An optical monitoring method is described to compensate for the thickness error of nonquarterwave layers of dielectric multilayer filters, using optical admittance during deposition. Stability is confirmed by computer simulation of random thickness error generation in layers. In addition, a band split filter consisting of 61 nonquarterwave and nonperiodic layers is deposited using the proposed method, resulting in high spectral performance, as the application requires.
© 2006 Optical Society of AmericaFull Article | PDF Article
Ronald R. Willey and David E. Machado
Appl. Opt. 38(25) 5447-5451 (1999)
Cheng-Chung Lee, Kai Wu, Chien-Cheng Kuo, and Sheng-Hui Chen
Opt. Express 13(13) 4854-4861 (2005)
A. V. Tikhonravov and M. K. Trubetskov
Appl. Opt. 46(11) 2084-2090 (2007)