Abstract

We demonstrate suspended micrometer-scale ring resonators with quality factors exceeding 15,000. The high quality factor is achieved by using a suspension method where the disturbance of the optical mode due to the support arms is minimized. We show an insertion loss of less than .02dB per suspension bridge.

© 2006 Optical Society of America

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References

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  1. Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
    [CrossRef] [PubMed]
  2. T. Baba and D. Sano, "Low-threshold lasing and Purcell effect in microdisk lasers at room temperature," IEEE J. Sel. Top. Quantum. 9,1340-1346 (2003).
    [CrossRef]
  3. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
    [CrossRef] [PubMed]
  4. O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
    [CrossRef] [PubMed]
  5. Q. Xu, V. R. Almeida, and M. Lipson, "Demonstration of high Raman gain in a submicrometer-size silicon-on-insulator waveguide," Opt. Lett. 30,35-37 (2005).
    [CrossRef] [PubMed]
  6. A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36,321-322 (2000).
    [CrossRef]
  7. V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature 431,1081-1084 (2004).
    [CrossRef] [PubMed]
  8. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
    [CrossRef]
  9. B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
    [CrossRef]
  10. V. R. Almeida, C. A. Barrios, R. R. Panepucci, M. Lipson, M. A. Foster, D. G. Ouzonnov, and A. L. Gaeta, "All-optical switching on a silicon chip," Opt. Lett. 29,2867-2869 (2004).
    [CrossRef]
  11. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
    [CrossRef]
  12. B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
    [CrossRef]
  13. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
    [CrossRef]
  14. T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
    [CrossRef]
  15. P. Rabiei, W. H. Steier, Z. Cheng, and L. R. Dalton, "Polymer micro-ring filters and modulators," J. Lightwave Technol.,  20,1968-1975 (2002).
    [CrossRef]

2005 (1)

2004 (7)

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
[CrossRef] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature 431,1081-1084 (2004).
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, M. Lipson, M. A. Foster, D. G. Ouzonnov, and A. L. Gaeta, "All-optical switching on a silicon chip," Opt. Lett. 29,2867-2869 (2004).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

2003 (2)

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

T. Baba and D. Sano, "Low-threshold lasing and Purcell effect in microdisk lasers at room temperature," IEEE J. Sel. Top. Quantum. 9,1340-1346 (2003).
[CrossRef]

2002 (1)

2000 (1)

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36,321-322 (2000).
[CrossRef]

1999 (1)

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

1998 (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

1997 (1)

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Akahane, Y.

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

Almeida, V. R.

Asano, T.

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

Baba, T.

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

T. Baba and D. Sano, "Low-threshold lasing and Purcell effect in microdisk lasers at room temperature," IEEE J. Sel. Top. Quantum. 9,1340-1346 (2003).
[CrossRef]

Baehr-Jones, T.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

Barrios, C. A.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature 431,1081-1084 (2004).
[CrossRef] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, M. Lipson, M. A. Foster, D. G. Ouzonnov, and A. L. Gaeta, "All-optical switching on a silicon chip," Opt. Lett. 29,2867-2869 (2004).
[CrossRef]

Cheng, Z.

Chu, S. T.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Chu, S.T.

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Dalton, L. R.

Dapkus, P. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Foresi, J.

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Foster, M. A.

Fukazawa, T.

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

Gaeta, A. L.

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Haus, H. A.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Haus, H.A.

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Hirano, T.

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

Hochberg, M.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

Ippen, E. P.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Kartik, S.

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

Kim, I.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Kimerling, L. C.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Kippenberg, T. J.

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

Laine, J.P.

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Lee, R. K.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Lipson, M.

Little, B. E.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Little, B.E.

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

Matthew, B.

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

Noda, S.

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

O'Brien, J. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Ohno, F.

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

Oskar, P.

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

Ouzonnov, D. G.

Painter, O.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Panepucci, R. R.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature 431,1081-1084 (2004).
[CrossRef] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, M. Lipson, M. A. Foster, D. G. Ouzonnov, and A. L. Gaeta, "All-optical switching on a silicon chip," Opt. Lett. 29,2867-2869 (2004).
[CrossRef]

Paul, E. B.

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

Rabiei, P.

Sano, D.

T. Baba and D. Sano, "Low-threshold lasing and Purcell effect in microdisk lasers at room temperature," IEEE J. Sel. Top. Quantum. 9,1340-1346 (2003).
[CrossRef]

Scherer, A.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Song, B.-S.

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

Spillane, S. M.

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
[CrossRef] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

Steier, W. H.

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Thoen, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

Vahala, K. J.

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
[CrossRef] [PubMed]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

Xu, Q.

Yariv, A.

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36,321-322 (2000).
[CrossRef]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

Appl. Phys. Lett. (3)

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip," Appl. Phys. Lett. 85,6113-6115 (2004).
[CrossRef]

B. Matthew, S. Kartik, E. B. Paul, and P. Oskar, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004).
[CrossRef]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q ring resonators in thin silicon-on-insulator," Appl. Phys. Lett. 85,3346-3347 (2004).
[CrossRef]

Electron. Lett. (1)

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36,321-322 (2000).
[CrossRef]

IEEE J. Sel. Top. Quantum. (1)

T. Baba and D. Sano, "Low-threshold lasing and Purcell effect in microdisk lasers at room temperature," IEEE J. Sel. Top. Quantum. 9,1340-1346 (2003).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10,549-551 (1998).
[CrossRef]

J. Lightwave Technol. (2)

B.E. Little, S.T. Chu, H.A. Haus, J. Foresi, and J.P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997).
[CrossRef]

P. Rabiei, W. H. Steier, Z. Cheng, and L. R. Dalton, "Polymer micro-ring filters and modulators," J. Lightwave Technol.,  20,1968-1975 (2002).
[CrossRef]

Jpn. J. Appl. Phys. (1)

T. Fukazawa, T. Hirano, F. Ohno, and T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 143,646-647 (2004).
[CrossRef]

Nature (2)

Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425,944-947 (2003).
[CrossRef] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature 431,1081-1084 (2004).
[CrossRef] [PubMed]

Opt. Lett. (2)

Phys. Rev. Lett. (1)

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala," Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93,083904-1 (2004).
[CrossRef] [PubMed]

Science (1)

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O'Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1.
Fig. 1.

Layout of suspended ring resonator with corresponding dimensions LA=0.8µm, LB,RB=8µm, LP,LS,RR=5µm, WA=0.2µm, and WB=1.4µm

Fig. 2.
Fig. 2.

Optical mode profile of waveguide for TE-like polarized light at 1.55µm

Fig. 3.
Fig. 3.

(a) SEM image showing the effect caused by non-conformal oxide cladding. (b) SEM image showing a fully fabricated device

Fig. 4.
Fig. 4.

(a) Output spectra for three different fabricated devices. (b) Resonance showing a Q of approximately 15,000.

Equations (2)

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α eff L = α scat ( 2 L S + 2 π R R ) 2 ln ( T B ) ln ( 1 κ 2 )
F S R λ 0 2 n g ( λ ) L

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