Abstract

In this paper we study the effect of contamination induced by fabrication process on laser damage density of fused silica polished parts at 351 nm in nanosecond regime. We show, owing to recent developments of our raster scan metrology, that a good correlation exists between damage density and concentration of certain contaminants for the considered parts.

© 2005 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |

  1. M. L. André, "Status of the LMJ project," in Solid state lasers for application to Inertial Confinement Fusion: Second Annual International Conference, M. L. André, ed., Proc. SPIE 3047, pp. 38-42 (1996).
  2. W. H. Lowdermilk, "Status of the National Ignition Facility project", in Solid state lasers for application to Inertial Confinement Fusion: Second Annual International Conference, M. L. André, ed., Proc. SPIE 3047, pp. 16-37 (1996).
  3. H. Bercegol, P. Bouchut, L. Lamaignere, B. Le Garrec, G. Raze, "The impact of laser damage on the lifetime of optical components in fusion lasers," in Proceedings of Laser-induced Damage in Optical Materials : 2003, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 5273, pp 312-324 (2004).
    [CrossRef]
  4. J. A. Menapace, B. Penetrante, D. Golini, A. F. Slomba, P. E. Miller, T. G. Parham, M. Nichols, J. Peterson., "Combined advanced finishing and UV-laser conditioning for producing UV damage resistant fused silica optics," in Proceedings Proceedings of Laser-induced Damage in Optical Materials, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 4679, 56-68 (2001)
    [CrossRef]
  5. D. W. Camp et al., "Subsurface damage and polishing compound affect the 355 nm laser damage threshold of fused silica surfaces," in Proceedings of Laser-induced Damage in Optical Materials, Proc. SPIE 3244, 356-364 (1998).
    [CrossRef]
  6. M. D. Feit, A. M. Rubenchik, "Influence of subsurface cracks on laser induced surface damage," in Proceedings of Laser-induced Damage in Optical Materials : 2003, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 5273, pp 264-272 (2004).
    [CrossRef]
  7. L. Gallais, P. Voarino and C. Amra, "Optical measurement of size and complex index of laser-damage precursors: the inverse problem," J. Opt. Soc. Am. B 21, 1073-1080 (2004).
    [CrossRef]
  8. B. Bertrussi, J. Y. Natoli, M. Commandré, "Effects of polishing process on silica surface laser-induced damage threshold at 355nm", Optics Com 242, Issues 1-3 (2004).
  9. S. Papernov and A. W. Schmid, "Correlations between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulse-laser radiation," J. Appl. Phys. 92, 5720-5728 (2002).
    [CrossRef]
  10. F. Bonneau, P. Combis, J. L. Rullier, J. Vierne, H. Ward, M. Pellin, M. Savina, M. Broyer, E. Cottancin, J. Tuaillon, M. Pellarin, L. Gallais, J. Y. Natoli, M. Perra, H. Bercegol, L. Lamaignere, M. Loiseau and J. T. Donohue "Study of UV laser interaction with gold nanoparticles embedded in silica," J. Appl. Phys. B 75, 803-815 (2002).
    [CrossRef]
  11. T. S. Izumitani, "Optical Glass," Kyoritsu Shuppan Company LTD Publishers (1985).
  12. L. M. Cook, "Chemical proceeses in glass polishing," J. Non-Crys. Solid 120, 152-171 (1990)
    [CrossRef]
  13. H. Yokota, H. Sakata, M. Nishibori and K. Kinoshita, "Ellipsometric study of polished glass surfaces," Surface Science 16 (1969)
    [CrossRef]
  14. L. Nevot and P. Croce, "Caractérisations des surfaces par refléxion rasante de rayons X, application à l'étude du polissage de quelques verres silicates," Rev. Phys. Appl. 15 (1980)
    [CrossRef]
  15. J. P. Marioge, "Surfaces Optiques," EDP Sciences, pp 229-231 (2000)
  16. M. R. Kozlowski, J. Carr, I. Hutcheon, R. Torres, L. Sheehan, D. Camp and M. Yan, "Depth profiling of polishing-induced contamination on fused silica surface," in Proceedings of Laser-induced Damage in Optical Materials : 1997, G. J. Exarhos, A. H. Guenther, M. R. Kozlowki, M. J. Soileau Eds , Proc. SPIE 3244, 365-375 (1997)
    [CrossRef]
  17. L. Lamaignère, M. Loiseau, J.C. Poncetta and H. Bercegol, "Towards an Absolute Damage Density: The Rasterscan Procedure for Large Optics," in preparation.
  18. M. Josse, R. Courchinoux, L. Lamaignere, J. C. Poncetta, T. Donval, H. Bercegol, "Computer-controlled measurements of laser-induced damage statistics on large optics," in Proceedings of Laser-induced Damage in Optical Materials : 2004, G. J. Exarhos, A. H. Guenther, M. R. Kozlowki, M. J. Soileau Eds , Proc. SPIE 5647, 365-372 (2005)
    [CrossRef]

EDP Sciences (1)

J. P. Marioge, "Surfaces Optiques," EDP Sciences, pp 229-231 (2000)

J. Appl. Phys. (1)

S. Papernov and A. W. Schmid, "Correlations between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulse-laser radiation," J. Appl. Phys. 92, 5720-5728 (2002).
[CrossRef]

