Abstract

Techniques based on laser scanning microscopes for nanoprocessing of periodic structures on silicon with ultra-short laser pulses have been developed. Ripples of 800–900 nm spacing were obtained after laser irradiation at a wavelength of 1040 nm, a repetition rate of 10 kHz and a fluence of 2 J/cm2 in air. Smaller features of 70–100nm spacing were achieved in oil at a wavelength of 800 nm, a repetition rate of 90 MHz and a fluence of 200–300 mJ/cm2 by using a high numerical focusing objective.

© 2005 Optical Society of America

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Appl. Phys. A

J. Pedraza, J. D. Fowlkes and D. H. Lowndes, �??Self-organized silicon microcolumn arrays generated by pulsed laser irradiation,�?? Appl. Phys. A 69, 731 (1999)
[CrossRef]

J. Pedraza, J. D. Fowlkes and Y. F. Guan, �??Surface nanostructuring of silicon,�?? Appl. Phys. A 77, 277 (2003)

N. Bärsch, K. Körber, A. Ostendorf and K.H. Tönshoff, �??Ablation and cutting of planar silicon devices using femtosecond laser pulses,�?? Appl. Phys. A 77, 237 (2003)

T. H. Her, R. J. Finlay, C. Wu and E. Mazur, �??Femtosecond laser-induced formation of spikes on silicon,�?? Appl. Phys. A 70, 383 (2000)
[CrossRef]

A. Borowiec, M. Mackenzie, G. C. Weatherly and H. K. Haugen, �??Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon,�?? Appl. Phys. A 76, 201 (2003)
[CrossRef]

W. Kautek, P. Rudolph, G. Daminelli and J. Krüger, �??Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructure,�?? Appl. Phys. A 81, 65 (2005)
[CrossRef]

Appl. Phys. Lett.

M. Y. Shen, C. H. Crouch, J. E. Carey and E. Mazur, �??Femtosecond laser-inducedformation of submicrometer spikes on silicon in water,�?? Appl. Phys. Lett. 85, 5694 (2004)
[CrossRef]

P. M. Fauchet and A. E. Siegman, �??Surface ripples on silicon and gallium arsenide under picosecond laser illumination,�?? Appl. Phys. Lett. 40, 824 (1982)
[CrossRef]

C. H. Crouch, J. E. Carey, J. M. Warrender, M. J. Aziz, E. Mazur and F. Y. Génin, �??Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon,�?? Appl. Phys. Lett. 84, 1850 (2004)
[CrossRef]

Appl. Surf. Sci.

S. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, W. Weaver and H. Champoux, �??Femtosecond laser microstructuring of materials,�?? Appl. Surf. Sci. 127-129, 875 (1999

M. Weingärtner, R. Elschner and O. Bostanjoglo, �??Patterning of silicon �?? Differences between ns and fs laser pulses,�?? Appl. Surf. Sci. 138-139, 499 (1999)
[CrossRef]

J. Appl. Phys.

A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, M. Schreiner and D. Von der Linde, �??Femtosecond melting and ablation of semiconductors studied with time of flight mass spectroscopy,�?? J. Appl. Phys. 85, 3301 (1999)
[CrossRef]

Opt. Lett.

Phys. Rev. B

J. E. Sipe, J. F. Young, J. S. Preston and H. M. Van Driel, �??Laser-induced periodic surface structure. I. Theory,�?? Phys. Rev. B 27, 1141 (1983)
[CrossRef]

Z. Guosheng, P. M. Fauchet and A. E. Siegman, �??Growth of spontaneous periodic surface structures on solids during laser illumination,�?? Phys. Rev. B 26, 5366 (1982)
[CrossRef]

J. F. Young, J. S. Preston, H. M. van Driel and J. E. Sipe, �??Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass,�?? Phys. Rev. B 27, 1155 (1983)
[CrossRef]

Thin Solid Films

G. Daminelli, J. Krüger and W. Kautek, �??Femtosecond laser interaction with silicon under water confinement,�?? Thin Solid Films 467, 334 (2004)
[CrossRef]

Other

D. Bäuerle, Laser Processing and Chemistry (Springer-Verlag, Berlin, Heidelberg, New York 2000)

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Figures (4)

Fig.1.
Fig.1.

Schematic diagram of experimental setup

Fig. 2.
Fig. 2.

SEM images of the periodic structures formed in air after laser irradiation (10 kHz, 1μJ/pulse, 350 fs, 1040 nm); use of a 20x focusing objective (NA: 0.5)

Fig. 3.
Fig. 3.

SEM images of the periodic structures formed in oil confinement after laser irradiation (90 MHz, 3.5 nJ/pulse, 350 fs, 170 fs, 800 nm); use of a 40x oil focusing objective (NA: 1.3)

Fig. 4.
Fig. 4.

SEM images of a nanostructured 2D array created after multi scans laser irradiation in oil confinement with periodic nanochannels of sub-100 nm. (90 MHz, 3.5 nJ/pulse, 350 fs, 170 fs, 800 nm, 40x oil focusing objective, NA: 1.3).

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