference resonance wavelength shift λo~1558 nm. In each plot, a linear fitting is plotted with the experimental data, and the simulated data with Eqs. (4)–(5) is also plotted for comparison.

Fig. 5.
Fig. 5.

An optical image of fabricated eight-channel wavelength de-multiplexer

Figs. 6. (a). - 6. (b).
Figs. 6. (a). - 6. (b).

Superimposed responses of the through-port (black) and eight drop-ports (red and blue) of the eight- channel dropping filters shown in fig. 5. The horizontal arrowed line indicates a response period around 16 nm. Within one free spectral range, lower channel numbers correspond to shorter channel center wavelengths.

Fig. 6(a)-(b).
Fig. 6(a)-(b).

Superimposed responses of the through-port (black) and eight drop-ports (red and blue) of the eight- channel dropping filters shown in Fig. 5. The horizontal arrowed line indicates a response period around 16 nm. Within one free spectral range, lower channel numbers correspond to shorter channel center wavelengths.

Tables (1)

Tables Icon

Table 1 Typical channel parameters for the eight dropping channels around ~ 1550 nm.

Equations (6)

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m λ o = 2 πR n b + 2 L n s
m ( λ o + Δ λ ) = 2 πR ( n b + Δ n b ) + 2 ( n s + Δ n s ) ( L + Δ L )
Δ λ = ( 2 n s 2 πR n b + 2 L n s Δ L ) ( 1 λ o 2 πR d n b + 2 L d n s 2 πR n b + 2 L n s λ o 2 d n s 2 πR n b + 2 L n s Δ L )
Δ λ = ( 2 n s 2 πR n b + 2 L n s Δ L ) ( 1 λ o 2 πR d n b + 2 L d n s 2 πR n b + 2 L n s )
Δ λ = ( λ o Δ P P ) ( 1 λ o n e × d n e d λ )
Δ λ i = ( λ i Δ P P ) ( 1 λ i n e ( i ) × n e ( i + 1 ) n e ( i ) λ i + 1 λ i )

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