Abstract

Membrane mirror devices presented here are capable of large amplitude deformation for wavefront generation and correction in adaptive optics. These devices consist of micro-fabricated membranes that are actuated by an underlying electrode array and a transparent counter-electrode. Deformations of +/- 20 μm optical are demonstrated for low order deformations and 10 μm optical for high order Zernike polynomial wavefront generation. Large deformation at low voltage is enabled by the use of low stress membranes, relatively small membrane-electrode separation and the transparent counter-electrode.

© 2006 Optical Society of America

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  1. Marc Séchaud, "Wave-front compensation devices," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999).
  2. G. Vdovin, and P. M. Sarro, "Flexible mirror micromachined in silicon," Appl. Opt. 34, 2968-2972 (1995).
  3. C. Paterson, I. Munro and J. C. Dainty, "A low cost adaptive optics system using a membrane mirror," Opt. Express 6, 175-185 (2000).
  4. I. Iglesias and P. Artal, "Closed loop adaptive optics in the human eye," Opt. Lett. 26, 746-748 (2001).
  5. L. Zhu et al., "Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror" Appl. Opt. 38, 6019-6026 (1999).
  6. L. Zhu et al., "Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation," Appl. Opt. 38, 168-178 (1999).
  7. D. Dayton et al., "Laboratory and field demonstration of a low cost membrane mirror adaptive optics system," Opt. Commun. 176, 339-345 (2000).
    [CrossRef]
  8. R. P. Grosso and M. Yellin, "Membrane mirror as an adaptive optical element," J. Opt. Soc. Am. 67, 399-406 (1977).
  9. Pierre-Yves Madec, "Control techniques," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999).
  10. J.C.Wyant and K. Creath, "Basic Wavefront Aberration Theory for Optical Metrology" in Applied Optics and Optical Engineering, J. C. Wyant and R. R. Shannon, eds. (Academic, New York, NY 1992).
  11. P. Kurczynski and B. Sadoulet are preparing a manuscript to be called "Stability of Electrostatic Actuated Membrane Mirror Devices."

Adaptive Optics in Astronomy (2)

Marc Séchaud, "Wave-front compensation devices," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999).

Pierre-Yves Madec, "Control techniques," in F. Roddier, ed. Adaptive Optics in Astronomy, (Cambridge University Press, Cambridge, 1999).

Appl. Opt. (3)

L. Zhu et al., "Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror" Appl. Opt. 38, 6019-6026 (1999).

L. Zhu et al., "Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation," Appl. Opt. 38, 168-178 (1999).

G. Vdovin, and P. M. Sarro, "Flexible mirror micromachined in silicon," Appl. Opt. 34, 2968-2972 (1995).

Applied Optics and Optical Engineering (1)

J.C.Wyant and K. Creath, "Basic Wavefront Aberration Theory for Optical Metrology" in Applied Optics and Optical Engineering, J. C. Wyant and R. R. Shannon, eds. (Academic, New York, NY 1992).

J. Opt. Soc. Am. (1)

R. P. Grosso and M. Yellin, "Membrane mirror as an adaptive optical element," J. Opt. Soc. Am. 67, 399-406 (1977).

Opt. Commun. (1)

D. Dayton et al., "Laboratory and field demonstration of a low cost membrane mirror adaptive optics system," Opt. Commun. 176, 339-345 (2000).
[CrossRef]

Opt. Express (1)

C. Paterson, I. Munro and J. C. Dainty, "A low cost adaptive optics system using a membrane mirror," Opt. Express 6, 175-185 (2000).

Opt. Lett. (1)

I. Iglesias and P. Artal, "Closed loop adaptive optics in the human eye," Opt. Lett. 26, 746-748 (2001).

Other (1)

P. Kurczynski and B. Sadoulet are preparing a manuscript to be called "Stability of Electrostatic Actuated Membrane Mirror Devices."

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