Abstract

We demonstrate a silicon electro-optic modulator using a 10-micron-diameter microdisk resonator with a laterally integrated p-i-n diode surrounding essentially the entire microdisk. Our experiments reveal a modulation bandwidth of 510 MHz using a Q ~ 16,900 resonance mode under a square-wave drive voltage of ~0.9 V forward bias and ~-6 V reverse bias.

© 2006 Optical Society of America

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  5. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
    [CrossRef]
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  7. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
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  12. A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
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    [CrossRef]
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2006 (4)

D. Xu, S. Janz, and P. Cheben, "Design of polarization-insensitive ring resonators in silicon-on-insulator using MMI couplers and cladding stress engineering," IEEE Photon. Technol. Lett. 18, 343-345 (2006).
[CrossRef]

I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006).
[CrossRef]

C. Y. Chao and L. J. Guo, "Design and optimization of microring resonators in biochemical sensing applications," J. Lightwave Technol. 24, 1395-1402 (2006).
[CrossRef]

C. Manolatou and M. Lipson, "All-optical silicon modulators based on carrier injection by two-photon absorption," J. Lightwave Technol. 24, 1433-1439 (2006).
[CrossRef]

2005 (9)

M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13,1515-1530 (2005).
[CrossRef]

I. Kiyat, A. Aydinli, and N. Dagli, "High-Q silicon-on-insulator optical rib waveguide racetrack resonators," Opt. Express 13, 1900-1905 (2005).
[CrossRef]

D. K. Sparacin, C. Hong, L. C. Kimerling, J. Michel, J. P. Lock, and K. K Gleason, "Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material," Opt. Lett. 30, 2251-2253 (2005).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

T. Indukuri, P. Koonath, and B. Jalali, "Subterranean silicon photonics: demonstration of buried waveguide-coupled microresonators," Appl. Phys. Lett. 87, 081114 (2005).
[CrossRef]

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

M. M. Lee and M. C. Wu, "MEMS-actuated microdisk resonators with variable power coupling ratios," IEEE Photon. Technol. Lett. 17, 1034-1036 (2005).
[CrossRef]

S. Yamagata, T. Kato and Y. Kokobun, "Non-blocking wavelength channel switch using TO effect of double series-coupled microring resonator," Electron. Lett. 41, 593-595 (2005).
[CrossRef]

2004 (3)

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahibrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

2003 (2)

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1305 (2003).

1987 (1)

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon", IEEE J. Quant. Electron. 23, 123-129 (1987).
[CrossRef]

Almeida, V. R.

Avrahami, Y.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

Aydinli, A.

I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006).
[CrossRef]

I. Kiyat, A. Aydinli, and N. Dagli, "High-Q silicon-on-insulator optical rib waveguide racetrack resonators," Opt. Express 13, 1900-1905 (2005).
[CrossRef]

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Barbastathis, G.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bennett, B. R.

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon", IEEE J. Quant. Electron. 23, 123-129 (1987).
[CrossRef]

Benyattou, T.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bolivar, P. H.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahibrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

Bontoux, P.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Borselli, M.

Brière, M.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Campenhout, J. V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Chao, C. Y.

Cheben, P.

D. Xu, S. Janz, and P. Cheben, "Design of polarization-insensitive ring resonators in silicon-on-insulator using MMI couplers and cladding stress engineering," IEEE Photon. Technol. Lett. 18, 343-345 (2006).
[CrossRef]

Dagli, N.

I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006).
[CrossRef]

I. Kiyat, A. Aydinli, and N. Dagli, "High-Q silicon-on-insulator optical rib waveguide racetrack resonators," Opt. Express 13, 1900-1905 (2005).
[CrossRef]

Drouard, E.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Gaffiot, F.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Gleason, K. K

Guo, L. J.

Haus, H. A.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

Headley, W. R.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

Henschel, W.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahibrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

Hong, C.

Howe, S.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

Indukuri, T.

T. Indukuri, P. Koonath, and B. Jalali, "Subterranean silicon photonics: demonstration of buried waveguide-coupled microresonators," Appl. Phys. Lett. 87, 081114 (2005).
[CrossRef]

Jalali, B.

T. Indukuri, P. Koonath, and B. Jalali, "Subterranean silicon photonics: demonstration of buried waveguide-coupled microresonators," Appl. Phys. Lett. 87, 081114 (2005).
[CrossRef]

Janz, S.

D. Xu, S. Janz, and P. Cheben, "Design of polarization-insensitive ring resonators in silicon-on-insulator using MMI couplers and cladding stress engineering," IEEE Photon. Technol. Lett. 18, 343-345 (2006).
[CrossRef]

Johnson, T. J.

Kato, T.

