Abstract

High-repetition rate femtosecond lasers are shown to drive heat accumulation processes that are attractive for rapid writing of low-loss optical waveguides in transparent glasses. A novel femtosecond fiber laser system (IMRA America, FCPA µJewel) providing variable repetition rate between 0.1 and 5 MHz was used to study the relationship between heat accumulation and resulting waveguide properties in fused silica and various borosilicate glasses. Increasing repetition rate was seen to increase the waveguide diameter and decrease the waveguide loss, with waveguides written with 1-MHz repetition rate yielding ~0.2-dB/cm propagation loss in Schott AF45 glass. A finite-difference thermal diffusion model accurately tracks the waveguide diameter as cumulative heating expands the modification zone above 200-kHz repetition rate.

© 2005 Optical Society of America

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References

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  1. P.R. Herman, R.S Marjoribanks, and A. Oettl, “Burst-ultrafast laser machining method,” US Patent (6,552,301 B2)
  2. C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
    [Crossref]
  3. K. Minoshima, A. W. Kowalevicz, I. Hartl, E.P. Ippen, and J.G. Fujimoto, “Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator,” Opt. Lett. 26, 1516–1518 (2001).
    [Crossref]
  4. S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
    [Crossref]
  5. R. Osellame, N. Chiodo, V. Maselli, A. Yin, M. Zavelani-Rossi, G. Cerullo, P. Laporta, L. Aiello, S. De Nicola, P. Ferraro, A. Finizio, and G. Pierattini, “Optical properties of waveguides written by a 26 MHz stretched cavity Ti:sapphire femtosecond oscillator,” Opt. Express 13, 612–620 (2005), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-2-612.
    [Crossref] [PubMed]
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    [Crossref] [PubMed]
  7. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
    [Crossref]
  8. Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
    [Crossref]
  9. K.M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996).
    [Crossref] [PubMed]
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    [Crossref]
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  12. Thermal data for AF45 glass provided by M. deCastro, Schott glass.
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    [Crossref]
  14. L. Shah, A. Y. Arai, S. M. Eaton, and P. R. Herman, “Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate,” Opt. Express 13, 1999–2006 (2005), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-6-1999
    [Crossref] [PubMed]
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    [Crossref] [PubMed]

2005 (2)

2004 (2)

R. Osellame, N. Chiodo, G. Della Valle, S. Taccheo, R. Ramponi, G. Cerullo, A. Killi, U. Morgner, M. Lederer, and D. Kopf, “Optical waveguide writing with a diode-pumped femtosecond oscillator,” Opt. Lett. 29, 1900–1902 (2004).
[Crossref] [PubMed]

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

2003 (1)

C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
[Crossref]

2002 (1)

2001 (1)

2000 (1)

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

1997 (1)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

1996 (1)

1983 (1)

1951 (1)

A.F. Van Zee and C.L. Babcock, “A method for the measurement of thermal diffusivity of molten glass,” J. Am. Ceram. Soc.,  34, 244–250 (1951).
[Crossref]

Aiello, L.

Arai, A. Y.

Babcock, C.L.

A.F. Van Zee and C.L. Babcock, “A method for the measurement of thermal diffusivity of molten glass,” J. Am. Ceram. Soc.,  34, 244–250 (1951).
[Crossref]

Bado, P.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Borrelli, N.F.

Burghoff, J.

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

Cerullo, G.

Chiodo, N.

Davis, K.M.

De Nicola, S.

Della Valle, G.

Eaton, S. M.

Ferraro, P.

Finizio, A.

Florea, C.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Fujimoto, J.G.

Garcia, J.F.

C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
[Crossref]

Hartl, I.

Herman, P. R.

Herman, P.R.

P.R. Herman, R.S Marjoribanks, and A. Oettl, “Burst-ultrafast laser machining method,” US Patent (6,552,301 B2)

Hirao, K.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

K.M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996).
[Crossref] [PubMed]

Inouye, H.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

Ippen, E.P.

Jaluria, Y.

Y. Jaluria and K.E. Torrance, Computational Heat Transfer (Taylor & Francis, New York, 2003).

Killi, A.

