Abstract

We describe the fabrication of freestanding optical fibers in a glass chip by femtosecond laser three-dimensional (3D) micromachining. The process has mainly four steps: (1) femtosecond laser scanning of the areas surrounding the fibers; (2) postannealing of the sample for the modification of the exposed areas; (3) chemical etching of the sample for the selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the fibers. The measured optical loss of the fibers is approximately 0.7dB/cm. Integrating the freestanding fibers with 3D micromirrors is also demonstrated, enabling functions such as light folding or splitting in the glass chips. Furthermore, we demonstrate that the freestanding fibers can be incorporated into a microfluidic circuit for on-chip biophotonic applications.

© 2005 Optical Society of America

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  1. Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
    [Crossref]
  2. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26, 277–279 (2001).
    [Crossref]
  3. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).
  4. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
    [Crossref] [PubMed]
  5. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
    [Crossref] [PubMed]
  6. K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).
  7. Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29, 2007 (2004).
    [Crossref] [PubMed]
  8. Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
    [Crossref] [PubMed]
  9. S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.
  10. H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.
  11. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
    [Crossref]
  12. T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
    [Crossref]

2005 (1)

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

2004 (2)

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29, 2007 (2004).
[Crossref] [PubMed]

2003 (4)

2002 (1)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

2001 (2)

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26, 277–279 (2001).
[Crossref]

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

1999 (1)

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Aoki, N.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

Cheng, Y.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29, 2007 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

Fuqua, P. D.

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

Hansen, W. W.

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

Helvajian, H.

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

Herman, P. R.

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

Hirao, K.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Ho, S.

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

Hongo, T.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

Janson, S.

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

Juodkazis, S.

Kawachi, M.

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

Kondo, Y.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Marcinkevicius, A.

Masuda, M.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

Matsuo, S.

Midorikawa, K.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29, 2007 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

Misawa, H.

Mitsuyu, T.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Miwa, M.

Miyamoto, J.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

Niino, H.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

Nishii, J.

Qiu, J.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Shihoyama, K.

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

Sugioka, K.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29, 2007 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, Opt. Express 11, 1809 (2003); http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-15-1809.
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional microoptical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28, 1144–1146 (2003).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28, 55–57 (2003).
[Crossref] [PubMed]

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

Takai, H.

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

Toyoda, K.

Watanabe, M.

Yoko, T.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Appl. Phys. (2)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A76, 857–860 (2003).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, “Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,” Appl. Phys. A79, 815–817 (2004).

J. Appl. Phys. (1)

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,” J. Appl. Phys. 97, 063517 (2005)
[Crossref]

Jpn. J. Appl. Phys. (1)

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, “Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,” Jpn. J. Appl. Phys. 38, L1146–L1148 (1999).
[Crossref]

Opt. Express (1)

Opt. Lett. (4)

RIKEN Review (1)

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, “Laser microprocessing for nanosatellite microthruster applications,” RIKEN Review 32, 57–63 (2001), http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf.

SPIE Proc. (1)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, “3D microfabrication in photosensitive glass by femtosecond laser,” SPIE Proc. 4830, 576–580 (2002).
[Crossref]

Other (1)

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, “Direct ultrafast laser writing of buried waveguides in Foturan glass,” in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

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Figures (5)

Fig. 1.
Fig. 1.

(a) 3D schematic drawing of a freestanding optical fiber integrated with a micromirror fabricated on a glass chip. Red arrows show the optical path of the coupling scheme. (b) Optical micrograph of the top view of the freestanding fiber and the micromirror. The inset (upper right corner) shows the cross section of the fabricated fiber. (c) Digital-camera-captured image of the side coupling of a He-Ne laser beam into the freestanding fiber through the micromirror.

Fig. 2.
Fig. 2.

Transmittance of the freestanding fiber as a function of fiber length. The dash line in this figure indicates the linear least-square fitting of the data.

Fig. 3.
Fig. 3.

(a) Photograph of the structure forming a light path folded twice on the glass chip. (b) Optical micrograph of the folding point which combines two orthogonal fibers and one micromirror. (c) Side view image of the guiding He-Ne light in the structure. (d) Front view image of the exiting surface of the structure, showing both the scattered coupling light and the guided light.

Fig. 4.
Fig. 4.

(a) Photograph of the microoptical circuit. (b) Optical micrograph of the splitting point which combines three fibers and one microbeam splitter. (c) Front view image of the exiting surface of the structure, showing both the scattering light at the microbeam splitter and the two split light spots at the exits of the two fiber arms.

Fig. 5.
Fig. 5.

(a) 3D schematic drawing of two freestanding optical fibers intercepted by a microwell fabricated on a glass chip. (b) Optical micrograph of the structure. (c) Image of the guiding He-Ne light through the entire structure. Scattering light at microwell and the guided light at the exit facet of the second fiber are indicated by arrows.

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