Abstract

Femtosecond laser pulses used in a regime below the ablation threshold have two noticeable effects on Fused Silica (a-SiO2): they locally increase the material refractive index and modify its HF etching selectivity. The nature of the structural changes induced by femtosecond laser pulses in fused silica is not fully understood. In this paper, we report on nanoindentation and birefringence measurements on fused silica exposed to low-energy femtosecond laser pulses. Our findings further back the hypothesis of localized densification effect even at low energy regime.

© 2006 Optical Society of America

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  1. X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
    [CrossRef]
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  3. A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond Laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001).
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  5. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2006 (3)

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

T. Colomb, E. Cuche, F. Charrière, J. Kühn, N. Aspert, F. Montfort, P. Marquet, and C. Depeursinge, "Automatic procedure for aberration compensation in digital holographic microscopy and applications to specimen shape compensation," Appl. Opt. 45, 851-863 (2006).
[CrossRef]

2005 (1)

2004 (3)

Y. Bellouard, A. Said, M. Dugan and P. Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12, 2120-2129 (2004).
[CrossRef]

W. C. Oliver and G. M. Phar, "Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology," J. Mater. Res. 19, 3-20 (2004).
[CrossRef]

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

2002 (1)

2001 (1)

2000 (1)

1997 (1)

X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
[CrossRef]

1996 (1)

Aspert, N.

Bado, P.

Bellouard, Y.

Bhardwaj, V. R.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Borrelli, N.

Charrière, F.

Colomb, T.

Corkum, P. B.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Cuche, E.

Davis, K. M.

Depeursinge, C.

Du, D.

X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
[CrossRef]

Dugan, M.

Dürr, F.

Gamaly, E. G.

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Hashimoto, T.

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Hirao, K.

Hnatovsky, C.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Juodkazis, S.

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond Laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001).

Kühn, J.

Limberger, H.

Liu, X.

X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
[CrossRef]

Luther-Davies, B.

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

Marcinkevicius, A.

Marquet, P.

Matsuo, S.

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond Laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001).

Misawa, H.

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond Laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279 (2001).

Miura, K.

Miwa, M.

Mizeikis, V.

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

Montfort, F.

Mourou, G.

X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
[CrossRef]

Nishii, J.

Oliver, W. C.

W. C. Oliver and G. M. Phar, "Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology," J. Mater. Res. 19, 3-20 (2004).
[CrossRef]

Phar, G. M.

W. C. Oliver and G. M. Phar, "Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology," J. Mater. Res. 19, 3-20 (2004).
[CrossRef]

Rajeev, P. P.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Rayner, D. M.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Said, A.

Salathé, R.-P.

Simova, E.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Strelsov, A.

Sugimoto, N.

Taylor, R. S.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Watanabe, M.

Yamasaki, K.

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

Appl. Opt. (3)

Appl. Phys. A (2)

S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, and H. Misawa, "Formation of embedded patterns in glasses using femtosecond irradiation," Appl. Phys. A 79, 1549 (2004).

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006).
[CrossRef]

Appl. Phys. Lett. (1)

S. Juodkazis, H. Misawa, T. Hashimoto, E. G. Gamaly and B. Luther-Davies, "Laser induced microexplosion confined in a bulk of silica: Formation of nanovoids," Appl. Phys. Lett. 88, 201909 (2006).
[CrossRef]

IEEE J. Quantum Electron. (1)

X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
[CrossRef]

J. Mater. Res. (1)

W. C. Oliver and G. M. Phar, "Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology," J. Mater. Res. 19, 3-20 (2004).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Express (1)

Opt. Lett. (2)

Other (2)

T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, and C. Depeursinge, "Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy," J. Opt. Soc. Am. A doc. ID 69126, (posted 5 July 2006, in press).

P. Bado, A. Said, M. Dugan, T. Sosnowski, and S. Wright "Dramatic improvements in waveguide manufacturing with femtosecond lasers," in NFOEC, Dallas, Sept. 2002.

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