Design of SiON-based grating-assisted vertical directional couplers

Vittorio M. N. Passaro; Goran Z. Masanovic

doi:10.1364/OE.14.001055

Abstract

In this paper, we present the design of a SiON-based grating-assisted codirectional coupler for dissimilar waveguides, based on an accurate numerical method. All the design parameters, including coupling length and coupling efficiency, have been calculated at the free-space optical wavelength of λ =1.54 μm for both TE and TM polarisations as a function of grating height, thickness of the coupled slabs, gap thickness between the two coupled planar waveguides. It is shown that efficient (up to 70%) and polarisation independent vertical couplers can be realised.

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References

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Publication

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]
A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]
L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]
G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]
V. M. N. Passaro, “Optimal design of grating-assisted directional couplers,” J. Lightwave Technol. 18, 973 (2000).
[Crossref]
W. Huang and J. Hong, “Transfer matrix approach based on local normal modes for coupled waveguides with periodic perturbations,” J. Lightwave Technol. 10, 1367 (1992).
[Crossref]
K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]
G. T. Reed and A. P. Knights, Silicon photonics: an introduction (Wiley, Chichester, 2004).
[Crossref]
G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

2005 (1)

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

2003 (2)

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]

2000 (1)

V. M. N. Passaro, “Optimal design of grating-assisted directional couplers,” J. Lightwave Technol. 18, 973 (2000).
[Crossref]

1999 (1)

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

1993 (1)

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

1992 (1)

W. Huang and J. Hong, “Transfer matrix approach based on local normal modes for coupled waveguides with periodic perturbations,” J. Lightwave Technol. 10, 1367 (1992).
[Crossref]

Alferness, R. C.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Atta, R.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

Atta, R. M. H.

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Bona, G. L.

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]

Buhl, L. L.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Burrus, C. A.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Costa, R.

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

Driessen, A.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Ensell, G.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

Ensell, G. J.

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Evans, A. G. R.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Germann, R.

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]

Headley, W.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Hilderink, L. T. H.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Hong, J.

W. Huang and J. Hong, “Transfer matrix approach based on local normal modes for coupled waveguides with periodic perturbations,” J. Lightwave Technol. 10, 1367 (1992).
[Crossref]

Huang, W.

W. Huang and J. Hong, “Transfer matrix approach based on local normal modes for coupled waveguides with periodic perturbations,” J. Lightwave Technol. 10, 1367 (1992).
[Crossref]

Josey, M. R.

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Knights, A. P.

G. T. Reed and A. P. Knights, Silicon photonics: an introduction (Wiley, Chichester, 2004).
[Crossref]

Koch, T. L.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Koren, U.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Lambeck, P. V.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Linders, P. W. C.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Martinelli, M.

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

Masanovic, G. Z.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Melloni, A.

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

Miller, B. I.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Monguzzi, P.

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

Offrein, B. J.

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]

Passaro, V. M. N.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

V. M. N. Passaro, “Optimal design of grating-assisted directional couplers,” J. Lightwave Technol. 18, 973 (2000).
[Crossref]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Popma, Th. J. A.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Raybon, G.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Reed, G. T.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

G. T. Reed and A. P. Knights, Silicon photonics: an introduction (Wiley, Chichester, 2004).
[Crossref]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]

Timotijevic, B.

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

Worhoff, K.

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Young, M. G.

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

Electron. Lett. (1)

L. L. Buhl, R. C. Alferness, U. Koren, B. I. Miller, M. G. Young, T. L. Koch, C. A. Burrus, and G. Raybon, “Grating assisted vertical coupler/filter for extended tuning range,” Electron. Lett. 29, 81 (1993).
[Crossref]

IBM J. Res. Dev. (1)

G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Dev. 47, 239 (2003).
[Crossref]

J. Lightwave Technol. (2)

V. M. N. Passaro, “Optimal design of grating-assisted directional couplers,” J. Lightwave Technol. 18, 973 (2000).
[Crossref]

W. Huang and J. Hong, “Transfer matrix approach based on local normal modes for coupled waveguides with periodic perturbations,” J. Lightwave Technol. 10, 1367 (1992).
[Crossref]

Opt. Express (1)

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13, 7374 (2005), http://www.opticexpress.org/abstract.cfm?URI=OPEX-13-19-7374.
[Crossref] [PubMed]

Opt. Lett. (1)

A. Melloni, R. Costa, P. Monguzzi, and M. Martinelli, “Ring resonator filters in silicon oxynitride technology for dense wavelength-division multiplexed systems,” Opt. Lett. 28, 1567 (2003).
[Crossref] [PubMed]

Sens. Actuators A (1)

K. Worhoff, A. Driessen, P. V. Lambeck, L. T. H. Hilderink, P. W. C. Linders, and Th. J. A. Popma, “Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics,” Sens. Actuators A 74, 9 (1999).
[Crossref]

Other (2)

G. T. Reed and A. P. Knights, Silicon photonics: an introduction (Wiley, Chichester, 2004).
[Crossref]

G. Z. Masanovic, G. T. Reed, V. M. N. Passaro, W. Headley, M. R. Josey, G. J. Ensell, R. M. H. Atta, and A. G. R. Evans, “A grating based coupler for fibre to silicon waveguide excitation,” in Integrated Optics and Photonic Integrated Circuits, G. C. Righini and S. Honkanen, eds., Proc. SPIE5451, 381 (2004).
[Crossref]