Abstract

A room-temperature continuous-wave operation under optical pumping was demonstrated with GaInAsP/InP membrane buried-heterostructure (BH) distributed-feedback (DFB) laser directly bonded on an SOI substrate. A threshold pump power of 2.8 mW and a sub-mode suppression ratio of 28 dB were obtained with a cavity length of 120 μm and a stripe width of 2 μm.

© 2006 Optical Society of America

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References

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  1. M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
    [Crossref]
  2. H. Wada and T. Kamijoh , “ Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding ,” IEEE J. Quantum Electron.   8 173 – 175 ( 1996 ).
  3. T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
    [Crossref]
  4. T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
    [Crossref]
  5. T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
    [Crossref]
  6. S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
    [Crossref]
  7. T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .
  8. H. Park , A. W. Fang , S. Kodama , and J. E. Bowers , “ Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells ,” Opt. Express   13 9460 – 9464 ( 2005 ).
    [Crossref] [PubMed]

2005 (2)

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

H. Park , A. W. Fang , S. Kodama , and J. E. Bowers , “ Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells ,” Opt. Express   13 9460 – 9464 ( 2005 ).
[Crossref] [PubMed]

2004 (1)

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

2003 (1)

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

2001 (1)

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

1996 (1)

H. Wada and T. Kamijoh , “ Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding ,” IEEE J. Quantum Electron.   8 173 – 175 ( 1996 ).

1988 (1)

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Acher, O.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Arai, S.

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Blondeau, R.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Bowers, J. E.

Briliouet, F.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

C-Fan, J. C.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Defour, M.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Fang, A. W.

Kamijoh, T.

H. Wada and T. Kamijoh , “ Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding ,” IEEE J. Quantum Electron.   8 173 – 175 ( 1996 ).

Kodama, S.

Maruyama, T.

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Maurel, P.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Miura, K.

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Nishimoto, Y.

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Nunoya, N.

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

Okamoto, T.

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

Okumura, T.

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Omnes, F.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Onodera, Y.

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

Park, H.

Razeghi, M.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Sakamoto, S.

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

Salerno, J.

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Tamura, S.

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

Wada, H.

H. Wada and T. Kamijoh , “ Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding ,” IEEE J. Quantum Electron.   8 173 – 175 ( 1996 ).

Yamazaki, T.

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

Appl. Phys. Lett. (1)

M. Razeghi , M. Defour , R. Blondeau , F. Omnes , P. Maurel , O. Acher , F. Briliouet , J. C. C-Fan , and J. Salerno , “ First cw operation of a Ga 0.25 In 0.75 As 0.5 P 0.5 -InP laser on a silicon substrate ,” Appl. Phys. Lett.   53 2389 – 2390 ( 1988 ).
[Crossref]

Electron. Lett. (1)

T. Okamoto , N. Nunoya , Y. Onodera , S. Tamura , and S. Arai , “ Continuous wave operation of optically pumped membrane DFB laser ,” Electron. Lett.   37 1455 – 1457 ( 2001 ).
[Crossref]

IEEE J. Quantum Electron. (1)

H. Wada and T. Kamijoh , “ Room-temperature CW operation of InGaAsP lasers on Si fabricated by wafer bonding ,” IEEE J. Quantum Electron.   8 173 – 175 ( 1996 ).

IEEE J. Select. Topics in Quantum Electron. (2)

T. Okamoto , N. Nunoya , Y. Onodera , T. Yamazaki , S. Tamura , and S. Arai , “ Optically pumped membrane BH-DFB lasers for low-threshold and single-mode operation ,” IEEE J. Select. Topics in Quantum Electron.   9 1361 – 1366 ( 2003 ).
[Crossref]

S. Sakamoto , T. Okamoto , T. Yamazaki , S. Tamura , and S. Arai , “ Multiple-wavelength membrane BH-DFB laser arrays ,” IEEE J. Select. Topics in Quantum Electron.   11 1174 – 1179 ( 2005 ).
[Crossref]

IEEE Photon. Tech. Lett. (1)

T. Okamoto , T. Yamazaki , S. Sakamoto , S. Tamura , and S. Arai , “ Low-threshold membrane BH-DFB laser arrays with precisely controlled wavelength over a wide range ,” IEEE Photon. Tech. Lett.   16 1242 – 1244 ( 2004 ).
[Crossref]

Opt. Express (1)

Other (1)

T. Maruyama , T. Okumura , S. Sakamoto , K. Miura , Y. Nishimoto , and S. Arai , “ Direct bonding of GaInAsP/InP membrane structure on SOI wafer ,” presented at the 18th Indium Phospide and Related Materials Conference, Princeton, USA, 7-11, May 2006 .

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Figures (4)

Fig. 1.
Fig. 1.

Illustration of membrane DFB laser on SOI substrate.

Fig. 2.
Fig. 2.

Cross-sectional SEM view of (a) DFB structure before bonding and (b) the bonding interface between GaInAsP membrane and SOI.

Fig. 3.
Fig. 3.

Light output against pump power.

Fig. 4.
Fig. 4.

Lasing spectrum of membrane DFB laser and simulated resonant spectra for 0th, 1st and 2nd order transverse modes.

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