Abstract

The authors report a compact and highly selective tunable filter using a Fabry-Perot resonator combining a bottom micromachined 3-pair-InP/air-gap Bragg reflector with a top photonic crystal slab mirror. It is based on the coupling between radiated vertical cavity modes and waveguided modes of the photonic crystal. The full-width at half maximum (FWHM) of the resonance, as measured by microreflectivity experiments, is close to 1.5nm (around 1.55μm). The presence of the photonic crystal slab mirror results in a very compact resonator, with a limited number of layers. The demonstrator was tuned over a 20nm range for a 4V tuning voltage, the FWHM being kept below 2.5nm. Bending of membranes is a critical issue, and better results (FWHM≡0.5nm) should be obtained on the same structure if this technological point is fixed.

© 2006 Optical Society of America

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  1. M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
    [CrossRef]
  2. X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
    [CrossRef]
  3. Y. Ding and R. Magnusson, "Use of nondegenerate resonant leaky modes to fashion diverse optical spectra," Opt. Express 12,1885-1891 (2004).
    [CrossRef] [PubMed]
  4. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
    [CrossRef]
  5. V. Lousse, W. Suh, O. Kilic, S. Kim, O. Solgaard, and S. Fan, "Angular and polarization properties of a photonic crystal slab mirror," Opt. Express 12,1575-1582 (2004).
    [CrossRef] [PubMed]
  6. S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).
  7. A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
    [CrossRef]
  8. C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
    [CrossRef]
  9. K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
    [CrossRef]
  10. M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
    [CrossRef]
  11. J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
    [CrossRef]
  12. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar grating diffraction," J. Opt. Soc. Am. 71,811-818 (1981).
    [CrossRef]

2004 (4)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

V. Lousse, W. Suh, O. Kilic, S. Kim, O. Solgaard, and S. Fan, "Angular and polarization properties of a photonic crystal slab mirror," Opt. Express 12,1575-1582 (2004).
[CrossRef] [PubMed]

Y. Ding and R. Magnusson, "Use of nondegenerate resonant leaky modes to fashion diverse optical spectra," Opt. Express 12,1885-1891 (2004).
[CrossRef] [PubMed]

2003 (2)

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

2002 (2)

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

1998 (1)

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

1996 (1)

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

1981 (1)

Allan, D. C.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

André, J.

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

Ben Bakir, B.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Benyattou, T.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Blondeau, R.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Bouchoule, S.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Bousseksou, A.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Boutami, S.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Chang-Hasnain, C. J.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Chen, L.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

Chih-Hao, C.

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Chitica, N.

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

Chrostowski, L.

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Decai, S.

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Ding, Y.

El Kurdi, M.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Fan, S.

Garnache, A.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Garrigues, M.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Gaylord, T. K.

Guillot, G.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Hattori, H.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Huang, M. C. Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

Jacquet, J.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Kilic, O.

Kim, S.

Kuchinsky, S.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Leclercq, J. L.

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Leclercq, J.-L.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Ledantec, R.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Letartre, X.

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Loncar, M.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Lousse, V.

Magnusson, R.

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Moharam, M. G.

Mouette, J.

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

Nedeljkovic, D.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Pathak, R.

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Pearsall, T. P.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Plais, A.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Rapp, S.

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

Rojo-Romeo, P.

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Rondi, D.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Sagnes, I.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Scherer, A.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Seassal, C.

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Solgaard, O.

Spisser, A.

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

Strassner, M.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Streubel, K.

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

Suh, W.

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

Symonds, C.

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

Viktorovitch, P.

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

Vukovic, J.

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Yang, S.

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

Appl. Phys. Lett. (1)

M. Loncar, D. Nedeljkovic, T. P. Pearsall, J. Vukovic, A. Scherer, S. Kuchinsky, and D. C. Allan, "Experimental and theoretical confirmation of Bloch-mode light propagation in planar photonic crystal waveguides," Appl. Phys. Lett. 80,1689-1691 (2002).
[CrossRef]

Electron. Lett. (2)

K. Streubel, S. Rapp, J. André, and N. Chitica, "1.26μm vertical cavity laser with two InP/air-gap reflectors," Electron. Lett. 32, 1369-1370 (1996).
[CrossRef]

M. El Kurdi, S. Bouchoule, A. Bousseksou, I. Sagnes, A. Plais, M. Strassner, C. Symonds, A. Garnache, and J. Jacquet, "Room -temperature continuous -wave laser operation of electrically-pumped 1.55 µm VECSEL," Electron. Lett. 40, 671 (2004)
[CrossRef]

IEEE Photon. Technol. Lett. (4)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broadband mirror (1.12-1.62μm) using single-layer sub-wavelength grating," IEEE Photon. Technol. Lett. 16,1676-1678 (2004)
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J.-L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, "Broadband and compact 2D photonic crystal reflectors with controllable polarization dependence," IEEE Photon. Technol. Lett. (to be published).

