Abstract

We describe techniques that enable fabrication of a new class of photonic devices based on free UH-Q microresonators. Preliminary results show that free silica microtoroids with Qs above 30 million can be fabricated and transferred to different platforms for integration with a variety of photonic devices.

© 2007 Optical Society of America

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  1. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
    [CrossRef]
  2. B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
    [CrossRef]
  3. T. Barwicz, M. A. Popovic, P. T. Ralich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12,1437-1442 (2004).
    [CrossRef] [PubMed]
  4. M. A. Popovic, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kartner, and H. I. Smith, " Multistage high-order microring-resonator add-drop filters," Opt. Lett. 31, 2571-2573 (2006).
    [CrossRef] [PubMed]
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    [CrossRef]
  11. K. Djordjev, S. J. Choi, S. J. Choi, and P. D. Dapkus, " Active semiconductor microdisk devices," J. Lightwave Technol. 20, 105-113 (2002).
    [CrossRef]
  12. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity" Phys. Rev. Lett. 93, 083904 (2004).
    [CrossRef] [PubMed]
  13. A. McAulay, "Nonlinear microring resonators forge all-optical switch," Laser Focus World 41, 127-130 (2005).
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  16. A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
    [CrossRef]
  17. B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
    [CrossRef]
  18. T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
    [CrossRef]
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    [CrossRef] [PubMed]
  20. H. Rokhsari, and K. J. Vahala, "Ultralow loss, high-Q, four port resonant couplers for quantum optics and photonics," Phys. Rev. Lett. 92, 253905 (2004)
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    [CrossRef]
  22. S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
    [CrossRef]
  23. T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
    [CrossRef] [PubMed]
  24. A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
    [CrossRef]
  25. A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
    [CrossRef]
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    [CrossRef] [PubMed]
  28. Microdroplets of different liquids can be generated using micropumps (for example Micro Diaphragm Liquid Pumps from Namiki precision jewel co., Japan.)
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    [CrossRef]
  30. P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
    [CrossRef]
  31. D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
    [CrossRef]
  32. A.A. Savchenkov, V.S. Ilchenko, T. handley and L. Maleki, "Second-order filter response with series-coupled silica microresonators" IEEE photon. Technol. Lett. 15, 543-544 (2003).
    [CrossRef]

2006 (8)

M. A. Popovic, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kartner, and H. I. Smith, " Multistage high-order microring-resonator add-drop filters," Opt. Lett. 31, 2571-2573 (2006).
[CrossRef] [PubMed]

J. K. S. Poon, L. Zhu, G. A. DeRose, and A. Yariv, "Transmission and group delay of microring coupled-resonator optical waveguides," Opt. Lett. 31, 456-458 (2006).
[CrossRef] [PubMed]

C. Chao, and L. J. Guo, "Design and optimization of microring resonators in biochemical sensing applications," J. Lightwave Technol. 24, 1395-1402 (2006).
[CrossRef]

A. M. Armani, and K. J. Vahala, "Heavy water detection using ultra-high-Q microcavities," Opt. Lett. 31, 1896-1898(2006).
[CrossRef] [PubMed]

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

2005 (4)

A. McAulay, "Nonlinear microring resonators forge all-optical switch," Laser Focus World 41, 127-130 (2005).

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

2004 (9)

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

T. Barwicz, M. A. Popovic, P. T. Ralich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12,1437-1442 (2004).
[CrossRef] [PubMed]

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity" Phys. Rev. Lett. 93, 083904 (2004).
[CrossRef] [PubMed]

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

H. Rokhsari, and K. J. Vahala, "Ultralow loss, high-Q, four port resonant couplers for quantum optics and photonics," Phys. Rev. Lett. 92, 253905 (2004)
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip" Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

2003 (2)

A.A. Savchenkov, V.S. Ilchenko, T. handley and L. Maleki, "Second-order filter response with series-coupled silica microresonators" IEEE photon. Technol. Lett. 15, 543-544 (2003).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

2002 (2)

2000 (1)

M. Cai, O. Painter, and KerryJ. Vahala, "Observation of critical coupling in a fiber-taper to silica-microsphere Whispering-Gallery mode system," Phys. Rev. Lett. 85, 74-77 (2000).
[CrossRef] [PubMed]

1999 (2)

1998 (1)

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

1997 (1)

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Absil, P. P.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Aldrige, J. C.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Anthes-Washburn, M.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Aoki, T.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

Armani, A. M.

