A subspace-based method is applied to phase shifting interferometry for obtaining in real time values of phase shifts between data frames at each pixel point. A generalized phase extraction algorithm then allows for computing the phase distribution. The method is applicable to spherical beams and is capable of handling nonsinusoidal waveforms in an effective manner. Numerical simulations demonstrate phase measurement with high accuracy even in the presence of noise.
© 2005 Optical Society of America
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