Abstract

A p-polarized femtosecond laser beam was used to irradiate a UV grade fused silica to create microchannels, which are useful for producing optical gratings or micro fluidics devices. The laser irradiated surface was characterized using optical microscope, stylus profiler, SEM, XRD and TEM. A special technique was used to protect the laser irradiated surfaces in preparing cross-sectional TEM samples. The XRD spectra and TEM observation reveal that structure of the fused silica remain amorphous after the femtosecond laser irradiation.

© 2006 Optical Society of America

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  1. S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
    [CrossRef] [PubMed]
  2. M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
    [CrossRef]
  3. A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995).
    [CrossRef]
  4. H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
    [CrossRef]
  5. A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
    [CrossRef]
  6. J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
    [CrossRef]
  7. T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
    [CrossRef]
  8. G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
    [CrossRef]
  9. G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
    [CrossRef]
  10. Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
    [CrossRef]
  11. Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, and K. Hirao, "Three-Dimensional Microscopic Crystallization in Photosensitive Glass by Femtosecond Laser Pulses at Nonresonant Wavelength," Jpn. J. Appl. Phys. 37, 94- 96 (1998).
    [CrossRef]
  12. H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
    [CrossRef]
  13. A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
    [CrossRef]
  14. M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
    [CrossRef]
  15. V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
    [CrossRef]

2005 (2)

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

2004 (3)

J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
[CrossRef]

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

2003 (3)

T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
[CrossRef]

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
[CrossRef]

2001 (2)

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

2000 (2)

S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
[CrossRef] [PubMed]

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

1999 (1)

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

1995 (1)

A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995).
[CrossRef]

Bonse, J.

J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
[CrossRef]

Boudreau, D.

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Brzezinka, K.W.

J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
[CrossRef]

Chen, G.F.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

Chen, Q.

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Cheng, G.G.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

Chin, S.L.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Choi, T.Y.

T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
[CrossRef]

Demchuk, A.V.

A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995).
[CrossRef]

Donnadieu, P.

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Forster, E.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Gan, F.

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Garozzo, M.

S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
[CrossRef] [PubMed]

Glatzel, U.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Grigoropoulos, C.P.

T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
[CrossRef]

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

Gu, D.

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Guyot, P.

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Hatano, M.

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

Hirao, K.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Hwang, D.J.

T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
[CrossRef]

Intuye, H.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Jiang, X.

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Kapoor, A.

A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
[CrossRef]

Kasaai, M.R.

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Kondo, Y.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Koubassov, V.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Labunov, V.A.

A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995).
[CrossRef]

Lagace, S.

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Laprise, J.F.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Lee, M.

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

Lim, G. C.

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

Lim, G.C.

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

Loreti, S.

S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
[CrossRef] [PubMed]

Meixner, A.J.

J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
[CrossRef]

Mitsuyu, T.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Miura, K.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Moon, S.

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

Muller, B.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Ochin, P.

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Qian, H.X.

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

Qing, L.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

Revesz, A.

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Sala, D.D.

S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
[CrossRef] [PubMed]

Sauerbrey, R.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Simon, J.P.

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Singh, A.P.

A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
[CrossRef]

Suzuki, K.

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

Suzuki, T.

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

Tan, T.T.

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

Theberge, F.

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Tripathi, K.N.

A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
[CrossRef]

Wang, Y.S.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

White, J.D.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

Zhang, G.

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Zhao, W.

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

Zheng, H. Y.

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

Zheng, H.Y.

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

Zhou, W.

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

Appl. Phys. A. (1)

V. Koubassov, J.F. Laprise, F. Theberge, E. Forster, R. Sauerbrey, B. Muller, U. Glatzel, S.L. Chin, "Ultrafast laser-induced melting of glass," Appl. Phys. A. 79, 499-505 (2004).
[CrossRef]

Appl. Surf. Sci. (3)

H.Y. Zheng, W. Zhou, H.X. Qian, T.T. Tan, and G.C. Lim, "Polarisation-independence of femtosecond laser machining of fused silica," Appl. Surf. Sci. 236, 114-119 (2004).
[CrossRef]

A.V. Demchuk and V.A. Labunov, "Surface morphology and structure modification of silicon layers indused by nanosecond laser irradiation, " Appl. Surf. Sci. 86, 353-358 (1995).
[CrossRef]

J. Bonse, K.W. Brzezinka, A.J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221, 215-230 (2004).
[CrossRef]

Chin. Phys. Lett. (1)

