A phase shifting device (PZT) which is commonly applied in interferometry for phase measurement, unfortunately, has a nonlinear response to the applied voltage. In certain configurations such as, holographic moiré, where incorporation of two PZTs yields multiple phase information regarding the two orthogonal displacement components, the nonlinear response of the two PZTs yields highly erroneous result. In this context, we present for the first time a method for compensating multiple nonlinearities in the PZTs. Experimental results show the feasibility of the proposed method. The statistical performance of this method is also verified by comparing with the Cramér-Rao lower bound.
© 2006 Optical Society of AmericaPDF Article