Armani, D. K.

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

Baehr-Jones, T.

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

Barclay, P. E.

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

Barwicz, T.

Bond, A. E.

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

Bowen, W. P.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

Brener, I.

Bruce, A. J.

Cai, M.

M. Cai, O. Painter, and KerryJ. Vahala, "Observation of critical coupling in a fiber-taper to silica-microsphere Whispering-Gallery mode system," Phys. Rev. Lett. 85, 74-77 (2000).
[CrossRef] [PubMed]

Capuzzo, M. A.

Chao, C.

Chbouki, N.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Choi, S. J.

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

K. Djordjev, S. J. Choi, S. J. Choi, and P. D. Dapkus, " Active semiconductor microdisk devices," J. Lightwave Technol. 20, 105-113 (2002).
[CrossRef]

K. Djordjev, S. J. Choi, S. J. Choi, and P. D. Dapkus, " Active semiconductor microdisk devices," J. Lightwave Technol. 20, 105-113 (2002).
[CrossRef]

Chu, S.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Chu, S. T.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Dalton, L. R.

Dapkus, P. D.

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

K. Djordjev, S. J. Choi, S. J. Choi, and P. D. Dapkus, " Active semiconductor microdisk devices," J. Lightwave Technol. 20, 105-113 (2002).
[CrossRef]

Dayan, B.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

DeRose, G. A.

Desai, T. A.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Djordjev, K.

Foresi, J.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Foresi, J. S.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Gill, D.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Goh, K. W.

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

Gomez, L. T.

Greene, W.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Guo, L. J.

Haus, H. A.

T. Barwicz, M. A. Popovic, P. T. Ralich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12,1437-1442 (2004).
[CrossRef] [PubMed]

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Hochberg, M.

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

Hryniewicz, J.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Hryniewicz, J. V.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Ilchenko, V. S.

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

Ilchenko, V.S.

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
[CrossRef]

A.A. Savchenkov, V.S. Ilchenko, T. handley and L. Maleki, "Second-order filter response with series-coupled silica microresonators" IEEE photon. Technol. Lett. 15, 543-544 (2003).
[CrossRef]

Ippen, E. P.

Johnson, F. G.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Kalkman, J.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

Kartner, F. X.

Kerry, O.

M. Cai, O. Painter, and KerryJ. Vahala, "Observation of critical coupling in a fiber-taper to silica-microsphere Whispering-Gallery mode system," Phys. Rev. Lett. 85, 74-77 (2000).
[CrossRef] [PubMed]

Kimble, H. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

Kimerling, C. L.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

King, O.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Kippenberg, T. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip" Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity" Phys. Rev. Lett. 93, 083904 (2004).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

Laine, J.-P.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Le, T.

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

Lenz, G.

Lev, B.

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

Little, B.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Little, B. E.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Mabuchi, H.

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

Madsen, C. K.

Maleki, L.

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
[CrossRef]

Martin, A. L.

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

Matsko, A. B.

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

Matsko, A.B.

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
[CrossRef]

McAulay, A.

A. McAulay, "Nonlinear microring resonators forge all-optical switch," Laser Focus World 41, 127-130 (2005).

Min, B.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

Min, B. K.

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

Nielsen, T. N.

Painter, O.

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

M. Cai, O. Painter, and KerryJ. Vahala, "Observation of critical coupling in a fiber-taper to silica-microsphere Whispering-Gallery mode system," Phys. Rev. Lett. 85, 74-77 (2000).
[CrossRef] [PubMed]

Parkins, A. S.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

Polman, A.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

Poon, J. K. S.

Popat, KC.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Popovic, M. A.

Rabiei, P.

Rakich, P. T.

Ralich, P. T.

Rokhsari, H.

H. Rokhsari, and K. J. Vahala, "Ultralow loss, high-Q, four port resonant couplers for quantum optics and photonics," Phys. Rev. Lett. 92, 253905 (2004)
[CrossRef] [PubMed]

Sadagopan, T.

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

Savchenkov, A. A.

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

Savchenkov, A.A.

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
[CrossRef]

A.A. Savchenkov, V.S. Ilchenko, T. handley and L. Maleki, "Second-order filter response with series-coupled silica microresonators" IEEE photon. Technol. Lett. 15, 543-544 (2003).
[CrossRef]

Scherer, A.

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

Seiferth, F.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Smith, H. I.

