Abstract

Magneto-optical Kerr effect (MOKE) spectroscopy in the -1st diffraction order with p-polarized incidence is applied to study arrays of submicron Permalloy wires at polar magnetization. A theoretical approach combining two methods, the local modes method neglecting the edge effects of wires and the rigorous coupled wave analysis, is derived to evaluate the diffraction losses due to irregularities of the wire edges. A new parameter describing the quality of the edges is defined according to their contribution in the diffracted MOKE. The quality factor, evaluated for two different samples, is successfully compared with irregularities visible on atomic force microscopy pictures.

© 2005 Optical Society of America

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  1. H.-T. Huang and F. L. Terry, “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,” Thin Solid Films 455– 456, 828–836 (2004).
    [Crossref]
  2. R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
    [Crossref]
  3. R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
    [Crossref]
  4. P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
    [Crossref]
  5. P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).
  6. D. Franta and I. Ohlidal, “Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,” J. Mod. Opt. 45, 903–934 (1998).
    [Crossref]
  7. I. Ohlidal and D. Franta, “Ellipsometry of Thin Film Systems,” Progress in Optics 41, 181–282 (2000).
    [Crossref]
  8. J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
    [Crossref]
  9. M. Grimsditch and P. Vavassori, “The diffracted magneto-optic Kerr effect: what does it tell you?” J. Phys.: Condens. Matter. 16, R275–R294 (2004).
    [Crossref]
  10. Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
    [Crossref]
  11. J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
    [Crossref]
  12. D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
    [Crossref]
  13. A. Vial and D. Van Labeke, “Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,” Opt. Commun. 153, 125–133 (1998).
    [Crossref]
  14. Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
    [Crossref]
  15. Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
    [Crossref]
  16. P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
    [Crossref]
  17. R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
    [Crossref]
  18. R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
    [Crossref]
  19. R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
    [Crossref]
  20. S. Ingvarsson, “Magnetization dynamics in transition metal ferromagnets studied by magneto-tunneling and ferromagnetic resonance,” (Ph.D. thesis, Brown University, 2001).
  21. K. Rokushima and J. Yamakita, “Analysis of anisotropic dielectric gratings,” J. Opt. Soc. Am. 73, 901–908 (1983).
    [Crossref]
  22. G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
    [Crossref]
  23. P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
    [Crossref]
  24. D. F. Edwards“Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Tokyo, 1998); H. R. Philipp, “Silicon Dioxide (SiO2) (Glass),” ibid.

2005 (3)

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

2004 (4)

H.-T. Huang and F. L. Terry, “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,” Thin Solid Films 455– 456, 828–836 (2004).
[Crossref]

M. Grimsditch and P. Vavassori, “The diffracted magneto-optic Kerr effect: what does it tell you?” J. Phys.: Condens. Matter. 16, R275–R294 (2004).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

2003 (4)

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

2002 (3)

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

2000 (1)

I. Ohlidal and D. Franta, “Ellipsometry of Thin Film Systems,” Progress in Optics 41, 181–282 (2000).
[Crossref]

1999 (1)

P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
[Crossref]

1998 (3)

D. Franta and I. Ohlidal, “Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,” J. Mod. Opt. 45, 903–934 (1998).
[Crossref]

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

A. Vial and D. Van Labeke, “Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,” Opt. Commun. 153, 125–133 (1998).
[Crossref]

1997 (1)

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

1996 (1)

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

1983 (1)

Antos, R.

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

Aoyama, M.

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

Armelles, G.

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Backstrom, J.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Baida, F.

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

Bonanni, A.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

Briones, F.

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Bruno, P.

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

Chappert, C.

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

Costa-Kramer, J. L.

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Demokritov, S.O.

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

Diserens, M.

P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
[Crossref]

Dos Santos, A. D.

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Edwards, D. F.

D. F. Edwards“Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Tokyo, 1998); H. R. Philipp, “Silicon Dioxide (SiO2) (Glass),” ibid.

Franta, D.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

I. Ohlidal and D. Franta, “Ellipsometry of Thin Film Systems,” Progress in Optics 41, 181–282 (2000).
[Crossref]

D. Franta and I. Ohlidal, “Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,” J. Mod. Opt. 45, 903–934 (1998).
[Crossref]

Garcia-Mochales, P.

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Geoffroy, O.

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

Grimsditch, M.

M. Grimsditch and P. Vavassori, “The diffracted magneto-optic Kerr effect: what does it tell you?” J. Phys.: Condens. Matter. 16, R275–R294 (2004).
[Crossref]

Guerrero, C.

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

Guizal, B.

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

Hillebrands, B.

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

Hones, P.

P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
[Crossref]

Horie, M.

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

Huang, H.-T.

H.-T. Huang and F. L. Terry, “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,” Thin Solid Films 455– 456, 828–836 (2004).
[Crossref]

Ingvarsson, S.