A. Spisser, R. Ledantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55-μm InP/air-gap micromachined fabry-perot filter for optical communications," IEEE Photon. Technol. Lett. 10, 1259-1261 (1998).
[CrossRef]

C. F. R. Mateus, C. Chih-Hao, L. Chrostowski, S. Yang, S. Decai, R. Pathak, and C. J. Chang-Hasnain, "Widely tunable torsional optical filter," IEEE Photon. Technol. Lett. 14, 819-821 (2002).
[CrossRef]

J. Light. Technol. (1)

X. Letartre, J. Mouette, J. L. Leclercq, P. Rojo-Romeo, C. Seassal, and P. Viktorovitch, "Switching devices with spatial and spectral resolution combining photonic crystal and MOEMS structures," J. Light. Technol. 21,1691-1699 (2003).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Vac. Sci. Technol. B (1)

J. L. Leclercq, P. Rojo-Romeo, C. Seassal, J. Mouette, X. Letartre, and P. Viktorovitch, "3D structuring of multilayer suspended membranes including 2D photonic crystal structures," J. Vac. Sci. Technol. B 21,2903-2906 (2003).
[CrossRef]

Opt. Express (2)

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Figures (8)

Fig. 1.
Fig. 1.

Schematic true scale representations of a “traditional” MOEMS filter composed of two micromachined 3pairs-InP/air-gap (3λ/4-λ/4) Bragg reflectors with a 2λ-thick cavity air-gap (Fig. 1(a)), and the PCMOEMS filter composed of a bottom micromachined 3pairs-InP/air-gap Bragg reflector and a top PCM mirror with a nearly 3λ/4-thick cavity air-gap (Fig. 1(b)).

Fig. 2.
Fig. 2.

(a) Schematic representation of the 1D photonic crystal slab mirror used; the nominal characteristics are a membrane thickness h=255nm, a lattice period p=1.15 μm, and an air filling factor f=65%. (b) Reflectivity characteristics of this PCM for light polarization parallel to the slits, for two different air filling factors, f=65% and f=75% (RCWA simulations).

Fig. 3.
Fig. 3.

Tolerance study on the geometrical parameters of the broadband PCM mirror. Reflection characteristics as a function of wavelength and air filling factor are given for three different values of the membrane thickness: h=255nm (Fig 3(a)), h=235nm (Fig 3(b)), and h=275nm (Fig 3(c)) (RCWA simulations).

Fig. 4.
Fig. 4.

(a) 3D-FDTD calculations on the reflectivity (blue curve - circles) and transmittivity (green curve - squares) spectra of a 30 μm × 30 μm PCM of Fig. 2(a), illuminated by a 13 μm-wide circular gaussian beam. (b) Mapping of the Ey-field in the middle plane of the membrane.

Fig. 5
Fig. 5

Reflectivity and transmittivity spectra for the two different filter configurations of Fig 1: the traditional MOEMS filter with an air cavity of 3300nm (Fig 5(a)), and the PCMOEMS filter configuration with an air cavity of 1300nm (Fig 5(b)).(2D-FDTD calculations).

Fig. 6.
Fig. 6.

SEM general views (Fig 6(a) and 6(b)), and close-up views (Fig 6(c) and 6(d)) of a two-arms and a four-arms PCMOEMS micromachined filters.

Fig. 7.
Fig. 7.

Tuning spectra of the PCMOEMS filter

Fig. 8.
Fig. 8.

Interferometric microscopy measurements on the top PCM of the characterized filter, with no bias voltage. The height difference between the center and the edges of the PC platform has been evaluated to 20nm at least.

Equations (3)

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ω = ω 0 + 1 2 α ( k k 0 ) 2 = ω 0 + 1 2 α ( k ) 2 ,
V g = dk = α . k α S .
τ g = S V g S α

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