Socci, L.

Spillane, S. M.

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip" Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity" Phys. Rev. Lett. 93, 083904 (2004).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

Srinivasan, K.

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

Steier, W. H.

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, "Polymer micro-ring filters and modulators," J. Lightwave Technol. 20, 1968-1975 (2002).
[CrossRef]

Steinmeyer, G.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Tazawa, H.

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

Thoen, E. R.

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Trakalo, M.

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Unlu, M. S.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Vahala, K. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

A. M. Armani, and K. J. Vahala, "Heavy water detection using ultra-high-Q microcavities," Opt. Lett. 31, 1896-1898(2006).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip" Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

H. Rokhsari, and K. J. Vahala, "Ultralow loss, high-Q, four port resonant couplers for quantum optics and photonics," Phys. Rev. Lett. 92, 253905 (2004)
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity" Phys. Rev. Lett. 93, 083904 (2004).
[CrossRef] [PubMed]

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

Van, V.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

Watts, M. R.

Wilcut, E.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

Yalcin, A.

A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Yariv, A.

Zhang, C.

Zhu, L.

Appl. Phys. Lett. (5)

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg and K. J. Vahala "Ultra-low-threshold erbium-implanted toroidal microlaser on silicon" Appl. Phys. Lett. 84, 1037-1039 (2004).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85, 3346-3347 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip" Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

P. E. Barclay, K. Srinivasan, B. Lev, H. Mabuchi, and O. Painter "Integration of fiber-coupled high-Q SiNx microdisks with atom chips," Appl. Phys. Lett. 89, 131108 (2006).
[CrossRef]

D. K. Armani, B. K. Min, A. L. Martin, and K. J. Vahala "Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators," Appl. Phys. Lett. 85, 5439-5441 (2004).
[CrossRef]

IEEE Photon. Tech. Lett (1)

T. Le, A.A. Savchenkov, H. Tazawa, W. H. Steier, and L. Maleki, "Polymer optical waveguide vertically coupled to high-Q Whispering-Gallery resonators" IEEE Photon. Tech. Lett,  18, 859-861 (2006).
[CrossRef]

IEEE photon. Technol. Lett. (3)

A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, "Higher-order filters based on chain coupled crystalline Whispering-Gallery mode resonators," IEEE photon. Technol. Lett. 17,136-138 (2005).
[CrossRef]

A.A. Savchenkov, V.S. Ilchenko, T. handley and L. Maleki, "Second-order filter response with series-coupled silica microresonators" IEEE photon. Technol. Lett. 15, 543-544 (2003).
[CrossRef]

B. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, C. L. Kimerling, W. Greene, " Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
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B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very high-order microring resonator filters for WDM applications," IEEE photon. Technol. Lett. 16, 2263-2265 (2004).
[CrossRef]

T. Sadagopan, S. J. Choi, S. J. Choi, and P. D. Dapkus, A. E. Bond "Optical modulators based on depletion width translation in semiconductor microdisk resonator," IEEE Photon. Technol. Lett. 17, 567-569 (2005).
[CrossRef]

J. Lightwave Technol. (5)

Laser Focus World (1)

A. McAulay, "Nonlinear microring resonators forge all-optical switch," Laser Focus World 41, 127-130 (2005).

Nature (2)

D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421, 925-929 (2003).
[CrossRef] [PubMed]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, "Observation of strong coupling between one atom and a monolithic microresonator," Nature 443, 671-674 (2006).
[CrossRef] [PubMed]

Opt. Express (1)

Opt. Lett. (4)

Phys. Rev A. (1)

A.A. Savchenkov, V.S. Ilchenko, A.B. Matsko and L. Maleki, "Kilohertz Optical Resonances in dielectric crystal cavities" Phys. Rev A. 70, 051804(R) (2004).
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Phys. Rev. A (1)

S. M. Spillane, T. J. Kippenberg, K. J. Vahala, K. W. Goh, E. Wilcut, and H. J. Kimble, "Ultrahigh-Q toroidal microresonators for cavity quantum electrodynamics" Phys. Rev. A 71, 013817 (2005).
[CrossRef]

Phys. Rev. Lett. (3)

M. Cai, O. Painter, and KerryJ. Vahala, "Observation of critical coupling in a fiber-taper to silica-microsphere Whispering-Gallery mode system," Phys. Rev. Lett. 85, 74-77 (2000).
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H. Rokhsari, and K. J. Vahala, "Ultralow loss, high-Q, four port resonant couplers for quantum optics and photonics," Phys. Rev. Lett. 92, 253905 (2004)
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A. Yalcin, KC. Popat, J. C. Aldrige, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. Anthes-Washburn, M. S. Unlu, " Optical sensing of biomolecules using microring resonators," IEEE J. Sel.Top Quantum Electron. 12, 148-155 (2006).
[CrossRef]

Other (2)

Microdroplets of different liquids can be generated using micropumps (for example Micro Diaphragm Liquid Pumps from Namiki precision jewel co., Japan.)