S. Ingvarsson, “Magnetization dynamics in transition metal ferromagnets studied by magneto-tunneling and ferromagnetic resonance,” (Ph.D. thesis, Brown University, 2001).

Jaque, D.

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Klapetek, P.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

Korn, T.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Kunze, J.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Levy, F.

P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
[Crossref]

Liu, K.

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

Martin, J. I.

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Meier, G.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Melle, S.

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

Merkt, U.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Mistrik, J.

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

Montaigne-Ramil, A.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

Murakami, K.

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

Neuber, G.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Nogues, J.

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

Novosad, V.

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

Novosad, V. A.

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Ohlidal, I.

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

I. Ohlidal and D. Franta, “Ellipsometry of Thin Film Systems,” Progress in Optics 41, 181–282 (2000).
[Crossref]

D. Franta and I. Ohlidal, “Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,” J. Mod. Opt. 45, 903–934 (1998).
[Crossref]

Pagani, Y.

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

Pannetier, B.

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

Pels, C.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Philipp, H. R.

D. F. Edwards“Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Tokyo, 1998); H. R. Philipp, “Silicon Dioxide (SiO2) (Glass),” ibid.

Pistora, J.

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

Pokorny, P.

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

Postava, K.

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

Rauer, R.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Rokushima, K.

Rubhausen, M.

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Schlenker, M.

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Schuller, I. K.

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

Sitter, H.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

Souche, Y.

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Stifter, D.

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

Suzuki, Y.

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

Terry, F. L.

H.-T. Huang and F. L. Terry, “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,” Thin Solid Films 455– 456, 828–836 (2004).
[Crossref]

Van Labeke, D.

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

A. Vial and D. Van Labeke, “Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,” Opt. Commun. 153, 125–133 (1998).
[Crossref]

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Vavassori, P.

M. Grimsditch and P. Vavassori, “The diffracted magneto-optic Kerr effect: what does it tell you?” J. Phys.: Condens. Matter. 16, R275–R294 (2004).
[Crossref]

Veillet, P.

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

Vial, A.

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

A. Vial and D. Van Labeke, “Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,” Opt. Commun. 153, 125–133 (1998).
[Crossref]

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

Vicent, J. L.

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

Visnovsky, S.

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

Yamaguchi, T.

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

Yamakita, J.

Acta Phys. Slov. (1)

P. Klapetek, I. Ohlidal, D. Franta, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter, “Atomic force microscopy characterization of ZnTe epitaxial films,” Acta Phys. Slov. 53, 223–230 (2003).

Appl. Phys. Lett. (3)

P. Garcia-Mochales, J. L. Costa-Kramer, G. Armelles, F. Briones, D. Jaque, J. I. Martin, and J. L. Vicent, “Simulations and experiments on magneto-optical diffraction by an array of epitaxial Fe(001) microsquares,” Appl. Phys. Lett. 81, 3206–3208 (2002).
[Crossref]

R. Antos, J. Mistrik, T. Yamaguchi, S. Visnovsky, S.O. Demokritov, and B. Hillebrands, “Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders,” Appl. Phys. Lett. 86, 231101 (2005).
[Crossref]

G. Neuber, R. Rauer, J. Kunze, T. Korn, C. Pels, G. Meier, U. Merkt, J. Backstrom, and M. Rubhausen, “Temperature-dependent spectral generalized magneto-optical ellipsometry,” Appl. Phys. Lett. 83, 4509–4511 (2003).
[Crossref]

Appl. Surf. Sci. (1)

R. Antos, I. Ohlidal, J. Mistrik, K. Murakami, T. Yamaguchi, J. Pistora, M. Horie, and S. Visnovsky, “Spectroscopic ellipsometry on lamellar gratings,” Appl. Surf. Sci. 244, 225–229 (2005).
[Crossref]

J. Appl. Phys. (1)

R. Antos, J. Pistora, I. Ohlidal, K. Postava, J. Mistrik, T. Yamaguchi, S. Visnovsky, and M. Horie, “Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate,” J. Appl. Phys. 97, 053107 (2005).
[Crossref]

J. Magn. Magn. Mater. (4)

Y. Suzuki, C. Chappert, P. Bruno, and P. Veillet, “Simple model for the magneto-optical Kerr diffraction of a regular array of magnetic dots,” J. Magn. Magn. Mater. 165, 516–519 (1997).
[Crossref]

R. Antos, J. Mistrik, M. Aoyama, T. Yamaguchi, S. Visnovsky, and B. Hillebrands, “Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders,” J. Magn. Magn. Mater. 272– 276, 1670–1671 (2004).
[Crossref]