J. Appl. Phys. B (1)

F. Bonneau, P. Combis, J. L. Rullier, J. Vierne, H. Ward, M. Pellin, M. Savina, M. Broyer, E. Cottancin, J. Tuaillon, M. Pellarin, L. Gallais, J. Y. Natoli, M. Perra, H. Bercegol, L. Lamaignere, M. Loiseau and J. T. Donohue "Study of UV laser interaction with gold nanoparticles embedded in silica," J. Appl. Phys. B 75, 803-815 (2002).
[CrossRef]

J. Non-Crys. Solid (1)

L. M. Cook, "Chemical proceeses in glass polishing," J. Non-Crys. Solid 120, 152-171 (1990)
[CrossRef]

J. Opt. Soc. Am. B (1)

Optics Comm. (1)

B. Bertrussi, J. Y. Natoli, M. Commandré, "Effects of polishing process on silica surface laser-induced damage threshold at 355nm", Optics Com 242, Issues 1-3 (2004).

Proc. SPIE (8)

M. R. Kozlowski, J. Carr, I. Hutcheon, R. Torres, L. Sheehan, D. Camp and M. Yan, "Depth profiling of polishing-induced contamination on fused silica surface," in Proceedings of Laser-induced Damage in Optical Materials : 1997, G. J. Exarhos, A. H. Guenther, M. R. Kozlowki, M. J. Soileau Eds , Proc. SPIE 3244, 365-375 (1997)
[CrossRef]

M. Josse, R. Courchinoux, L. Lamaignere, J. C. Poncetta, T. Donval, H. Bercegol, "Computer-controlled measurements of laser-induced damage statistics on large optics," in Proceedings of Laser-induced Damage in Optical Materials : 2004, G. J. Exarhos, A. H. Guenther, M. R. Kozlowki, M. J. Soileau Eds , Proc. SPIE 5647, 365-372 (2005)
[CrossRef]

M. L. André, "Status of the LMJ project," in Solid state lasers for application to Inertial Confinement Fusion: Second Annual International Conference, M. L. André, ed., Proc. SPIE 3047, pp. 38-42 (1996).

W. H. Lowdermilk, "Status of the National Ignition Facility project", in Solid state lasers for application to Inertial Confinement Fusion: Second Annual International Conference, M. L. André, ed., Proc. SPIE 3047, pp. 16-37 (1996).

H. Bercegol, P. Bouchut, L. Lamaignere, B. Le Garrec, G. Raze, "The impact of laser damage on the lifetime of optical components in fusion lasers," in Proceedings of Laser-induced Damage in Optical Materials : 2003, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 5273, pp 312-324 (2004).
[CrossRef]

J. A. Menapace, B. Penetrante, D. Golini, A. F. Slomba, P. E. Miller, T. G. Parham, M. Nichols, J. Peterson., "Combined advanced finishing and UV-laser conditioning for producing UV damage resistant fused silica optics," in Proceedings Proceedings of Laser-induced Damage in Optical Materials, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 4679, 56-68 (2001)
[CrossRef]

D. W. Camp et al., "Subsurface damage and polishing compound affect the 355 nm laser damage threshold of fused silica surfaces," in Proceedings of Laser-induced Damage in Optical Materials, Proc. SPIE 3244, 356-364 (1998).
[CrossRef]

M. D. Feit, A. M. Rubenchik, "Influence of subsurface cracks on laser induced surface damage," in Proceedings of Laser-induced Damage in Optical Materials : 2003, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, Eds, Proc. SPIE 5273, pp 264-272 (2004).
[CrossRef]

Rev. Phys. Appl. (1)

L. Nevot and P. Croce, "Caractérisations des surfaces par refléxion rasante de rayons X, application à l'étude du polissage de quelques verres silicates," Rev. Phys. Appl. 15 (1980)
[CrossRef]

Surface Science (1)

H. Yokota, H. Sakata, M. Nishibori and K. Kinoshita, "Ellipsometric study of polished glass surfaces," Surface Science 16 (1969)
[CrossRef]

Other (2)

T. S. Izumitani, "Optical Glass," Kyoritsu Shuppan Company LTD Publishers (1985).

L. Lamaignère, M. Loiseau, J.C. Poncetta and H. Bercegol, "Towards an Absolute Damage Density: The Rasterscan Procedure for Large Optics," in preparation.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1 :
Fig. 1 :

Damage density versus fluence. Sample B2. Blue and red points represent respectively treated and “treated + corrected” data. The corrective factors are 1.5 and 21 respectively for the flat bottom and the power law.

Fig. 2.
Fig. 2.

Sample digestion scheme

Fig. 3.
Fig. 3.

Depth profiles of impurities concentrations for sample B2

Fig. 4.
Fig. 4.

Effect of cerium content on damage density.

Fig. 5.
Fig. 5.

Effect of Fe content on damage density.

Fig. 6.
Fig. 6.

(a) Gray haze damage, part B1 (b) typical damage morphology on part A4

Tables (5)

Tables Icon

Table 1. Sample preparation methods

Tables Icon

Table 2. ICP-AES instrumental conditions

Tables Icon

Table 3. wavelengths for impurities ICP measurements

Tables Icon

Table 4. Sample characterization: damage density and impurity concentration for each element in ng/μm

Tables Icon

Table 5. Influence of each element on damage density

Metrics