Abstract

For the compact integration of photonic circuits, wavelength-scale structures with a high index contrast are a key requirement. We developed a fabrication process for these nanophotonic structures in Silicon-on-insulator using CMOS processing techniques based on deep UV lithography. We have fabricated both photonic wires and photonic crystal waveguides and show that, with the same fabrication technique, photonic wires have much less propagation loss than photonic crystal waveguides. Measurements show losses of 0.24dB/mm for photonic wires, and 7.5dB/mm for photonic crystal waveguides. To tackle the coupling to fiber, we studied and fabricated vertical fiber couplers with coupling efficiencies of over 21%. In addition, we demonstrate integrated compact spot-size converters with a mode-to-mode coupling efficiency of over 70%.

© 2004 Optical Society of America

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References

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Electron. Lett. (2)

J. Arentoft, T. Sondergaard, M. Kristensen, A. Boltasseva, M. Thorhauge, and L. Frandsen, �??Low-loss silicon-on-insulator photonic crystal waveguides,�?? Electron. Lett. 38, 274�??275 (2002).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, �??Low loss mode size converter from 0.3 µm square Si waveguides to singlemode fibres,�?? Electron. Lett. 38, 1669�??1700 (2002).
[CrossRef]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, �??An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,�?? IEEE J. Quantum Electron. 38, 949�??955, (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

W. Bogaerts, V.Wiaux, D. Taillaert, S. Beckx, B. Luyssaert, P. Bienstman, and R. Baets, �??Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography,�?? IEEE J. Sel. Top. Quantum Electron. 8, 928�??934 (2002).

J. Lightwave Technol. (1)

Microelectronics Journal (1)

�??SOITEC�??s Unibond(R) process,�?? Microelectronics Journal 27(4/5), R36 (1996).

Photonics Technology Letters (1)

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, �??Low-loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography,�?? accepted for publication in Photonics Technology Letters (2004).

Proc. SPIE (1)

W. Bogaerts, V. Wiaux, P. Dumon, D. Taillaert, J. Wouters, S. Beckx, J. Van Campenhout, B. Luyssaert, D. Van Thourhout, and R. Baets, �??Large-scale production techniques for photonic nanostructures,�?? Proc. SPIE 5225, 101�??112 (2003).

Other (2)

J. D. Joannopolous, R. Meade, and J.Winn, Photonic Crystals - Molding the Flow of Light (Princeton University Press, Princeton, N.J., 1995).

M. Vaughan. The Fabry-Perot interferometer (Adam Hilger, Bristol, 1989).

Supplementary Material (2)

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