J. I. Martin, J. Nogues, K. Liu, J. L. Vicent, and I. K. Schuller, “Ordered magnetic nanostructures: fabrication and properties,” J. Magn. Magn. Mater. 256, 449–501 (2003).
[Crossref]

Y. Souche, V. Novosad, B. Pannetier, and O. Geoffroy, “Magneto-optical diffraction and transverse Kerr effect,” J. Magn. Magn. Mater. 177– 181, 1277–1278 (1998).
[Crossref]

J. Mod. Opt. (1)

D. Franta and I. Ohlidal, “Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,” J. Mod. Opt. 45, 903–934 (1998).
[Crossref]

J. Opt. Soc. Am. (1)

J. Phys.: Condens. Matter. (1)

M. Grimsditch and P. Vavassori, “The diffracted magneto-optic Kerr effect: what does it tell you?” J. Phys.: Condens. Matter. 16, R275–R294 (2004).
[Crossref]

Nanotechnology (1)

J. L. Costa-Kramer, C. Guerrero, S. Melle, P. Garcia-Mochales, and F. Briones, “Pure magneto-optic diffraction by a periodic domain structure,” Nanotechnology 14, 239–244 (2003).
[Crossref]

Opt. Commun. (3)

D. van Labeke, A. Vial, V. A. Novosad, Y. Souche, M. Schlenker, and A. D. Dos Santos, “Diffraction of light by a corrugated magnetic grating: experimental results and calculation using a perturbation approximation to the Rayleigh method,” Opt. Commun. 124, 519–528 (1996).
[Crossref]

A. Vial and D. Van Labeke, “Diffraction hysteresis loop modelisation in transverse magneto-optical Kerr effect,” Opt. Commun. 153, 125–133 (1998).
[Crossref]

Y. Pagani, D. Van Labeke, B. Guizal, A. Vial, and F. Baida, “Diffraction hysteresis loop modeling in magneto-optical gratings,” Opt. Commun. 209, 237–244 (2002).
[Crossref]

Progress in Optics (1)

I. Ohlidal and D. Franta, “Ellipsometry of Thin Film Systems,” Progress in Optics 41, 181–282 (2000).
[Crossref]

Surf. Coat. Tech. (1)

P. Hones, M. Diserens, and F. Levy, “Characterization of sputter-deposited chromium oxide thin films,” Surf. Coat. Tech. 120– 121, 277–283 (1999).
[Crossref]

Surf. Interface Anal. (1)

P. Klapetek, I. Ohlidal, D. Franta, and P. Pokorny, “Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,” Surf. Interface Anal. 34, 559–564 (2002).
[Crossref]

Thin Solid Films (1)

H.-T. Huang and F. L. Terry, “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring,” Thin Solid Films 455– 456, 828–836 (2004).
[Crossref]

Trans. Magn. Soc. Japan (1)

R. Antos, J. Mistrik, S. Visnovsky, M. Aoyama, T. Yamaguchi, and B. Hillebrands, “Characterization of Permalloy wires by optical and magneto-optical spectroscopy,” Trans. Magn. Soc. Japan 4, 282–285 (2004).
[Crossref]

Other (2)

S. Ingvarsson, “Magnetization dynamics in transition metal ferromagnets studied by magneto-tunneling and ferromagnetic resonance,” (Ph.D. thesis, Brown University, 2001).

D. F. Edwards“Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Tokyo, 1998); H. R. Philipp, “Silicon Dioxide (SiO2) (Glass),” ibid.

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Figures (4)

Fig. 1.
Fig. 1.

Atomic force microscopy pictures of the analyzed sample (a) and a sample of higher quality (b). Top view of each sample is accompanied by the cross section.

Fig. 2.
Fig. 2.

Absolute values of two simulated amplitude reflectances, |rsp | (a) and |rpp | (b), in the-1st diffraction order. Simulations of the RCWA (solid curves) are compared with the LMM (dotted curves).

Fig. 3.
Fig. 3.

Polar Kerr rotation (a) and ellipticity (b) in the 1st diffraction order for p-polarized incidence. Experimental data (circles) are compared with simulations of RCWA (solid curves) and LMM (dotted curves).

Fig. 4.
Fig. 4.

Polar Kerr rotation (a) and ellipticity (b) in the -1st diffraction order for p-polarized incidence. Experimental data (circles) are compared with simulations of the combined RCWA-LMM model (solid curves).

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

r α β ( n = 0 ) = fr w , α β + ( 1 f ) r b , α β + Δ r α β ( n = 0 ) ,
r α β ( n 0 ) = i 2 π n ( r w , α β r b , α β ) ( 1 e 2 π inf ) + Δ r α β ( n 0 ) ,
θ p ( 1 ) i ε p ( 1 ) = r sp ( 1 ) r pp ( 1 ) .
Δ r pp ( 1 ) ¯ = η ( λ ) Δ r pp ( 1 )

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