Abstract

Channel waveguides were formed on fused silica substrate by Ge-ion implantation with lithographically defined channels. Thermal poling was performed to form second order optical nonlinearity (SON) in the waveguides. Periodical photo masks were designed and fabricated on a mask glass. Periodical erasure of the SON in the channel waveguides by 266 nm UV light with the photo mask on the fused silica substrate produced periodical SON distribution in the waveguides. First order quasi-phase-matching second-harmonic generation from 1064 nm to 532 nm was demonstrated in the channel waveguides.

© 2005 Optical Society of America

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Appl. Phys.

H.Y. Chen, C.L.Lin, Y.H. Yang, S.Chao, H.Niu, and C.T.Shih, �??Creation of second-order nonlinearity and quasi-phase-matched second harmonic generation in Ge-implanted fused silica planar waveguide,�?? Appl. Phys. Lett. 86, 081107 (2005).

Appl. Phys. Lett.

A.L.C. Triques, I.C.S. Carvalho, M.F. Moreira, H.R. Carvalho, R. Fischer, B. Lesche, and W. Margulis, �?? Time evolution of depletion region in poled silica,�?? Appl. Phys. Lett. 82, 2948-2950 (2003).
[CrossRef]

V. Pruneri, F. Samoggia, G. Bonfrate, P. G. Kazansky, and G. M. Yang, �??Thermal poling of silica in air and under vacuum: The influence of charge transport on second harmonic generation,�?? Appl. Phys. Lett. 74, 2423-2425 (1999).
[CrossRef]

IEEE J. Quantum Electron.

M. M. Fejer, G. A. Magel, D. H. Jundt, and R. L. Byer, �??Quasi-phase-matched second harmonic generation: tuning and tolerances ,�?? IEEE J. Quantum Electron. 28, 2631-2654 (1992).
[CrossRef]

J. Appl. Phys.

H. Y. Chen, J. S. Sue, Y.H. Lin, C. S. Tsai, P. T. Wu, and S. Chao �?? Thermal poling and ultraviolet erasure characteristics of type-III ultraviolet-grade fused silica and application to periodic poling on planar substrates�?? J. Appl. Phys. 94, 1531-1538 (2003).
[CrossRef]

Opt. Express

Opt. Let.

W. Margulis and F. Laurell, �??Interferometric study of poled glass under etching,�??Opt. Lett. 21, 1786-1788 (1996).

Opt. Lett.

Other

J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids, (Pergamon, New York, 1985).

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