Kopf, D.

Kowalevicz, A. W.

Laporta, P.

Lederer, M.

Marjoribanks, R.S

P.R. Herman, R.S Marjoribanks, and A. Oettl, “Burst-ultrafast laser machining method,” US Patent (6,552,301 B2)

Maselli, V.

Maynard, R.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Mazur, E.

C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
[Crossref]

Minoshima, K.

Mitsuyu, T.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

Miura, K.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

K.M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996).
[Crossref] [PubMed]

Morgner, U.

Nolte, S.

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

Oettl, A.

P.R. Herman, R.S Marjoribanks, and A. Oettl, “Burst-ultrafast laser machining method,” US Patent (6,552,301 B2)

Okamura, Y.

Osellame, R.

Pierattini, G.

Qiu, J.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

Ramponi, R.

Said, A.A.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Schaffer, C.B.

C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
[Crossref]

Shah, L.

Sikorski, Y.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Streltsov, A.M.

Sugimoto, N.

Taccheo, S.

Torrance, K.E.

Y. Jaluria and K.E. Torrance, Computational Heat Transfer (Taylor & Francis, New York, 2003).

Tünnermann, A.

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

Van Zee, A.F.

A.F. Van Zee and C.L. Babcock, “A method for the measurement of thermal diffusivity of molten glass,” J. Am. Ceram. Soc.,  34, 244–250 (1951).
[Crossref]

Will, M.

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

Winick, K.

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

Yamamoto, S.

Yin, A.

Yoshinaka, S.

Zavelani-Rossi, M.

Appl. Opt. (1)

Appl. Phys. A (1)

C.B. Schaffer, J.F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003).
[Crossref]

Appl. Phys. Lett. (1)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[Crossref]

Electron. Lett. (1)

Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36, 226–227 (2000).
[Crossref]

J. Am. Ceram. Soc. (1)

A.F. Van Zee and C.L. Babcock, “A method for the measurement of thermal diffusivity of molten glass,” J. Am. Ceram. Soc.,  34, 244–250 (1951).
[Crossref]

J. Modern Optics. (1)

S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Ultrafast laser processing: new options for three-dimensional photonic structures,” J. Modern Optics. 51, 2533–2542 (2004).
[Crossref]

J. Opt. Soc. Am. B (1)

Opt. Express (2)

Opt. Lett. (3)

Other (3)

P.R. Herman, R.S Marjoribanks, and A. Oettl, “Burst-ultrafast laser machining method,” US Patent (6,552,301 B2)

Y. Jaluria and K.E. Torrance, Computational Heat Transfer (Taylor & Francis, New York, 2003).

Thermal data for AF45 glass provided by M. deCastro, Schott glass.

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Figures (5)

Fig. 1.
Fig. 1.

Ultrafast laser beam delivery system for transverse waveguide writing

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Fig. 2.
Fig. 2.

Optical microscope images showing heat affected zones created in AF45 borosilicate glass with 450-nJ pulse energy from a 1045-nm femtosecond laser. Total pulse (top) and fluence accumulation (bottom) is shown for each column and the laser repetition rate is indicated for each row. Laser direction is normal to page.

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Fig. 3.
Fig. 3.

Finite-difference model of glass temperature versus exposure, at a radial position of 2 µm from the center of the laser beam.

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Fig. 4.
Fig. 4.

Melt radius versus net fluence: numerical simulation (solid line) assuming 40% absorption and observed waveguide diameter (solid circle).

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Fig. 5.
Fig. 5.

Left to right: cross sectional (a) and transverse (b) microscope images, and 1550-nm mode profile (c) of waveguide written in AF45 at 1 MHz, 520 nJ, 0.65-NA and 15 mm/s. The red arrows indicate the direction of the femtosecond laser.

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Tables (1)

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Table 1. Glass properties Schott and Corning glasses [12]

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Equations (2)

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E ( r ) = E 0 exp ( − r 2 ⁄ w 0 2 )
∂ ∂ r ( r 2 ∂ T ∂ r ) = r 2 D ∂ T ∂ t

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