Abstract

We demonstrate a compact, fiber-pigtailed, 4-by-4 wavelength router in Silicon-on-insulator photonic wires, fabricated using CMOS processing methods. The core is an AWG with a 250GHz channel spacing and 1THz free spectral range, on a 425×155 μm2 footprint. The insertion loss of the AWG was reduced to 3.5dB by applying a two-step processing technique. The crosstalk is -12dB. The device was pigtailed using vertical fiber couplers and an eight-fiber array connector.

© 2006 Optical Society of America

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  1. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
    [Crossref]
  2. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
    [Crossref]
  3. T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
    [Crossref]
  4. F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
    [Crossref]
  5. D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
    [Crossref]
  6. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
    [Crossref]
  7. C. Dragone,“An N×N Optical Multiplexer Using a Planar Arrangement of Two Star Couplers,” IEEE Photonics Technol. Lett. 3, 812–815 (1991).
    [Crossref]
  8. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).
  9. P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
    [Crossref]
  10. D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
    [Crossref]
  11. Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
    [Crossref]
  12. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
    [Crossref] [PubMed]

2005 (4)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

2004 (4)

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
[Crossref]

2003 (1)

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

2002 (2)

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

1991 (1)

C. Dragone,“An N×N Optical Multiplexer Using a Planar Arrangement of Two Star Couplers,” IEEE Photonics Technol. Lett. 3, 812–815 (1991).
[Crossref]

Baba, T.

F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
[Crossref]

T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
[Crossref]

Baets, R.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Barbarin, Y.

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Beckx, S.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

Bente, E.A.J.M

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Bienstman, P.

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Bien-stman, P.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

Bogaerts, W.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Borel, P.

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

Campenhout, J. Van

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

Chong, H.

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

Daele, P. Van

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

De La Rue, R.

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Dragone, C.

C. Dragone,“An N×N Optical Multiplexer Using a Planar Arrangement of Two Star Couplers,” IEEE Photonics Technol. Lett. 3, 812–815 (1991).
[Crossref]

Dumon, P.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

Frandsen, L.

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

Fukazawa, T.

F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
[Crossref]

T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
[Crossref]

Fukuda, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

Itabashi, S.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

Jaenen, P.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

Kooiman, J.R.

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Krauss, T.F.

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Leijtens, X.J.M.

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Louzao, C.M.

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Luyssaert, B.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Morita, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Ohno, F.

F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
[Crossref]

T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
[Crossref]

Roelkens, G.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

Shoji, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Smit, M.K.

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

Taillaert, D.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating for silicon-on-insulator waveguides,” Opt. Lett. 29, 2749–2751 (2004).
[Crossref] [PubMed]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Takahashi, J.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

Takahashi, M.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

Tamechika, E.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

Thourhout, D. Van

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

Watanabe, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Wiaux, V.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

Wouters, J.

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

Yamada, K.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita,“Low loss mode size converter from 0.3μm square Si wire waveguides to singlemode fibres,”Electron. Lett. 38, 1669–1670 (2002).
[Crossref]

Group IV photonics 2004 (1)

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets,“Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography,” Group IV photonics 2004, WB5 (2004).

IEEE Group IV photonics 2005 (1)

P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, and R. Baets,“Basic Photonic Wire Components in Silicon-on-insulator,” IEEE Group IV photonics 2005, 189–191 (2005).
[Crossref]

IEEE J. Lightwave Technol. (1)

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bien-stman, and D. Van Thourhout,“Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology,” IEEE J. Lightwave Technol. 23, 401–412 (2005).
[Crossref]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T.F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets,“An Out-of-Plane Grating Coupler for Efficient Butt-Coupling Between Compact Planar Waveguides and Single-Mode Fibers,” IEEE J. Quantum Electron. 38, 949–955 (2002).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita,“Microphotonics Devices Based on Silicon Microfabrication Technology,” IEEE J. Sel. Top. Quantum Electron. 11, 232–240 (2005).
[Crossref]

IEEE Photonics Technol. Lett. (3)

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. De La Rue, and R. Baets,“A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photonics Technol. Lett. 15, 1249–1251 (2003).
[Crossref]

Y. Barbarin, X.J.M. Leijtens, E.A.J.M Bente, C.M. Louzao, J.R. Kooiman, and M.K. Smit,“Extremely Small AWG Demultiplexer Fabricated on InP by Using a Double-Etch Process,” IEEE Photonics Technol. Lett. 16, 2478–2480 (2004).
[Crossref]

C. Dragone,“An N×N Optical Multiplexer Using a Planar Arrangement of Two Star Couplers,” IEEE Photonics Technol. Lett. 3, 812–815 (1991).
[Crossref]

Jpn. J. Appl. Phys. (2)

T. Fukazawa, F. Ohno, and T. Baba,“Very Compact Arrayed-Waveguide-Grating Demultiplexer Using Si Photonic Wire Waveguides,” Jpn. J. Appl. Phys. 43, L673–L675 (2004).
[Crossref]

F. Ohno, T. Fukazawa, and T. Baba,“Mach-Zehnder Interferometers Composed of Microbends and Microbranches in a Si Photonic Wire Waveguide,” Jpn. J. Appl. Phys. 44, 5322–5323 (2005).
[Crossref]

Opt. Lett. (1)

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Figures (4)

Fig. 1.
Fig. 1.

Star coupler (a) Schematic of the deep to shallow transition (b) SEM picture (c) Detailed SEM picture of the two-level structures

Fig. 2.
Fig. 2.

(a) AWG and its designed parameters. (b) chip layout of the AWG with access waveguides and fiber couplers (numbered 1 to 8). (c) fiber coupler setup principle and SEM picture of the grating coupler.

Fig. 3.
Fig. 3.

Pigtailed chip. (a) Schematic (b) Picture. here the chip was cleaved larger than necessary. The actual die size is smaller than the connector surface.

Fig. 4.
Fig. 4.

Overlayed normalized fiber-to-fiber transmission spectra of a 250GHz channel spacing AWG. Spectra from the each input to all outputs are shown

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