Nanocube piezo nanopositioning system, physikinstrumente co., Germany (www.physikinstrumente.com).

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Figures (12)

Fig. 1.
Fig. 1.

Fabrication sequence of the free silica microtoroid. (a) Fabrication of a silica microdisk (2 μm thick thermally grown silica) on the silicon substrate using photolithography and buffered HF wet etching. (b) XeF2 isotropic dry etching of silicon. (c) CO2 laser exposure and formation of the silica microtoroid. (d) Second XeF2 etch to reduce the diameter of the silicon pillar at the silicon-silica joint. (e) Detachment of the microtoroid from the silicon pillar.

Fig. 2.
Fig. 2.

(a) Micrograph of a 50 μm diameter silica microtoroid on a narrow silicon pillar (after the second XeF2 etch). The diagram shows a cross-sectional view of the microtoroid (ring + membrane) and the location where the optical mode resides. (b) A microtoroid is detached from the silicon pillar using a tapered silica fiber tip.

Fig. 3.
Fig. 3.

(a) A free microtoroid on the silicon substrate. (b) Five, free microtoroids detached from their pillar and lying side-by-side on the silicon wafer. The rough silicon surface is a result of XeF2 dry etching. The top inset shows how the Tungsten tip can be used to position the microtoroids. The bottom inset is a photograph of the Tungsten tip while it controls the microtoroid.

Fig. 4.
Fig. 4.

Fabrication sequence of the silica microfork. (a) A 4-micron thick silica microfork is defined on a silicon substrate (using optical lithographically and buffered HF etching). (b) The silicon underneath the silica fork is removed using XeF2 dry etching and a single mode optical fiber is glued on top of the silica microfork. (c) Top-view of the microfork, pillar and the fiber. (d) Top-view showing the silica microfork detached from the silicon pillar by a vertical force exerted using the fiber. (e) Side-view of the detached microfork. (f) A 3-D view of the silica microfork and its fiber optical handle.

Fig. 5.
Fig. 5.

Detaching the silica microtoroid using the silica microfork. (a) The microfork is positioned underneath the microtoroid. (b) A vertical force detaches the microtoroid from the silicon pillar. (c) The microtoroid stays on the silica fork and it is ready to be transferred to another substrate for integration with photonic components.

Fig. 6.
Fig. 6.

(a) Fiber-taper coupling to a free UH-Q silica microtoroidal optical resonator. The microtoroid is sitting on a 2-micron thick silica membrane (on top of a silicon pedestal) to facilitate the side coupling to the fiber-taper. (b) Photograph of a free microtoroid coupled to a fiber-taper. The gray area in the photograph is the silica overhang and the white area is the silicon pedestal seen through the silica layer.

Fig. 7
Fig. 7

(a) Normalized optical transmission spectrum around a high-Q resonance of the microtoroid before detachment from the silicon pillar. The measured quality factor (Q tot) is about 5.0×107 (given that at resonance the transmission is about 94% the corresponding Q 0 is 5.2×107). (b) Normalized optical transmission spectrum around the same resonance after the microtoroid is detached from the silicon pillar and is placed on a silica substrate (Fig. 6(b)). The measured quality factor (Q tot) is about 2.9×107 (given that at resonance the transmission is about 95% the corresponding to a Q 0 is 3.1×107).

Fig. 8.
Fig. 8.

Stabilizing the free microtoroid.

Fig. 9.
Fig. 9.

Schematic diagram showing a 3-pole add/drop filter based on free microtoroid technology.

Fig. 10.
Fig. 10.

A waveguide configuration for efficient coupling to a microtoroid.

Fig. 11.
Fig. 11.

Proposed scheme for temperature control of the resonant wavelengths.

Fig. 12.
Fig. 12.

Mounting the free microtoroid on a post to enable smaller mode volumes.

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