G.G. Cheng, J.D. White, L. Qing, Y.S. Wang, W. Zhao, and G.F. Chen, "Microstructure on surface of LiNbO3:Fe induced by a single ultra-short laser pulse," Chin. Phys. Lett. 20, 1283 (2003).
[CrossRef]

J. Appl. Phys. (1)

M. Hatano, S. Moon, M. Lee, K. Suzuki, and C.P. Grigoropoulos, "Excimer laser-induced temperature field in melting and resolidification of silicon thin films," J. Appl. Phys. 87, 36-43 (2000).
[CrossRef]

J. Non-Cryst. Solids. (2)

Y. Kondo, K. Miura, T. Suzuki, H. Intuye, T. Mitsuyu, and K. Hirao,"Three-dimensional arrays of crystallites within glass by using non-resonant femtosecond pulses," J. Non-Cryst. Solids. 253, 143-156 (1999).
[CrossRef]

M.R. Kasaai, S. Lagace, D. Boudreau, E. Forster, B. Muller, and S.L. Chin, "Creation of micro-holes on glass surface by femtosecond laser through the ejection of molten material," J. Non-Cryst. Solids. 292, 202-209 (2001).
[CrossRef]

Micron. (1)

S. Loreti, D.D. Sala, and M. Garozzo, "Morphological and structural effects of excimer laser treatment of amorphous silicon," Micron. 31, 299-307 (2000).
[CrossRef] [PubMed]

Opt. Eng. (1)

T.Y. Choi, D.J. Hwang, and C.P. Grigoropoulos, "Ultrafast laser-induced crystallization of amorphous silicon films," Opt. Eng. 42, 3383-3388 (2003).
[CrossRef]

Opt. Laser Technol. (1)

A. Kapoor, A.P. Singh, and K.N. Tripathi, "Recrystallization of germanium surfaces by femtosecond laser pulse," Opt. Laser Technol. 35, 87-97 (2003).
[CrossRef]

Phil. Mag. Lett. (1)

A. Revesz, P. Ochin, P. Donnadieu, J.P. Simon, and P. Guyot, "Nanocrystallization in a Zr57Ti5Cu20Al10Ni8 bulk metallic glass," Phil. Mag. Lett. 81, 767-775 (2001).
[CrossRef]

Surf. Sci. (1)

H.X. Qian, W. Zhou, H. Y. Zheng, and G. C. Lim, "Morphological and chemical evolution on InP(100) surface irradiated with femtosecond laser," Surf. Sci. 595, 49-55 (2005).
[CrossRef]

Thin Solid Films. (1)

G. Zhang, D. Gu, F. Gan, X. Jiang, and Q. Chen," Femtosecond laser-induced crystallization in amorphous Ge2Sb2Te5 films," Thin Solid Films. 474, 169-172 (2005).
[CrossRef]

Other (1)

Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, and K. Hirao, "Three-Dimensional Microscopic Crystallization in Photosensitive Glass by Femtosecond Laser Pulses at Nonresonant Wavelength," Jpn. J. Appl. Phys. 37, 94- 96 (1998).
[CrossRef]

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Figures (7)

Fig. 1.
Fig. 1.

Femtosecond laser machined microchannels with cutting direction parallel to p-polarization. (a) Optical image and (b) SEM image of microchannels.

Fig. 2.
Fig. 2.

Surface profiles of the microchannels machined on fused silica substrate showing an average depth of 5 µm. (a) 3D image and (b) Depth profile.

Fig. 3.
Fig. 3.

EDS showing no change of chemical composition in the fused silica. (a) Non-irradiated surface; and (b) Surface irradiated with femtosecond laser.

Fig. 4.
Fig. 4.

X-Ray diffraction spectra of fused silica, (a) Un-irradiated material and (b) After Femtosecond irradiation

Fig. 5.
Fig. 5.

Steps in preparation of cross-sectional TEM sample. (a) Cross-sectional slice of microchannels secioned with diamond saw; (b) Two slices of microchannels glued face to face to protect irradiated surfaces; and (c) Transfer of sample onto TEM grid after grinding.

Fig. 6.
Fig. 6.

(a) Irradiated structure on the side wall of the microchannels. (b) HRTEM image of the irradiated structure showing it is amorphous.

Fig. 7.
Fig. 7.

TEM diffraction patterns. (a) Non-irradiated sample; and (b) Laser irradiated structure on surface of the microchannel.

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