S. Yamagata, T. Kato and Y. Kokobun, "Non-blocking wavelength channel switch using TO effect of double series-coupled microring resonator," Electron. Lett. 41, 593-595 (2005).
[CrossRef]

Kazmierczak, A.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Kimerling, L. C.

Kiyat, I.

I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006).
[CrossRef]

I. Kiyat, A. Aydinli, and N. Dagli, "High-Q silicon-on-insulator optical rib waveguide racetrack resonators," Opt. Express 13, 1900-1905 (2005).
[CrossRef]

Kokobun, Y.

S. Yamagata, T. Kato and Y. Kokobun, "Non-blocking wavelength channel switch using TO effect of double series-coupled microring resonator," Electron. Lett. 41, 593-595 (2005).
[CrossRef]

Koonath, P.

T. Indukuri, P. Koonath, and B. Jalali, "Subterranean silicon photonics: demonstration of buried waveguide-coupled microresonators," Appl. Phys. Lett. 87, 081114 (2005).
[CrossRef]

Kurz, H.

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahibrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

Lee, M. M.

M. M. Lee and M. C. Wu, "MEMS-actuated microdisk resonators with variable power coupling ratios," IEEE Photon. Technol. Lett. 17, 1034-1036 (2005).
[CrossRef]

Letartre, X.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Lipson, M.

Liu, A.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

Lock, J. P.

Lopez-Royo, F.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Manolatou, C.

Michel, J.

Mönster, M.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

Niehusmann, J.

Nielson, G. N.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

O’Connor, I.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Orobtchouk, R.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
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Panepucci, R. R.

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W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
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Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
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Rakich, P. T.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

Reed, G. T.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

Rojo-Romeo, P.

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Seneviratne, D.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
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R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon", IEEE J. Quant. Electron. 23, 123-129 (1987).
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Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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Tuller, H. L.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
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J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahibrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004).
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A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

Wahibrink, T.

Watts, M. R.

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
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Wiaux, V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Wouters, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
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Wu, M. C.

M. M. Lee and M. C. Wu, "MEMS-actuated microdisk resonators with variable power coupling ratios," IEEE Photon. Technol. Lett. 17, 1034-1036 (2005).
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Xu, D.

D. Xu, S. Janz, and P. Cheben, "Design of polarization-insensitive ring resonators in silicon-on-insulator using MMI couplers and cladding stress engineering," IEEE Photon. Technol. Lett. 18, 343-345 (2006).
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Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
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S. Yamagata, T. Kato and Y. Kokobun, "Non-blocking wavelength channel switch using TO effect of double series-coupled microring resonator," Electron. Lett. 41, 593-595 (2005).
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Appl. Phys. Lett. (2)

T. Indukuri, P. Koonath, and B. Jalali, "Subterranean silicon photonics: demonstration of buried waveguide-coupled microresonators," Appl. Phys. Lett. 87, 081114 (2005).
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W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85, 5523-5525 (2004).
[CrossRef]

Electron. Lett. (1)

S. Yamagata, T. Kato and Y. Kokobun, "Non-blocking wavelength channel switch using TO effect of double series-coupled microring resonator," Electron. Lett. 41, 593-595 (2005).
[CrossRef]

IEEE J. Quant. Electron. (1)

R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon", IEEE J. Quant. Electron. 23, 123-129 (1987).
[CrossRef]

IEEE Photon. Technol. Lett. (7)

I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006).
[CrossRef]

D. Xu, S. Janz, and P. Cheben, "Design of polarization-insensitive ring resonators in silicon-on-insulator using MMI couplers and cladding stress engineering," IEEE Photon. Technol. Lett. 18, 343-345 (2006).
[CrossRef]

A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O’Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
[CrossRef]

G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, Y. Avrahami, M. R. Watts, H. A. Haus, H. L. Tuller, and G. Barbastathis, "Integrated wavelength-selective optical MEMS switching using ring resonator filters," IEEE Photon. Technol. Lett. 17, 1190-1192 (2005).
[CrossRef]

M. M. Lee and M. C. Wu, "MEMS-actuated microdisk resonators with variable power coupling ratios," IEEE Photon. Technol. Lett. 17, 1034-1036 (2005).
[CrossRef]

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

J. Lightwave Technol. (2)

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
[CrossRef]

Opt. Express (2)

Opt. Lett. (3)

Other (3)

L. Zhou and A. W. Poon, "Silicon-on-insulator tunable waveguide-coupled microdisk resonators with selectively integrated p-i-n diodes," in Proceedings of Conference on Lasers Electro-Optics, Baltimore, MD (Optical Society of America, Washington, D. C., 2005).

G. T. Reed and A. P. Knights, Silicon Photonics, (John Wiley, Chichester UK 2004).

L. Pavesi and D. J. Lockwood (Eds.), Silicon Photonics, (Springer-Verlag, Berlin, Germany 2004).

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