Abstract

An interferential technique is described to eliminate polarized scattering from optical substrates and coatings. Conditions of annulment are respectively given for surface roughness and for bulk heterogeneity, at each direction of space. At low-level scattering, the method offers a complete discrimination of surface and bulk effects, whatever the micro-structural parameters. Arbitrary scattering levels can be treated in a similar way, but require the knowledge of microstructure.

© 2005 Optical Society of America

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    [CrossRef]
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  22. S. Kassam, A. Duparré, K. helm, P. Bussemer, and J. Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992).
  23. C. Amra, C. Grèzes-Besset, and L. Bruel, "Comparison of surface and bulk scattering in optical coatings," Appl. Opt. 32, 5492-5503 (1993).
  24. P. Bussemer, K. Hehl, and S. Kassam, "Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack," Waves in Random Media 1, 207-221 (1991).
    [CrossRef]
  25. C. Amra, D. Torricini, and P. Roche, "Multiwavelength (0.45 - 10.6 µm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993).
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    [CrossRef]

Appl. Opt. (12)

J. H. Apfel, "Optical coating design with reduced electric field intensity," Appl. Opt. 16, (1977).

J. M. Elson, J. P. Rahn, and J. M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment," Appl. Opt. 19, 669-679 (1980).

J. M. Elson, J. P. Rahn, and J. M. Bennett, "Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation-length, and roughness cross-correlation properties," Appl. Opt. 22, 3207-3219 (1983).

C. Amra, G. Albrand, P. Roche, "Theory and application of antiscattering single layers: antiscattering antireflection coatings," Appl. Opt. 25, 2695 (1986).

C. Amra, J. H. Apfel, and E. Pelletier, "The role of interface correlation in light scattering by a multilayer," Appl. Opt. 31, 3134-3151 (1992).

C. Amra, D. Torricini, and P. Roche, "Multiwavelength (0.45 - 10.6 µm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993).

C. Deumié, H. Giovannini, and C. Amra, "Ellipsometry of light scattering from multilayer coating," Appl. Opt. 35, 5600-5608 (1996).

S. Kassam, A. Duparré, K. helm, P. Bussemer, and J. Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992).

C. Amra, C. Grèzes-Besset, and L. Bruel, "Comparison of surface and bulk scattering in optical coatings," Appl. Opt. 32, 5492-5503 (1993).

S. Maure, G. Albrand, and C. Amra, "Low-level scattering and localized defects," Appl. Opt. 35, 5573-5582 (1996).

H. Giovannini and C. Amra, "Scattering reduction effect with overcoated rough surfaces : theory and experiment," Appl. Opt. 36, 5574-5579 (1997).

C. Deumié, H. Giovannini, and C. Amra, "Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings," Appl. Opt. 41, 3362-3369 (2002).

Characterization and Metrology (1)

T.A. Germer, "Characterizing interfacial roughness by light scattering ellipsometry," in Proceedings of Characterization and Metrology for ULSI Technology: 2000 International Conference, Vol. 550 (AIP, New York, 2001) pp. 186-190.

J. Opt. Soc. Am. A (6)

Laser Induced Damage in Optical Material (1)

C. Amra, "Minimizing scattering in multilayers: technique for searching optimal realization conditions," Proceedings of Laser induced damage in optical materials, 756, 265-271, (1987).

Opt. Express (1)

O. Gilbert, C. Deumié, and C. Amra, "Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks," Opt. Express 13, 2403-2418 (2005) <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-7-2403">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-7-2403</a>.

Opt. Lett. (1)

Proc. Royal Society of Edinburgh 1993 (1)

P. A. Martin and P. Ola, "Boundary integral equations for the scattering of electromagnetic waves by a homogeneous dielectric obstacle," Proc. Roy. Soc. Edinburgh, 123A, pp. 185-208 (1993).

Proc. SPIE (1)

T. A. Germer, T. Rinder, H. Rothe, "Polarized light scattering measurements of polished and etched steel surfaces", in "Scattering and Surface Roughness III," Proc. SPIE 4100, 148-155 (2000).

Rev. Sci. Instrum. (1)

T. A. Germer and C. C. Asmail, "Goniometric optical scatter instrument for out-of-plane ellipsometry measurements," Rev. Sci. Instrum 70(9), 3688-3695 (1999).
[CrossRef]

Waves in Random Media (2)

P. Bussemer, K. Hehl, and S. Kassam, "Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack," Waves in Random Media 1, 207-221 (1991).
[CrossRef]

M. Saillard and A. Sentenac, "Rigorous solution for electromagnetic scattering from rough surfaces," Waves in Random Media 11, 103-137 (2001).
[CrossRef]

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