Abstract

We present the final film thickness�?? expression of spin-coated photoresist on a spherical substrate. Firstly, some reasonable assumptions are put forward for a concise derivation process. Then, on the basis of the motion equation of spin-coated photoresist on a plane, considering the spherical surface shape, we put forward the motion equation of spin-coated photoresist on a spherical substrate. So two evolution equations of film thickness and radial position are derived, and the expression of initial film thickness evolution in a radial position is also gained. Finally, considering some effects of solvent volatilization, we gain the expression of final film thickness. The experiment result indicates that the expression is accurate.

© 2005 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  8. Hongda Yue, Longfa Pan, Yuejing Bin, et al, �??Mechanics analysis in CD-R dye coating process,�?? Proc. SPIE 4930, 253-257 (2002).
  9. Peter C. Sukanek, �??Spin Coating,�?? J. Imaging Technol. 11, 184-190 (1985).

Encyclopedia of Surface and Colloid Sci.

S.B.G. O�??Brien and L.W. Schwartz, �??Theory and modeling of thin film flows,�?? Encyclopedia of Surface and Colloid Science, Marcel Dekker, New York, 5283-5297 (2002).

Int. J. Non-linear Mech.

T. G. Myers and J. P. F. Charpin, �??The effect of the coriolis force on axisymmetric rotating thin film flows,�?? Int. J. Non-linear Mech. 36, 629-635 (2001).

J. Appl. Phys.

A. G. Emslie, F.T. Bonner, L.G. Peck, �??Flow of a viscous liquid on a rotating disk,�?? J. Appl. Phys. 29, 858-862 (1958).
[CrossRef]

A. Acrivos, M. J. Shah, and E. E. Petersen, �??On the flow of a non-newtonian liquid on a rotating disk,�?? J. Appl. Phys. 31, 963-968 (1960).
[CrossRef]

D. Meyerhofer, �??Characteristics of resist films produced by spinning,�?? J. Appl. Phys. 49, 3993-3997 (1978).
[CrossRef]

J. Imaging Technol.

Peter C. Sukanek, �??Spin Coating,�?? J. Imaging Technol. 11, 184-190 (1985).

Opt. Express

Proc. SPIE

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, �??Measurement of a convex secondary mirrorusing a holographic test plat,�?? in Proc. SPIE 2199, 193-198 (1994).

Hongda Yue, Longfa Pan, Yuejing Bin, et al, �??Mechanics analysis in CD-R dye coating process,�?? Proc. SPIE 4930, 253-257 (2002).

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